Number | Name | Date | Kind |
---|---|---|---|
3707765 | Coleman | Jan 1973 | |
3897274 | Stehlin et al. | Jul 1975 | |
4754314 | Scott et al. | Jun 1988 | |
4789642 | Lorenzo et al. | Dec 1988 | |
4874718 | Inoue | Oct 1989 | |
5121185 | Tamba et al. | Jun 1992 | |
5172203 | Hayashi | Dec 1992 | |
5229316 | Lee et al. | Jul 1993 | |
5346841 | Yajima et al. | Sep 1994 | |
5364800 | Joyner | Nov 1994 | |
5389563 | Kuroi et al. | Feb 1995 | |
5536675 | Bohr | Jul 1996 | |
5597738 | Kurtz et al. | Jan 1997 | |
5608252 | Nakato | Mar 1997 |
Number | Date | Country |
---|---|---|
51-53488 | May 1976 | JP |
57-45947 | Mar 1982 | JP |
63-2350 | Jan 1988 | JP |
4-196478 | Jul 1992 | JP |
5-175470 | Jul 1993 | JP |
6-140427 | May 1994 | JP |
7-94439 | Apr 1995 | JP |
Entry |
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Davis, J.R., et al, “Dielectrically Isolated . . . Masked Oxygen Ion Implantation”, Appl. Phys. Lett. vol. 51, No. 18, pp. 419-421 Nov. 2, 1987. |