Number | Date | Country | Kind |
---|---|---|---|
58-138858 | Jul 1983 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4001864 | Gibbons | Jun 1977 | |
4053925 | Burr et al. | Oct 1977 | |
4082571 | Graul et al. | Apr 1978 | |
4116719 | Shimizu et al. | Sep 1978 | |
4318750 | Rai-Choudhury et al. | Mar 1982 | |
4328610 | Thompson et al. | May 1982 | |
4332627 | Schmitt et al. | Jun 1982 | |
4459159 | O'Mara | Jul 1984 | |
4490182 | Scovell | Dec 1984 | |
4505759 | O'Mara | Mar 1985 | |
4506436 | Bakeman, Jr. et al. | Mar 1985 | |
4535529 | Jochems | Aug 1985 |
Number | Date | Country |
---|---|---|
0018430 | Feb 1981 | JPX |
57-87119 | May 1982 | JPX |
Entry |
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Cerofouno et al., J. Appl. Phys. 55 (9184) 579. |
Srinivasan, "Silicon Epitaxy for High Performance Integrated Circuits," Solid State Technology, Nov. 1981. |
Yaney et al., "The Use of Thin Epitaxial Silicon Layers For MOS VLSI," IEDM, pp. 236-239, Nov. 1981. |
IBM Technical Disclosure Bulletin, vol. 25, No. 4, Sep. 1982. |
Extended Abstracts of the Electrochemical Society, vol. 82-2, Oct. 1982. |
Japanese Journal of Applied Physics, vol. 21, Supplement 21-1, 1982. |