Thermal treatment for modifying the properties of semiconductor bodies

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H01L21/324

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/324Thermal treatment for modifying the properties of semiconductor bodies

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for separating dies from a semiconductor substrate
- Patent number 12,170,226
- Issue date Dec 17, 2024
- Infineon Technologies AG
- Franz-Josef Pichler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate structure in semiconductor device and method of forming the same
- Patent number 12,166,074
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Yi Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having buried gate structure and method for fa...
- Patent number 12,154,948
- Issue date Nov 26, 2024
- SK Hynix Inc.
- Seong-Wan Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with treated interfacial layer on silicon germ...
- Patent number 12,148,843
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tuning threshold voltage through meta stable plasma treatment
- Patent number 12,148,620
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Jyun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and corresponding method
- Patent number 12,148,628
- Issue date Nov 19, 2024
- STMicroelectronics S.r.l.
- Roseanne Duca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET devices and methods of forming the same
- Patent number 12,148,673
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming source/drain contacts
- Patent number 12,142,663
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Performing annealing process to improve Fin quality of a FinFET sem...
- Patent number 12,142,490
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzung-Yi Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon wafer and manufacturing method of the same
- Patent number 12,142,645
- Issue date Nov 12, 2024
- Sumco Corporation
- Kazuhisa Torigoe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor structure and methods of forming same
- Patent number 12,132,107
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 12,131,913
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced etching technologies for straight, tall and uniform fins a...
- Patent number 12,131,912
- Issue date Oct 29, 2024
- Intel Corporation
- Muralidhar S. Ambati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing ferromagnetic-dielectric composite material
- Patent number 12,125,713
- Issue date Oct 22, 2024
- Ferric Inc.
- Michael Lekas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Punch through stopper in bulk finFET device
- Patent number 12,119,393
- Issue date Oct 15, 2024
- Adeia Semiconductor Solutions LLC
- Veeraraghavan S. Basker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 12,119,267
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Cheng Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate structure and method with enhanced gate contact and threshold...
- Patent number 12,119,403
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Max Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of junction termination extension in high voltage...
- Patent number 12,113,101
- Issue date Oct 8, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Subhash Srinivas Pidaparthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated dipole region for transistor
- Patent number 12,112,951
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure, HEMT structure and method of forming the same
- Patent number 12,107,156
- Issue date Oct 1, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yao-Chung Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with implant and method of manufacturing same
- Patent number 12,100,738
- Issue date Sep 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid thermal annealing (RTA) methodologies for integration of pero...
- Patent number 12,094,923
- Issue date Sep 17, 2024
- Kepler Computing Inc.
- Niloy Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 12,087,827
- Issue date Sep 10, 2024
- Fuji Electric Co., Ltd.
- Motoyoshi Kubouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving transistor performance
- Patent number 12,087,859
- Issue date Sep 10, 2024
- Texas Instruments Incorporated
- Steven Kummerl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structure with uniform threshold voltage distr...
- Patent number 12,087,844
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a composite structure comprising a thin monocr...
- Patent number 12,087,631
- Issue date Sep 10, 2024
- Soitec
- Gweltaz Gaudin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and formation method of fin-like field effect transistor
- Patent number 12,087,643
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shiu-Ko Jangjian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy-saving heat treatment device for metal substrate in corrosiv...
- Patent number 12,080,569
- Issue date Sep 3, 2024
- CNBM RESEARCH INSTITUTE FOR ADVANCED GLASS MATERIALS GROUP CO., LTD.
- Joerg Palm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature offset and zone control tuning
- Patent number 12,080,573
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Ole Luckner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,080,770
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING PHOTONICS STRUCTURES
- Publication number 20240411090
- Publication date Dec 12, 2024
- Micron Technology, Inc.
- Gurtej Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD FOR REDUCING RANDOM DOPAN...
- Publication number 20240413004
- Publication date Dec 12, 2024
- NANYA TECHNOLOGY CORPORATION
- Yu Jie JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Making an EMI Shield Using Inten...
- Publication number 20240413095
- Publication date Dec 12, 2024
- STATS ChipPAC Pte Ltd.
- YongMoo Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...
- Publication number 20240412989
- Publication date Dec 12, 2024
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXY FAST RAMP TEMPERATURE CONTROL SYSTEMS AND PROCESSES
- Publication number 20240404891
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Junwei Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES
- Publication number 20240404857
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hao LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PERFORMING TRENCH ISOLATION PROCESS
- Publication number 20240395597
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hung-Yu YEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND SEMICONDUCTOR SUBSTRATE MANUFACTURING...
- Publication number 20240395584
- Publication date Nov 28, 2024
- GlobalWafers Japan Co., Ltd.
- Takuya KAKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240395936
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fang-Liang LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID-STATE DRIVE WITH THERMAL ANNEAL FUNCTION
- Publication number 20240395327
- Publication date Nov 28, 2024
- Rambus Inc.
- Gary B. Bronner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FREQUENCY AND PHASE CONTROLLED TRANSDUCERS AND SENSING
- Publication number 20240387204
- Publication date Nov 21, 2024
- Anand Deo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE OF HIGH-RESISTIVITY SILICON-ON-INSULATOR EMBEDDED WITH CH...
- Publication number 20240387241
- Publication date Nov 21, 2024
- ZING SEMICONDUCTOR CORPORATION
- Xing WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Source/Drain Structure of Semiconductor Device and Method of Formin...
- Publication number 20240387700
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINFET DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20240387287
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING THRESHOLD VOLTAGE THROUGH META STABLE PLASMA TREATMENT
- Publication number 20240387178
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Jyun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nanostructure Field-Effect Transistor Device and Method of Forming
- Publication number 20240387628
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Wei Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SOURCE/DRAIN CONTACTS
- Publication number 20240379814
- Publication date Nov 14, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERFORMING ANNEALING PROCESS TO IMPROVE FIN QUALITY OF A FINFET SEM...
- Publication number 20240379381
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Tzung-Yi Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME
- Publication number 20240379394
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Huang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE
- Publication number 20240379457
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- SUNG-LI WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES COMPRISING CRYSTALLINE MATERIALS
- Publication number 20240379739
- Publication date Nov 14, 2024
- Micron Technology, Inc.
- Michael Mutch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROCESSING A SUBSTRATE
- Publication number 20240379380
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-chun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240379793
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shen-Yang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING NITROGEN-CONTAINING LAYERS AS OXIDATION BLOCKING LAYERS
- Publication number 20240379350
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR A...
- Publication number 20240371936
- Publication date Nov 7, 2024
- ASAHI KASEI MICRODEVICES CORPORATION
- Shuntaro Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINFET FABRICATION METHODS
- Publication number 20240371970
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20240371965
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Yuan KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR WAFER AND SEMICONDUCTOR DEVICE
- Publication number 20240363363
- Publication date Oct 31, 2024
- GlobalWafers Japan Co., Ltd.
- Ken HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS

Thermal treatment for modifying the properties of semiconductor bodies

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for separating dies from a semiconductor substrate

Gate structure in semiconductor device and method of forming the same

Semiconductor device having buried gate structure and method for fa...

Semiconductor device with treated interfacial layer on silicon germ...

Tuning threshold voltage through meta stable plasma treatment

Semiconductor device and corresponding method

FinFET devices and methods of forming the same

Method for forming source/drain contacts

Performing annealing process to improve Fin quality of a FinFET sem...

Silicon wafer and manufacturing method of the same

Semiconductor structure and methods of forming same

Methods, systems, and apparatus for processing substrates using one...

Advanced etching technologies for straight, tall and uniform fins a...

Method for manufacturing ferromagnetic-dielectric composite material

Punch through stopper in bulk finFET device

Method for manufacturing semiconductor structure

Gate structure and method with enhanced gate contact and threshold...

Method and system of junction termination extension in high voltage...

Integrated dipole region for transistor

Semiconductor structure, HEMT structure and method of forming the same

Semiconductor device with implant and method of manufacturing same

Rapid thermal annealing (RTA) methodologies for integration of pero...

Semiconductor device

Method for improving transistor performance

Semiconductor device structure with uniform threshold voltage distr...

Method for producing a composite structure comprising a thin monocr...

Structure and formation method of fin-like field effect transistor

Energy-saving heat treatment device for metal substrate in corrosiv...

Temperature offset and zone control tuning

Semiconductor device and method

Patents Applicationslast 30 patents

METHOD OF FORMING PHOTONICS STRUCTURES

SEMICONDUCTOR DEVICE MANUFACTURING METHOD FOR REDUCING RANDOM DOPAN...

Semiconductor Device and Method of Making an EMI Shield Using Inten...

THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...

EPITAXY FAST RAMP TEMPERATURE CONTROL SYSTEMS AND PROCESSES

SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES

METHOD FOR PERFORMING TRENCH ISOLATION PROCESS

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

HEAT TREATMENT APPARATUS AND SEMICONDUCTOR SUBSTRATE MANUFACTURING...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SOLID-STATE DRIVE WITH THERMAL ANNEAL FUNCTION

FREQUENCY AND PHASE CONTROLLED TRANSDUCERS AND SENSING

STRUCTURE OF HIGH-RESISTIVITY SILICON-ON-INSULATOR EMBEDDED WITH CH...

Source/Drain Structure of Semiconductor Device and Method of Formin...

Support Plate for Localized Heating in Thermal Processing Systems

FINFET DEVICES AND METHODS OF FORMING THE SAME

TUNING THRESHOLD VOLTAGE THROUGH META STABLE PLASMA TREATMENT

Nanostructure Field-Effect Transistor Device and Method of Forming

METHOD FOR FORMING SOURCE/DRAIN CONTACTS

PERFORMING ANNEALING PROCESS TO IMPROVE FIN QUALITY OF A FINFET SEM...

SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME

METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE

DEVICES COMPRISING CRYSTALLINE MATERIALS

SYSTEMS AND METHODS FOR PROCESSING A SUBSTRATE

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

FORMING NITROGEN-CONTAINING LAYERS AS OXIDATION BLOCKING LAYERS

SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR A...

FINFET FABRICATION METHODS

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

METHOD OF MANUFACTURING SEMICONDUCTOR WAFER AND SEMICONDUCTOR DEVICE