Thermal treatment for modifying the properties of semiconductor bodies

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H01L21/324

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/324Thermal treatment for modifying the properties of semiconductor bodies

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Patents Grantslast 30 patents

Information Patent Grant
Rapid thermal processing system with cooling system
- Patent number 12,362,194
- Issue date Jul 15, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky barrier diode with reduced leakage current and method of f...
- Patent number 12,363,925
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Meng-Han Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preparation method for semiconductor structure involving the replac...
- Patent number 12,349,377
- Issue date Jul 1, 2025
- ENKRIS SEMICONDUCTOR, INC.
- Kai Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 12,341,031
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment device and treatment method
- Patent number 12,341,008
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal contacts to group IV semiconductors by inserting interfacial...
- Patent number 12,336,263
- Issue date Jun 17, 2025
- ACORN SEMI, LLC
- Walter A. Harrison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming photonics structures
- Patent number 12,326,599
- Issue date Jun 10, 2025
- Micron Technology, Inc.
- Gurtej Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective passivation and selective deposition
- Patent number 12,322,593
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Jan Willem Hub Maes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for manufacturing the same
- Patent number 12,324,220
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Sung-Li Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure heating apparatus
- Patent number 12,322,613
- Issue date Jun 3, 2025
- Samsung Electronics Co., Ltd.
- Tatsuya Ishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing bipolar complementary-metal-oxide-semicondu...
- Patent number 12,324,226
- Issue date Jun 3, 2025
- Newport Fab, LLC
- Mantavya Sinha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,317,524
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Ling Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device, semiconductor device...
- Patent number 12,315,728
- Issue date May 27, 2025
- Hitachi Power Semiconductor Device, Ltd.
- Tomoyasu Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of highly selective silicon oxide removal
- Patent number 12,315,736
- Issue date May 27, 2025
- Applied Materials, Inc.
- Lala Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing thereof
- Patent number 12,315,740
- Issue date May 27, 2025
- Denso Corporation
- Kenta Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making a radio frequency silicon-on-insulator (RFSOI) wa...
- Patent number 12,315,722
- Issue date May 27, 2025
- ATOMERA INCORPORATED
- Nyles Wynn Cody
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Step-stacked nanowire CMOS structure for low power logic device and...
- Patent number 12,317,588
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 12,315,795
- Issue date May 27, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Luguang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,308,371
- Issue date May 20, 2025
- NATIONAL TAIWAN UNIVERSITY
- Fang-Liang Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor silicon wafer
- Patent number 12,308,228
- Issue date May 20, 2025
- Globalwafers Japan Co., Ltd
- Takeshi Senda
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor substrate boat and methods of using the same
- Patent number 12,308,266
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Huang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate stack treatment
- Patent number 12,300,549
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chandrashekhar Prakash Savant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,300,747
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zheng-Long Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,293,930
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in an electronics...
- Patent number 12,292,484
- Issue date May 6, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-temperature direct growth method of multilayer graphene, pellic...
- Patent number 12,287,568
- Issue date Apr 29, 2025
- Korea Electronics Technology Institute
- Hyeong Keun Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of forming a transistor device having dipole-containing gate...
- Patent number 12,288,695
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Wei Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-temperature/beol-compatible highly scalable graphene synthesis...
- Patent number 12,281,388
- Issue date Apr 22, 2025
- DESTINATION 2D INC.
- Kaustav Banerjee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trench-gated heterostructure and double-heterostructure active devices
- Patent number 12,284,817
- Issue date Apr 22, 2025
- MaxPower Semiconductor Inc.
- Jun Zeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect reduction of semiconductor layers and semiconductor devices...
- Patent number 12,272,566
- Issue date Apr 8, 2025
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Ali Salih
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250241006
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zheng-Long CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE STACK TREATMENT
- Publication number 20250241055
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chandrashekhar Prakash Savant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250239472
- Publication date Jul 24, 2025
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-RESISTANCE SOURCE/DRAIN FEATURES
- Publication number 20250234610
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Min Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250226228
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Mitsuaki IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHANNEL FORMATION IN GATE-ALL-AROUND COMPLEMENTARY METAL-OXIDE-SEMI...
- Publication number 20250220970
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhon Jhy Liaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-TEMPERATURE/BEOL-COMPATIBLE HIGHLY SCALABLE GRAPHENE SYNTHESIS...
- Publication number 20250215570
- Publication date Jul 3, 2025
- Destination 2D Inc.
- Kaustav BANERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20250210341
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Yuta SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250201580
- Publication date Jun 19, 2025
- Fuji Electric Co., Ltd.
- Tatsuya HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHEET FOR WORKPIECE PROCESSING AND MANUFACTURING METHOD OF PROCESSE...
- Publication number 20250201619
- Publication date Jun 19, 2025
- LINTEC CORPORATION
- Akio FUKUMOTO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ANNEALING APPARATUS AND METHOD THEREOF
- Publication number 20250201604
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Chang HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF RF COMPONENTS
- Publication number 20250191935
- Publication date Jun 12, 2025
- STMicroelectronics (Tours) SAS
- Patrick HAUTTECOEUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND METHODS OF FORMING THE SAME
- Publication number 20250185278
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Wei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WARPAGE REDUCTION
- Publication number 20250183091
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Jooho LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PREHEATING MODULE, A DEVICE PROCESSING ASSEMBLY WITH A SU...
- Publication number 20250183064
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Mandar Vijay Deshpande
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING OXIDE FILM WITH UNIFORM THICKNESS
- Publication number 20250183095
- Publication date Jun 5, 2025
- DB HiTek Co., Ltd.
- Jong Won Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRU...
- Publication number 20250174456
- Publication date May 29, 2025
- Applied Materials, Inc.
- Shumao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DOSE IMPLANTATION FOR ULTRATHIN SEMICONDUCTOR-ON-INSULATOR SUB...
- Publication number 20250169120
- Publication date May 22, 2025
- STMicroelectronics, Inc.
- JOCELYNE GIMBERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20250169140
- Publication date May 22, 2025
- UNITED MICROELECTRONICS CORP.
- Chia-Ming Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20250159915
- Publication date May 15, 2025
- Fuji Electric Co., Ltd.
- Tatsuya NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD FOR FORMING THE SAME
- Publication number 20250159916
- Publication date May 15, 2025
- UNITED MICROELECTRONICS CORP.
- Ko-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250159954
- Publication date May 15, 2025
- Fuji Electric Co., Ltd.
- Hiroki WAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20250149344
- Publication date May 8, 2025
- UNITED MICROELECTRONICS CORP.
- MING THAI CHAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REDUCING WARPAGE OCCURRED TO SUBSTRATE DURING PACKAGING...
- Publication number 20250149348
- Publication date May 8, 2025
- TONG HSING ELECTRONIC INDUSTRIES, LTD.
- YU-HSIANG LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LAYERED EPITAXIAL STACK AND METHODS FOR PREPARING THE SAME
- Publication number 20250142911
- Publication date May 1, 2025
- Applied Materials, Inc.
- Arvind KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PUNCH THROUGH STOPPER IN BULK FINFET DEVICE
- Publication number 20250142855
- Publication date May 1, 2025
- Adeia Semiconductor Solutions LLC
- Veeraraghavan S. Basker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR FABRICATING A DOUBLE SEMICONDUCTOR-ON-INSULATOR STRUCTURE
- Publication number 20250140601
- Publication date May 1, 2025
- SOITEC
- Carine Duret
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLINE WAFERS AND PROCESS FOR FORMING CRYSTALLINE WAFERS
- Publication number 20250140556
- Publication date May 1, 2025
- II-VI ADVANCED MATERIALS, LLC
- Y.K. Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WAFER DEBONDING PROCESS AND METHOD
- Publication number 20250132150
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che Chi Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...
- Publication number 20250132155
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- C30 - CRYSTAL GROWTH

Thermal treatment for modifying the properties of semiconductor bodies

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Rapid thermal processing system with cooling system

Schottky barrier diode with reduced leakage current and method of f...

Preparation method for semiconductor structure involving the replac...

Light irradiation type heat treatment method and heat treatment app...

Heat treatment device and treatment method

Metal contacts to group IV semiconductors by inserting interfacial...

Method of forming photonics structures

Selective passivation and selective deposition

Semiconductor structure and method for manufacturing the same

Pressure heating apparatus

Method of manufacturing bipolar complementary-metal-oxide-semicondu...

Semiconductor device and method

Method for manufacturing semiconductor device, semiconductor device...

Methods of highly selective silicon oxide removal

Semiconductor device and method for manufacturing thereof

Method for making a radio frequency silicon-on-insulator (RFSOI) wa...

Step-stacked nanowire CMOS structure for low power logic device and...

Semiconductor structure and manufacturing method thereof

Semiconductor device and manufacturing method thereof

Manufacturing method for semiconductor silicon wafer

Semiconductor substrate boat and methods of using the same

Gate stack treatment

Semiconductor device and manufacturing method thereof

Substrate processing apparatus, method of manufacturing semiconduct...

Method and system for thermal control of devices in an electronics...

Low-temperature direct growth method of multilayer graphene, pellic...

Method of forming a transistor device having dipole-containing gate...

Low-temperature/beol-compatible highly scalable graphene synthesis...

Trench-gated heterostructure and double-heterostructure active devices

Defect reduction of semiconductor layers and semiconductor devices...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

GATE STACK TREATMENT

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

LOW-RESISTANCE SOURCE/DRAIN FEATURES

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

CHANNEL FORMATION IN GATE-ALL-AROUND COMPLEMENTARY METAL-OXIDE-SEMI...

LOW-TEMPERATURE/BEOL-COMPATIBLE HIGHLY SCALABLE GRAPHENE SYNTHESIS...

SUBSTRATE TREATING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SHEET FOR WORKPIECE PROCESSING AND MANUFACTURING METHOD OF PROCESSE...

ANNEALING APPARATUS AND METHOD THEREOF

MANUFACTURING METHOD OF RF COMPONENTS

SEMICONDUCTOR DEVICE STRUCTURE AND METHODS OF FORMING THE SAME

SUBSTRATE WARPAGE REDUCTION

SUBSTRATE PREHEATING MODULE, A DEVICE PROCESSING ASSEMBLY WITH A SU...

METHOD OF FABRICATING OXIDE FILM WITH UNIFORM THICKNESS

THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRU...

HIGH DOSE IMPLANTATION FOR ULTRATHIN SEMICONDUCTOR-ON-INSULATOR SUB...

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD FOR FORMING THE SAME

SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

METHOD FOR REDUCING WARPAGE OCCURRED TO SUBSTRATE DURING PACKAGING...

MULTI-LAYERED EPITAXIAL STACK AND METHODS FOR PREPARING THE SAME

PUNCH THROUGH STOPPER IN BULK FINFET DEVICE

PROCESS FOR FABRICATING A DOUBLE SEMICONDUCTOR-ON-INSULATOR STRUCTURE

CRYSTALLINE WAFERS AND PROCESS FOR FORMING CRYSTALLINE WAFERS

CARRIER WAFER DEBONDING PROCESS AND METHOD

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...