Claims
- 1. A method of preparing a photoresist image which comprises admixing a copolymer of glycidyl methacrylate and allyl glycidyl ether having an inherent viscosity of at least about 0.25, an epoxide equivalent of at least about 0.65 epoxide equivalent per 100 grams of polymer and derived from reaction of a mixture consisting essentially of the monomers containing from about a 4 to 5 molar excess of glycidyl methacrylate per mole of allyl glycidyl ether with a photosensitive aromatic diazonium salt of a complex halogenide which decomposes upon exposure to electromagnetic or electron beam irradiation to release a Lewis Acid effective to initiate polymerization of said copolymer selected from compounds having the general formula (ArN.sub.2).sub.m (MX.sub.n+m) wherein Ar is an aryl or substituted aryl group; X is chlorine or fluorine, M is P, n is the oxidation state of M, and m is the number of diazonium groups as determined by the net charge on the anion (MX.sub.n+m).sup.-m, applying said mixture to a substrate, screening predetermined portions of said substrate, exposing the substrate to electron beam or electromagnetic irradiation to effect polymerization of said copolymer, removing said screening means and applying a suitable solvent to remove unpolymerized portions of said mixture.
- 2. A method as claimed in claim 1 wherein said irradiation is electromagnetic irradiation.
- 3. A method as claimed in claim 1 wherein said substrate is metal, plastic, glass or silicon.
- 4. A method as claimed in claim 1 wherein said aromatic diazonium salt is 2,5-diethoxy-4-(p-tolylthio) benzene diazonium hexafluorophosphate.
- 5. A method of preparing a photoresist image which comprises admixing (1) a copolymer of glycidyl methacrylate and allyl glycidyl ether having an inherent viscosity of at least about 0.25, an epoxide equivalent of at least about 0.65 epoxide equivalent per 100 grams of polymer and derived from reaction of a mixture consisting essentially of from about 4 to about 5 moles of glycidyl methacrylate per mole of allyl glycidyl ether in the presence of a free-radical polymerization catalyst and a solvent at a temperature below about 100.degree. C, with (2) a photosensitive aromatic diazonium salt of a complex halogenide which decomposes upon exposure to electromagnetic or electron beam radiation to release a Lewis Acid effective to initiate polymerization of said copolymer selected from compounds having the general formula (ArN.sub.2).sub.m (MX.sub.n+m) wherein Ar is an aryl or substituted aryl group, X is chlorine or fluorine, M is P, n is the oxidation state of M, and M is the number of diazonium groups as determined by the net charge on the anion (MX.sub.n+m).sup.-m, applying said mixture to a substrate, screening predetermined portions of said substrate, exposing the substrate to electron beam or electromagnetic irradiation to effect polymerization of said copolymer, removing said screening means and applying a suitable solvent to remove unpolymerized portions of said mixture.
- 6. A method as claimed in claim 5 wherein said copolymer has an inherent viscosity of about 0.25 to 0.38 and an epoxide equivalent of from about 0.65 to 0.74.
- 7. A method as claimed in claim 6 wherein said irradiation is electromagnetic.
- 8. A method as claimed in claim 6 wherein said irradiation is electron beam irradiation.
- 9. A method of preparing a photoresist image which comprises admixing (1) a copolymer of glycidyl methacrylate and allyl glycidyl ether having an inherent viscosity of about 0.25 to 0.38, an epoxide equivalent of about 0.65 to 0.74 epoxide equivalent per 100 grams of polymer, said copolymer being derived from reaction of from about 4 to about 5 moles of glycidyl methacrylate per mole of allyl glycidyl ether in the presence of a free-radial polymerization catalyst and a solvent at a temperature below about 100.degree. C, with (2) a photosensitive aromatic diazonium salt of a complex halogenide in the form of 2,5-diethoxy-4-p-(tolylthio) benzene diazonium hexafluorophosphate, said catalyst being present in an amount sufficient to effect polymerization of said copolymer; applying said mixture to a substrate, screening predetermined portions of said substrate, exposing the substrate to electron beam or electromagnetic irradiation to decompose said benzene diazonium hexafluorophosphate and effect polymerization of said copolymer, removing said screening means and applying a suitable solvent to remove unpolymerized portions of said mixture.
- 10. A method as claimed in claim 9 wherein said substrate is metal or plastic or silicon.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuation-in-part of copending application Ser. No. 509,673 filed Sept. 26, 1974 now abandoned which is in turn a divisional of application Ser. No. 297,829 filed Oct. 16, 1972, now abandoned.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
3708296 |
Schlesinger |
Jan 1973 |
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Divisions (1)
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Number |
Date |
Country |
Parent |
297829 |
Oct 1972 |
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Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
509673 |
Sep 1974 |
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