Claims
- 1. A method for inferring an optical parameter in a predictive spectral range outside of a measurement spectral range, comprising:
a) obtaining “measured” values of said optical parameter in said measurement spectral range at a resolution that is sufficient to bring out the details of the spectrum of said optical parameter; b) constructing an analytical expression for describing said optical parameter by use of a theoretical function, such that said analytical expression yields said “measured” values of said optical parameter in said measurement spectral range; and c) using said analytical expression to infer said optical parameter in said predictive spectral range.
- 2. The method of claim 1, wherein said measurement spectral range extends in wavelength from 190 nm to 1000 nm.
- 3. The method of claim 2, wherein said “measured” values of said optical parameter in said measurement spectral range are obtained as a function of wavelength.
- 4. The method of claim 3, wherein said “measured” values are obtained at an increment of 1 nm in wavelength.
- 5. The method of claim 1, wherein said optical parameter is an index of refraction of said sample.
- 6. The method of claim 5, wherein said step of obtaining is carried out by way of the “n&k” method.
- 7. The method of claim 5, wherein said theoretical function comprises the Forouhi-Bloomer dispersion equation for index of refraction.
- 8. The method of claim 5, wherein said predictive spectral range is above 1000 nm in wavelength.
- 9. The method of claim 8, wherein said index of refraction is used to determine a dielectric constant of said sample.
- 10. The method of claim 1, wherein said optical parameter is an extinction coefficient of said sample.
- 11. The method of claim 10, wherein said step of obtaining is carried out by way of the “n&k” method.
- 12. The method of claim 10, wherein said theoretical function comprises the Forouhi-Bloomer dispersion equation for extinction coefficient.
- 13. The method of claim 1, wherein said predictive spectral range is less than 190 nm in wavelength.
- 14. The method of claim 1, wherein said predictive spectral range is greater than 1000 nm in wavelength.
- 15. A method of using the n&k method for inferring an optical parameter in a predictive spectral range outside of a measurement spectral range, comprising:
(a) obtaining “measured” values of said optical parameter in said measurement spectral range at a resolution that is sufficient to bring out the details of the spectrum of said optical parameter; (b) constructing an analytical expression for describing said optical parameter by use of a theoretical function, such that said analytical expression yields said “measured” values of said optical parameter in said measurement spectral range; and (c) using said analytical expression to infer said optical parameter in said predictive spectral range.
- 16. The method of claim 15, wherein said measurement spectral range extends in wavelength from 190 nm to 1000 nm.
- 17. The method of claim 16, wherein said “measured” values of said optical parameter in said measurement spectral range are obtained as a function of wavelength.
- 18. The method of claim 17, wherein said “measured” values are obtained at an increment of 1 nm in wavelength.
- 19. The method of claim 15, wherein said optical parameter is an index of refraction of said sample.
- 20. The method of claim 19, wherein said predictive spectral range is above 1000 nm in wavelength.
- 21. The method of claim 20, wherein said index of refraction is used to determine a dielectric constant of said sample.
- 22. The method of claim 15, wherein said optical parameter is an extinction coefficient of said sample.
- 23. The method of claim 15, wherein said predictive spectral range is less than 190 nm in wavelength.
- 24. The method of claim 15, wherein said predictive spectral range is greater than 1000 nm in wavelength.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is cross-referenced to and claims priority from U.S. Provisional application 60/232,667 filed Sep. 14, 2000, which is hereby incorporated by reference.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60232667 |
Sep 2000 |
US |