Claims
- 1. A method of inspecting glass disk substrate edges for cracks and chips, comprising the steps of:
mounting said glass disk substrate for rotation; rotating said glass disk substrate at a predetermined rotational velocity; illuminating an edge of said disk with at least one high-intensity light source; detecting a light brightness level of said edge at a detection station; detecting changes in said light brightness level in at least one predesignated inspection zone of a region of inspection; establishing an illumination brightness level corresponding to a defect in said edge of said disk; correlating said changes in said light brightness level with said illumination brightness level; determining a number of adjacent pixels exceeding said established illumination brightness level in each of said at least one predesignated inspection zone; comparing said number of adjacent pixels to a predetermined number, and whereby anomalies in said edge of said disk are detected and linearly measured in at least one dimension and said disk is rejected based on the size of said anomaly in said predesignated inspection zone.
- 2. The method of detecting defects in an edge of a glass disk substrate comprising the steps of:
brightly illuminating said edge of said glass disk; determining an illumination level threshold representing a predetermined anomaly in said edge of said glass disk; determining a number of discrete locations within an inspection zone which shall constitute an anomaly sufficient to warrant rejection of said glass disk; detecting a level of illumination radiating from said edge of said glass disk; measuring said level of illumination radiating from said edge of said disk at discrete locations in an image of said edge of said glass disk; storing said measured level of illumination as a digital value for each of said discrete locations; designating an inspection zone within said image of said edge of said glass disk; determining a number of said compared digital values which equal or exceed said illumination level threshold within said inspection zone, which constitute a basis for rejecting said glass disk; selecting a plurality of said stored digital values associated with said designated inspection zone; comparing said stored digital values associated with said designated inspection zone with said previously determined radiating illumination threshold and determining the number of said compared digital values which equal or exceed said illumination level threshold, and determining as unacceptable any glass disk substrate having a number of said compared digital values which equal or exceed said illumination level threshold that equals or exceeds said determined number.
- 3. The method of detecting defects in an edge of a glass disk substrate of claim 2 wherein said disk is rotated relative to said illumination.
- 4. The method of detecting defects in an edge of a glass disk substrate of claim 3 wherein said detecting step is accomplished with a CCD sensor.
- 5. The method of detecting defects in an edge of a glass disk substrate of claim 4 wherein said illuminating step passes light to said sensor indirectly.
- 6. The method of detecting defects in an edge of a glass disk substrate of claim 5 wherein said illuminating impinges a beam of light onto said edge parallel to a plane of said disk.
- 7. A method of inspecting edges of a glass disk substrate comprising the steps of:
defining a threshold illumination intensity constituting an anomaly in said edge of said rotating glass disk; illuminating said disk through an edge of said disk; detecting refracted light passing outwardly through said edge; recording a digital image of said refracted light; quantifying a level of illumination intensity for each pixel of said digital image; establishing at least one inspection zone relative to said digital image;. defining an inspection criteria of fault counts for said at least one inspection zone; assigning a fault count to each pixel associated with said at least one inspection zone with a quantified level of illumination intensity greater than said defined threshold illumination intensity; comparing said fault count with said inspection criteria of fault counts for each said at least one inspection zone, and determining if said fault count exceeds said inspection criteria of fault counts.
- 8. The method of claim 7 comprising the additional step of designating any said glass disk having a determination of said fault count exceeding said inspection criteria fault count as rejected.
- 9. The method of claim 8 wherein said illumination step is accomplished by directing said illumination through an optical fiber aligned with a plane of said disk.
- 10. The method of claim 9 comprising the additional step of positioning said optical fiber relative to said disk so that illumination from said optical fiber cannot pass directly to a position on said edge of said disk wherein said step of detecting said refracted light occurs.
- 11. The method of claim 10 wherein said detecting step is accomplished by recording said image as a plurality of pixels in a CCD sensor.
- 12. The method of claim 11 wherein illumination intensity representations of each of said recorded pixels of images of segments of said glass disk edge are delivered to a computer.
CROSS-REFERENCE TO RELATED CO-PENDING UNITED STATES PATENT APPLICATION
[0001] The following U.S. patent application is related to this invention and is incorporated herein in its entirety: DEVICE AND METHOD FOR INSPECTING A DISK FOR PHYSICAL DEFECTS, Ser. No. 09/489,342, filed Jan. 21, 2000, by John P. Hagen and Daniel A. Neseth, said application commonly assigned herewith.