Number | Name | Date | Kind |
---|---|---|---|
4500963 | Smith et al. | Feb 1985 | |
4613941 | Smith et al. | Sep 1986 | |
4651190 | Suzuki et al. | Mar 1987 | |
4651284 | Watanabe et al. | Mar 1987 | |
4829014 | Yerman | May 1989 | |
4880754 | Correale | Nov 1989 | |
4910574 | Aipperspach et al. | Mar 1990 | |
4922432 | Kobayashi et al. | May 1990 | |
4960724 | Watanabe et al. | Oct 1990 | |
4964057 | Yabe | Oct 1990 | |
5023701 | Sharpe-Geisler | Jun 1991 | |
5097422 | Corbin, II et al. | Mar 1992 | |
5128871 | Schmitz | Jul 1992 | |
5247456 | Ohe et al. | Sep 1993 |
Entry |
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IBM Technical Disclosure Bulletin, Selective Removal of Polysilicon To Obtain Improved Masterslice, vol. 31, Sep. 1988. |