Patent Application
20230032964
The invention relates to methods for generation of various coatings by method of ion-plasma magnetron sputtering, when materials in atom or ion form from vapor phase are deposited on the surfaces of the substrate being exposed to electric charge. The invention may be used in electronic, electrotechnical, nuclear, optical, and other industries.
The method of magnetron ion-plasma sputtering is one of the most effective processes for application of thin coatings. This method makes it possible, with relatively low costs, to obtain various homogeneous films that are tightly attached to the substrate and are connected to it on a molecular level. Currently this technology is widely used for scientific research and industrial developments for creation of a new generation of corrosion resistant and more durable articles.
There is an existing means of ion-plasma application of multi-component films using closed magnetic field and a device for its realization, which was developed by the company Teer Coatings LTD (U.S. Pat. No. 5,556,519, published in 1996). This method is based on using magnetrons made as an external and an internal poles, which are oriented in opposite directions, at least one of magnetrons is unbalanced, the neighboring magnetrons are installed mainly with the opposite polarity of external poles so that the area of deposition, where the substrate is placed, is surrounded mainly with closed lines of magnetic field formed by external poles of neighboring magnetrons, and at the same time the substrate is electrically displaced and formed as a cathode with the purpose to attract ions with a positive charge.
The fault is the fact that when coatings of complex composition are applied, which include materials with widely different sputtering ratios, the known methods and an installation for its realization do not make it possible to provide for high efficiency of the process when coatings of relatively high thickness are applied. This is explained by the complexity of ensuring high density of magnetron charge (above 40 W/cm2) in the known process due to reduced concentration of plasma near the cathode with unbalanced magnetic field.
Under relatively low specific capacities of the charge, the above technological limitations arise, which reduce the functional capabilities of the technology to make articles of various purpose. Therefore, the known method may not always be used when applying coatings of complex composition and relatively high thickness. In the known plant it is not possible to provide for sufficient activation of the surface, since in this case it is necessary to bombard the surface with an independent ion beam or to supply high frequency alternating potential to the substrate.
The closest is the method (patent RU 2379378, IPC C23C 14/35, published in 2010), in accordance with which the following operations are carried out to apply a coating: preparation of unbalanced magnetrons with homogeneous targets, preparation of balanced magnetrons, installation of articles in a planetary carousel mechanism, preparation of the plant for operation, ion etching, and activation of articles using unbalanced magnetrons with charge density from 5 to 40 W/cm2, additional activation of articles using an ion source, generating ions of gases, for example, argon, with accelerating voltage of up to 5000 V, heating of articles using a heater to temperature from 250 to 1200° C., application of the main coating layer using simultaneously unbalanced magnetrons with charge capacity density from 5 to 40 W/cm2 and balanced magnetrons at charge capacity from 40 to 500 W/cm2 and residual induction of magnetic field from 0.03 T to 0.1 T.
The faults of this method are the following: inability to achieve the even heating of articles along the entire length, which may cause coating damage; high temperatures of process implementation, which result in overheating of articles and negatively impact quality of the produced film coating.
The task that the proposed invention attempts to solve is to develop the method of applying corrosion resistant film coatings onto lengthy thin-walled articles from zirconium alloys and to improve efficiency of the film coating application process.
The technical result consists in obtaining corrosion resistant film coatings of even thickness along the outer surface of the articles from zirconium alloys and improving quality of applied coatings through even heating of the entire surface of articles, as well as increasing efficiency through higher density of magnetron charge capacity density.
The technical result is achieved in the method of ion plasma application of corrosion resistant film coatings onto articles made of zirconium alloys, which includes installation of articles in a planetary carousel mechanism, their heating, ion etching and activation of articles surface using water-cooled unbalanced magnetrons, additional activation of articles using an ion source, generating ions of gases, with accelerating voltage of up to 5000 V, while supplying displacement voltage onto articles, coating application using simultaneously unbalanced magnetrons and balanced magnetrons with residual induction of magnetic field from 0.03 T to 0.1 T, besides, the coating is applied onto articles installed vertically in a planetary carousel mechanism, and they are heated in process of coating application to temperature of 150-600° C., and heaters along the entire length of articles.
Density of charge capacity in each unbalanced magnetron is 5 to 80 W/cm2.
Density of charge capacity in each balanced magnetron is 40 to 600 W/cm2.
The chrome coating is applied.
Chrome alloy coating is applied, containing Cr: 0-75%, Al: 0-2.1%, Fe: 0-22% Ni: 0-2.5%.
Vertical arrangement of articles in a planetary carousel mechanism in process of coating application makes it possible to obtain a high quality coating through exclusion of deformation (distortion) of articles, and also coating damage (cracking, flaking off the article).
Heating to temperature of 150-600° C. in process of coating application makes it possible to obtain a high quality coating through ensuring the necessary thermal effect at the article and formed coating, which prevents their damage in process of application.
Placement of heaters along the entire length of articles makes it possible to implement their more even heating, which in its turn improves the quality of the applied coating (coating adhesion, even thickness along the outer surface of the article, high density), and improves its corrosion resistance.
If the process of coating application is carried out at article heating temperature below 150° C., the efficiency of coating application reduces, as well as the force of their adhesion to the article.
If the process of coating application is carried out at article heating temperature above 600° C., articles may be overheated, the articles and the formed coating may be damaged, and it also leads to additional power inputs.
If the process of coating application is carried out at charge capacity density in each unbalanced magnetron below 5 W/cm2, this causes reduced efficiency of coating application and deterioration of their quality (even thickness along the outer surface of the article and deterioration of the coating adhesion).
If the coating application process is carried out with density of charge capacity in each unbalanced magnetron is more than 80 W/cm2, this will cause overheating of articles and damage of the articles and the coating.
If the process of coating application is carried out at charge capacity density in each balanced magnetron below 40 W/cm2, this causes reduced efficiency of coating application and deterioration of their quality (homogeneity, even thickness, and reduced force of adhesion).
If the coating application process is carried out with density of charge capacity in each balanced magnetron is more than 600 W/cm2, this will cause overheating of articles and damage of the articles and the coating.
The proposed invention is illustrated by the following functions:
The method of ion plasma application of corrosion resistant film coatings onto articles from zirconium alloys consists in the fact that articles 5, which are seamless cold rolled pipes made of E110 zirconium alloy with outer diameter from 6 to 15 mm, length of up to 5 in, are fixed in positions for rotation of the planetary carousel mechanism 4, the vacuum chamber 3 is pumped to pressure of (4-5)×10−3 Pa, the planetary carousel mechanism 4 rotation is activated, and articles 5 are heated using a heater 11 to temperature 150-600 ° C. For additional cleaning of surface in articles of zirconium alloys, ion etching and activation of surfaces shall be used with the help of water-cooled unbalanced magnetrons 1, 2, as well as additional activation of the articles surface using an ion source 9, generating gas ions, with accelerating voltage up to 5000 V. Activation of the surface in articles made of zirconium alloys 5 with argon ions is carried out at discharge current of 6-10 A and bias voltage of 100-200 V on the articles 5. Then targets 10 are sputtered using the ion-plasma method with the help of simultaneous use of unbalanced magnetrons 1, 2 and balanced magnetrons 6, 7, where targets of chrome are used, or its alloys with Cr. 0-75%, Al: 0-2.1%, Fe: 0-22%, Ni: 0-2.5%, at residual induction of the magnetic field from 0.03 T to 0.1 T using a complex based on the vacuum plant (
The following methods are used to apply the coating based on chrome or its alloys: preliminary vacuum <10−3 Pa; operating vacuum P=0.01-0.05 Pa; start voltage U=600-800 V; operating voltage U=350-700 V; charge capacity density 5-600 W/cm2.
In particular case the coating of chrome is applied on the articles made of zirconium alloys 5, which represent seamless cold rolled pipes made of zirconium alloy E110 with the surface in the delivery condition with outer diameter of 9.1 and 9.5 mm, length of up to 4 in.
Chrome targets 10 are used in the magnetron sputtering system.
First the articles made of zirconium alloys 5 are fixed in positions for rotation of the planetary carousel mechanism 4, the vacuum chamber 3 is pumped to pressure of 4×10−3 Pa, the planetary carousel mechanism 4 rotation is activated, and articles 5 are heated using a heater 11 to temperature 250° C. For additional cleaning of surface in articles, ion etching and activation of surfaces shall be used with the help of water-cooled unbalanced magnetrons 1, 2, as well as additional activation of the articles surface using an ion source 9, generating gas ions, with accelerating voltage of 3000 V; activation of the surface in articles 5 with argon ions is carried out at discharge current 1.5 A and bias voltage of 100 V on the articles 5.
The chrome target 10 is sputtered by the ion-plasma method using simultaneously unbalanced magnetrons 1, 2 and balanced magnetrons 6, 7 with residual induction of the magnetic field of around 0.05 T using the complex based on the vacuum plant (
Then the articles 5 are cooled in the vacuum chamber 3 under residual pressure of 4×10−3 Pa for 1.5-2 hours, and then air is injected into the vacuum chamber 3, then the articles 5 are removed from the vacuum chamber 3 and inspected for defects.
The structure and morphology of the corrosion resistant chrome coating 12 were tested by the method of scanning electronic microscopy in the cross sections of the transverse fracture of the chrome coating on the zirconium alloy article 5 (
To test corrosion characteristics of the coatings, comparative high temperature corrosion tests were carried out on samples with or without a chrome coating.
Comparative corrosion tests of samples made of E110 alloy by the ion-plasma coating application method are carried out with the following parameters: medium—vapor, pressure—atmospheric, test type—double-sided oxidation, test temperature—1000-1200° C., vapor flowrate—25-90 g/hr (˜1.5-5.5 mg/cm2/s), heating speed of around 50°, cooling speed is 20° minimum per second, sample length—30 mm, test duration—4000 s.
During oxidation of the initial uncoated sample made of E110 alloy in vapor, after 770° C. there is a flaking oxide film being produced.
Oxidation of samples from E110 alloy with the applied chrome-based coating happened at a lower speed compared to the initial sample made of E110 alloy.
Comparatively high temperature tests in vapor at 1000-1200° C. demonstrated that speed of sample oxidation with a chrome coating was 5 times lower than in uncoated samples in the initial state.
The survey data confirm that chrome coating characteristics provide for high corrosion resistance of articles made of zirconium alloys in the superheated vapor.
In another particular case the coating of chrome alloy is applied on the articles made of zirconium alloys 5, which represent seamless cold rolled pipes made of zirconium alloy E110 with the surface in the delivery condition with outer diameter of 9.1 and 9.5 mm, length of up to 4 in.
The magnetron sputtering system uses targets 10 made of chrome alloy containing Cr: 0-75%, Al: 0-2.1%, Fe: 0-22%, Ni: 0-2.5%.
First the articles 5 are fixed in positions for rotation of the planetary carousel mechanism 4, the vacuum chamber 3 is pumped to pressure of 4×10−3 Pa, the planetary carousel mechanism 4 rotation is activated, and articles 5 are heated using a heater 11 to temperature 150° C. For additional cleaning of surface in articles made of zirconium alloys, ion etching and activation of articles surfaces shall be used with the help of water-cooled unbalanced magnetrons 1, 2, as well as additional activation of the articles surface using an ion source 9, generating gas ions, with accelerating voltage of 2000 V; activation of the surface in articles 5 with argon ions is carried out at discharge current 1, 2 A and bias voltage of 150
V on the articles 5.
The chrome alloy target 10 is sputtered by the ion-plasma method using simultaneously unbalanced magnetrons 1, 2 and balanced magnetrons 6, 7 with residual induction of the magnetic field of around 0.05 T using the complex based on the vacuum plant (
Then the articles made of zirconium alloy 5 are cooled in the vacuum chamber 3 under residual pressure of 4×10−3 Pa for 1.5-2 hours, and then air is injected into the vacuum chamber 3, then the articles 5 are removed from the vacuum chamber 3 and inspected for defects.
The structure of fracture in a corrosion-resistant coating made of a chrome-based alloy containing Cr: 0-75%, Al: 0-2.1%, Fe: 0-22%, Ni: 0-2.5% in the cross section of the coating on the article made of zirconium alloy 5 is smooth and homogeneous. There are no pores or flakes. The coating is even in thickness, coating thickness is 8.5 μm, it tightly adjoins the substrate made of E110 alloy.
To test corrosion characteristics of the coatings, comparative high temperature corrosion tests were carried out on samples with or without a chrome-based coating.
Corrosion tests are carried out with the following parameters: medium—vapor, pressure—atmospheric, test type—double-sided oxidation, test temperature—1000-1200° C., vapor flowrate—25-90 g/hr (˜1.5-5.5 mg/cm2/s), heating speed of around 50°, cooling speed is 20° minimum per second, sample length—30 mm, test duration—4000 s.
Weight gain depending on the time of testing samples made of zirconium alloy without or with a chrome-based coating applied by the ion-plasma method in the superheated vapor is 24 mg/dm2 and 11 mg/dm2 after 30 days, accordingly, and 30 mg/dm2 and 14 mg/dm2 after 60 days, accordingly. Sample weight gain is a characteristic of corrosion properties of coatings under the conditions simulating a beyond design basis loss of coolant accident (LOCA).
During oxidation of the initial uncoated sample made of E110 alloy in vapor, after 770° C. there is a flaking oxide film being produced.
Oxidation of samples from E110 alloy with the applied chrome-based alloy coating happened at a lower speed compared to the initial sample made of E110 alloy.
Comparative high temperature tests in vapor at 1000-1200° C. demonstrated that speed of sample oxidation with a chrome-based coating was 5 times lower than in uncoated samples in the initial state.
The survey data confirm that chrome-based coating characteristics provide for high corrosion resistance of articles made of zirconium alloys in the superheated vapor.
Therefore, the proposed invention makes it possible to obtain corrosion resistant film coatings of even thickness along the outer surface of the articles from zirconium alloys and improving quality of applied coatings through even heating of the entire surface of articles, as well as increasing efficiency of coating application process through higher density of magnetron charge capacity density.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/RU2020/000204 | 4/20/2020 | WO |
