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CPC
C23C14/352

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/352using more than one target

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Multi-layer coating
- Patent number 12,221,687
- Issue date Feb 11, 2025
- CemeCon AG
- Werner Kölker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation method and application of an Er doped Ga2O3 film
- Patent number 12,218,267
- Issue date Feb 4, 2025
- Zhejiang University
- Dongsheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicathode PVD system for high aspect ratio barrier seed deposition
- Patent number 12,195,843
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Harish V. Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant and low embrittlement aluminum alloy coatings o...
- Patent number 12,134,817
- Issue date Nov 5, 2024
- The Boeing Company
- Stephen P. Gaydos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated articles with optical coatings having residual compressive s...
- Patent number 12,134,579
- Issue date Nov 5, 2024
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiCN having reduced growth defects by means of HiPIMS
- Patent number 12,110,580
- Issue date Oct 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual reverse pulse sputtering system
- Patent number 12,112,931
- Issue date Oct 8, 2024
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD deposited ternary and quaternary NiTi alloys and methods of mak...
- Patent number 12,091,742
- Issue date Sep 17, 2024
- Vactronix Scientific, LLC.
- Scott P. Carpenter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and program
- Patent number 12,094,700
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mo doped AlCrSiN/Mo self-lubricating films and preparation method t...
- Patent number 12,077,842
- Issue date Sep 3, 2024
- TIANJIN UNIVERSITY OF TECHNOLOGY AND EDUCATION (TEACHER DEVELOPMENT CENTER OF...
- Tiegang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flexible transparent conductive composite film and manufacturing me...
- Patent number 12,051,521
- Issue date Jul 30, 2024
- Feng Chia University
- Jia-Lin Syu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multicathode deposition system and methods
- Patent number 12,051,576
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Sanjay Bhat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 12,027,353
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Shota Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for coating stainless steel press plates and coated press pl...
- Patent number 12,006,565
- Issue date Jun 11, 2024
- WILSONART LLC
- Muyuan M. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tilted PVD source with rotating pedestal
- Patent number 11,948,784
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solar reflecting film and preparation method thereof
- Patent number 11,899,227
- Issue date Feb 13, 2024
- NINGBO RADI-COOL ADVANCED ENERGY TECHNOLOGIES CO., LTD.
- Ronggui Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochromic material and method of manufacturing thereof
- Patent number 11,866,647
- Issue date Jan 9, 2024
- COMBERRY, LLC
- Vladimir Igorevich Meshcheryakov
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Thin film of metal oxide, organic electroluminescent device includi...
- Patent number 11,871,590
- Issue date Jan 9, 2024
- Japan Science and Technology Agency
- Hideo Hosono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device, method and use for the coating of lenses
- Patent number 11,842,889
- Issue date Dec 12, 2023
- Schneider GmbH & Co. KG
- Gunter Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated member, electronic device, and method for manufacturing the...
- Patent number 11,825,615
- Issue date Nov 21, 2023
- Fulian Yuzhan Precision Technology Co., Ltd
- Lei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cu-doped Sb-Te system phase change material, phase change memory an...
- Patent number 11,807,798
- Issue date Nov 7, 2023
- Huazhong University of Science & Technology
- Xiaomin Cheng
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Functional curtain fabric with anhydrous coating layer and method f...
- Patent number 11,788,184
- Issue date Oct 17, 2023
- THE HONG KONG RESEARCH INSTITUTE OF TEXTILES AND APPAREL LIMITED
- Shou-Xiang Kinor Jiang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for protecting Low-E glass plate, method for producing glass...
- Patent number 11,760,066
- Issue date Sep 19, 2023
- Nitto Denko Corporation
- Yuta Shimazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method for fabricating semiconductor devic...
- Patent number 11,725,271
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Ki Woong Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrodes for biosensors
- Patent number 11,685,969
- Issue date Jun 27, 2023
- Materion Corporation
- Ethan Fontaine
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Tantalum-doped molybdenum disulfide/tungsten disulfide multi-layer...
- Patent number 11,685,986
- Issue date Jun 27, 2023
- Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sc...
- Jibin Pu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component for fuel injector and method for coating the same
- Patent number 11,661,649
- Issue date May 30, 2023
- HYUNDAI KEFICO CORPORATION
- Han Su Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target structure of physical vapor deposition
- Patent number 11,649,543
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Yuan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spin-orbit torque-based switching device and method of fabricating...
- Patent number 11,641,782
- Issue date May 2, 2023
- Korea University Research and Business Foundation
- Young Keun Kim
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250059640
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS AND METHOD FOR THIN FILM ELECTRODE DEPOSITION
- Publication number 20250029819
- Publication date Jan 23, 2025
- SAMSUNG DISPLAY CO., LTD.
- You Jong LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES
- Publication number 20250029820
- Publication date Jan 23, 2025
- INTEVAC, INC.
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING STAINLESS STEEL PRESS PLATES AND COATED PRESS PL...
- Publication number 20240287669
- Publication date Aug 29, 2024
- WILSONART LLC
- Muyuan M. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION
- Publication number 20240247365
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Harish V. PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW INDEX OF REFRACTION THIN FILM WITH HIGH HARDNESS COATING AND ME...
- Publication number 20240201422
- Publication date Jun 20, 2024
- INTEVAC, INC.
- Thomas P. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20240194462
- Publication date Jun 13, 2024
- EMD CORPORATION
- Akinori EBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING
- Publication number 20240191341
- Publication date Jun 13, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
- Publication number 20240166555
- Publication date May 23, 2024
- Sumitomo Metal Mining Co., Ltd.
- Hideharu Okami
- G02 - OPTICS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240120182
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COATED WITH A LUBRICANT COATING
- Publication number 20240093113
- Publication date Mar 21, 2024
- Luxembourg Institute of Science and Technology
- Jean-Baptiste CHEMIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reflective Coating
- Publication number 20240083807
- Publication date Mar 14, 2024
- Vitro Flat Glass LLC
- Zhixun Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
- Publication number 20240021423
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM NITRIDE BASED MULTILAYER COATING FOR WEAR AND FRICTION R...
- Publication number 20240011145
- Publication date Jan 11, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Timea STELZIG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND COMPOSITIONS FOR COOLING YARNS AND FABRICS, AND ARTICLE...
- Publication number 20230391965
- Publication date Dec 7, 2023
- Brrr! Inc.
- Cheng-Shang TSAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU AND TUNABLE DEPOSITION OF A FILM
- Publication number 20230374654
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODES FOR BIOSENSORS
- Publication number 20230340641
- Publication date Oct 26, 2023
- MATERION CORPORATION
- ETHAN FONTAINE
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Cu-DOPED Sb-Te SYSTEM PHASE CHANGE MATERIAL, PHASE CHANGE MEMORY AN...
- Publication number 20230287253
- Publication date Sep 14, 2023
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Xiaomin CHENG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF
- Publication number 20230257885
- Publication date Aug 17, 2023
- National Research Council of Canada
- Dongfang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
The Preparation Method and Application of An Er Doped Ga2O3 Film
- Publication number 20230246115
- Publication date Aug 3, 2023
- ZHEJIANG UNIVERSITY
- DONGSHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20230221467
- Publication date Jul 13, 2023
- Corning Incorporated
- Robert Alan Bellman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LOW-E MATERIAL COMPRISING A THICK LAYER BASED ON SILICON OXIDE
- Publication number 20230212065
- Publication date Jul 6, 2023
- SAINT-GOBAIN GLASS FRANCE
- Yann COHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...
- Publication number 20230212063
- Publication date Jul 6, 2023
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A COATING ON A SUBSTRATE
- Publication number 20230193454
- Publication date Jun 22, 2023
- Omega S.A.
- Loïc CURCHOD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BISMUTH FERRITE FILM MATERIAL, METHOD FOR INTEGRALLY PREPARING BISM...
- Publication number 20230183853
- Publication date Jun 15, 2023
- QILU UNIVERSITY OF TECHNOLOGY
- Jun OUYANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND CONTROL METHOD
- Publication number 20230175114
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLAR REFLECTING FILM AND PREPARATION METHOD THEREOF
- Publication number 20230161085
- Publication date May 25, 2023
- Ningbo Radi-Cool Advanced Energy Technologies Co., Ltd.
- Ronggui YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TICN Having Reduced Growth Defects by Means of HIPIMS
- Publication number 20230135238
- Publication date May 4, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using more than one target

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multi-layer coating

Preparation method and application of an Er doped Ga2O3 film

Multicathode PVD system for high aspect ratio barrier seed deposition

Film forming apparatus and film forming method

Corrosion resistant and low embrittlement aluminum alloy coatings o...

Coated articles with optical coatings having residual compressive s...

TiCN having reduced growth defects by means of HiPIMS

Dual reverse pulse sputtering system

PVD deposited ternary and quaternary NiTi alloys and methods of mak...

Film forming method, film forming apparatus, and program

Mo doped AlCrSiN/Mo self-lubricating films and preparation method t...

Flexible transparent conductive composite film and manufacturing me...

Multicathode deposition system and methods

Substrate processing method and apparatus

Method for coating stainless steel press plates and coated press pl...

Tilted PVD source with rotating pedestal

Solar reflecting film and preparation method thereof

Electrochromic material and method of manufacturing thereof

Thin film of metal oxide, organic electroluminescent device includi...

Device, method and use for the coating of lenses

Coated member, electronic device, and method for manufacturing the...

Cu-doped Sb-Te system phase change material, phase change memory an...

Functional curtain fabric with anhydrous coating layer and method f...

Method for protecting Low-E glass plate, method for producing glass...

Sputtering apparatus and method for fabricating semiconductor devic...

Electrodes for biosensors

Tantalum-doped molybdenum disulfide/tungsten disulfide multi-layer...

Component for fuel injector and method for coating the same

Target structure of physical vapor deposition

Spin-orbit torque-based switching device and method of fabricating...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

SPUTTERING APPARATUS AND METHOD FOR THIN FILM ELECTRODE DEPOSITION

ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES

METHOD FOR COATING STAINLESS STEEL PRESS PLATES AND COATED PRESS PL...

MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION

LOW INDEX OF REFRACTION THIN FILM WITH HIGH HARDNESS COATING AND ME...

SPUTTERING APPARATUS

STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE COATED WITH A LUBRICANT COATING

Reflective Coating

FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...

MOLYBDENUM NITRIDE BASED MULTILAYER COATING FOR WEAR AND FRICTION R...

METHODS AND COMPOSITIONS FOR COOLING YARNS AND FABRICS, AND ARTICLE...

IN SITU AND TUNABLE DEPOSITION OF A FILM

ELECTRODES FOR BIOSENSORS

Cu-DOPED Sb-Te SYSTEM PHASE CHANGE MATERIAL, PHASE CHANGE MEMORY AN...

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF

The Preparation Method and Application of An Er Doped Ga2O3 Film

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

LOW-E MATERIAL COMPRISING A THICK LAYER BASED ON SILICON OXIDE

COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...

METHOD FOR DEPOSITING A COATING ON A SUBSTRATE

BISMUTH FERRITE FILM MATERIAL, METHOD FOR INTEGRALLY PREPARING BISM...

SPUTTERING APPARATUS AND CONTROL METHOD

SOLAR REFLECTING FILM AND PREPARATION METHOD THEREOF

TICN Having Reduced Growth Defects by Means of HIPIMS