Claims
- 1. A method of locating a position of a work in an automatic exposing apparatus including an automatic aligning unit in which the work, to be exposed to a light beam in an exposing section, is placed on an alignment table so that alignment marks previously provided at arbitrary positions on the work can be located in correspondence to alignment marks of a mask film previously recorded in an alignment mark position indexing unit and a comparative determination unit, said method comprising the steps of;
- fitting and securing the work to the alignment table in the automatic aligning unit under effects of suction caused by a suction unit through small holes provided on the alignment table,
- displacing cameras in at least one direction along X, Y, and Z-coordinates, thereby optically recognizing the alignment marks on the work in a form of images through wide transparent windows provided at both ends of the alignment table,
- sending the images of the alignment marks of the work, obtained by the cameras, to the alignment mark position indexing unit and the comparative determination unit thereby recording the images therein, and
- moving the alignment table along X and Y coordinates or rotating the alignment table in clockwise and counterclockwise directions thereby causing the position of the alignment marks of the work to correspond to the alignment marks of the mask film if the positions of the alignment marks of the work do not correspond to the alignment marks of the mask film as previously recognized and recorded in the alignment mark position indexing unit and comparative determination unit.
- 2. The method as in claim 1, wherein said displacing cameras step further includes displacing the cameras in any of three orthogonal directions.
Priority Claims (1)
Number |
Date |
Country |
Kind |
63-131954 |
May 1988 |
JPX |
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Parent Case Info
This is a continuation of application Ser. No. 07/355,746, filed on May 23, 1989, which was abandoned upon the filing hereof 8-30-90.
US Referenced Citations (5)
Number |
Name |
Date |
Kind |
4057347 |
Moriyama et al. |
Nov 1977 |
|
4153371 |
Koizuni et al. |
May 1979 |
|
4232969 |
Wilczynski |
Nov 1980 |
|
4761561 |
Fujiwara et al. |
Aug 1988 |
|
4764791 |
Omata et al. |
Aug 1988 |
|
Foreign Referenced Citations (2)
Number |
Date |
Country |
189869 |
Aug 1986 |
EPX |
63-46466 |
Feb 1988 |
JPX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
355746 |
May 1989 |
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