Claims
- 1. A method of creating a fluid ejection device from a substrate having a set of thin-film layers disposed on a first surface, the method comprising the steps of:applying photoresist on the set of thin-film layers, the photoresist defining openings; etching the set of thin-film layers and substrate in the openings to create deep slots beneath the first surface of the substrate; thereafter removing the photoresist from the set of thin-film layers; applying a protection layer over the set of thin-film layers of the substrate and filling the deep slots in the set of thin-film layers and substrate; creating a feed channel on a second surface of the substrate until the protection layer within the deep slots is exposed; and thereafter removing the protection layer from the thin-film layer and the deep slots.
- 2. The method of claim 1, further comprising the step of applying an orifice layer on the set of thin-film layers, the orifice layer defining at least one fluid chamber aligned with the deep slots.
- 3. The method of claim 1, wherein the step of creating the feed channel on the second surface further comprises the step of etching the substrate.
- 4. The method of claim 1, wherein the step of creating a feed channel on the second surface further comprises the step of sand drilling the feed channel.
- 5. The method of claim 1, wherein the step of creating a feed channel on the second surface further comprises the step of laser drilling the feed channel.
- 6. The method of claim 1, wherein the step of applying the protection layer further comprises the step of filling the deep slots with polymer.
- 7. The method of claim 1, wherein the step of applying the protection layer further comprises the step of depositing a thin film from the group consisting of oxides, nitrides, carbides, and oxinitrides.
Parent Case Info
This application is a divisional of application Ser. No. 09/774,259 filed on Jan. 29, 2001, now U.S. Pat. No. 6,481,832, which is hereby incorporated by reference herein.
US Referenced Citations (13)
Foreign Referenced Citations (2)
Number |
Date |
Country |
0244214 |
Nov 1987 |
EP |
0841167 |
May 1988 |
EP |