Claims
- 1. A method of manufacturing a gas sensor having multiple quadrupoles formed in an array, comprising the steps of:
- positioning a plurality of rods in an array of quadrupoles;
- forming a glass bead on said rods;
- heating said glass beads to grip said rods and to hold said rods in said array, said rods having respective portions extending from said glass bead and held in a cantilevered position;
- positioning a source of electrons proximate to one end of said rods to ionize gas molecules;
- positioning an electrical lens proximate to said source of electrons to induce ionized gas molecules to propagate between said rods of said quadrupoles;
- positioning a collector proximate to said rods and displaced from said lens to receive said ionized gas molecules propagating between said rods from said source of electrons; and
- providing electrical connections through said glass bead to said source of electrons, to said electrical lens, to said collector and to said rods, said electrical connections positioned through said bead before said heating step such that said electrical connections are sealed by said glass bead in response to said heating step.
- 2. The method of manufacturing a gas sensor as defined in claim 1, wherein the step of positioning a plurality of rods in an array of quadrupoles comprises the step of positioning said plurality of rods in a reusable tooling assembly which maintains said plurality of rods in said array.
- 3. The method of manufacturing a gas sensor as defined in claim 2, wherein the step of forming a glass bead on said rods comprises the step of mounting said plurality of rods into holes pre-formed in said glass bead and positioning said glass bead in said reusable tooling assembly.
- 4. The method of manufacturing a gas sensor as defined in claim 3, wherein said glass bead comprises barium alkali glass and the step of heating said glass bead comprises the step of heating said glass bead in an oven at 1000.degree. C. for 2 hours to form a glass seal securing said plurality of rods into position and providing a seal to prevent gases from escaping along said plurality of rods.
- 5. The method of manufacturing a gas sensor as defined in claim 4, further comprising the step of cooling said glass bead into said glass seal.
Parent Case Info
This application is a divisional of application Ser. No. 08/076,161, filed Jun. 14, 1993, now U.S. Pat. No. 5,401,962.
US Referenced Citations (10)
Foreign Referenced Citations (1)
Number |
Date |
Country |
2737903 |
Mar 1979 |
DEX |
Non-Patent Literature Citations (2)
Entry |
German article entitled "Das elektrische Massenfilter als Massenspektrometer und Isotopentrenner", by W. Paul, H.P. Reinhard and U. von Zahn; Apr. 21, 1958. |
Brochure for QZ200.RTM. Residual Gas Analyzers "Residual Gas Analysis, PPM Analysis, Multiplexing", from Leybold Inficon Inc. |
Divisions (1)
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Number |
Date |
Country |
Parent |
76161 |
Jun 1993 |
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