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8-214232 | Jul 1996 | JPX |
Number | Name | Date | Kind |
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4772583 | Sprecker et al. | Sep 1988 | |
4833124 | Lum | May 1989 | |
4912083 | Chapman et al. | Mar 1990 | |
4942141 | DeBoer et al. | Jul 1990 | |
4948776 | Evans et al. | Aug 1990 | |
4948777 | Evans et al. | Aug 1990 | |
4948778 | DeBoer | Aug 1990 | |
4950639 | DeBoer et al. | Aug 1990 | |
4952552 | Chapman et al. | Aug 1990 | |
5023229 | Evans et al. | Jun 1991 | |
5252431 | Yoshida et al. | Oct 1993 | |
5378580 | Leenders | Jan 1995 | |
5721087 | Yokoya et al. | Feb 1998 |
Number | Date | Country |
---|---|---|
0321923 | Jun 1989 | EPX |
42-21879 | Oct 1942 | JPX |
50-158405 | Dec 1975 | JPX |
56-23150 | May 1981 | JPX |
3-15553 | Jan 1991 | JPX |
5-1934 | Jan 1993 | JPX |
7-179052 | Jul 1995 | JPX |
Entry |
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"Research Disclosure 19201", (Apr. 1980). |
Hiroshi ITO et al, "Applications of Photoinitiators to the Design of Resists for Semiconductor Manufacturing", Polymers in Electronics, pp. 11-23, 1984. |
E. Reichmanis et al, Microelectronic Engineering, 13, (1991) pp. 3-10. |
Jean Frechet et al, "New Approach to Imaging Systems Incorporating Chemical Amplification: Synthesis and Preliminary Evaluation of Novel Resists Based on Tertiary Copolycarbonates", Journal of Imaging Science, vol. 30, No. 2, Mar./Apr. 1986. |