Number | Name | Date | Kind |
---|---|---|---|
3471754 | Hoshi et al. | Oct 1969 | |
3476991 | Mize et al. | Nov 1969 | |
3493430 | Manasevit | Feb 1970 | |
3546036 | Manasevit | Dec 1970 | |
3652324 | Chu et al. | Mar 1972 | |
3679502 | Hays | Jul 1972 | |
3743552 | Fa | Jul 1973 | |
3969753 | Thorsen et al. | Jul 1976 | |
4052251 | Weitzel | Oct 1977 |
Entry |
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Maurits, J.E.A., "Problems . . . . Preparation of SOS Wafers" Solid State Tech., Apr. 1977, pp. 81-86. |
Stinson et al., "Sulfur Hexafluoride Etching Effects in Silicon" J. Electrochem. Soc., vol. 123, No. 4, Apr. 1976, pp. 551-555. |
Manasevit, H.M., "Gas-Phase Etching of Sapphire IBID., vol. 121, No. 2, Feb. 1974, pp. 293-297. |