Number | Name | Date | Kind |
---|---|---|---|
3534234 | Clevenger | Dec 1966 | |
3648125 | Peltzer | Mar 1972 | |
3900350 | Appels et al. | Aug 1975 | |
3970486 | Kooi | Jul 1976 | |
4373248 | McElroy | Feb 1983 | |
4407696 | Han | Oct 1983 | |
4419142 | Matsukawa | Dec 1983 |
Entry |
---|
Matsunaga, "Selective Polysilicon Oxidation Technology for Defect Free Isolation"Conference: International Electron Devices Meeting, Technical Digest, Washington D.C., USA, Dec. 8-10, 1980. |