Number | Date | Country | Kind |
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92200939.4 | Apr 1992 | EPX |
Number | Name | Date | Kind |
---|---|---|---|
4824544 | Mikalesen et al. | Apr 1989 | |
4857161 | Borel et al. | Aug 1989 | |
5007873 | Goronkin et al. | Apr 1991 | |
5141459 | Zimmerman | Aug 1992 |
Number | Date | Country |
---|---|---|
0440377 | Jul 1991 | EPX |
9112627 | Aug 1991 | WOX |
Entry |
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Rossnagel et al Journal of Vacuum Science Technology A 9(2), Mar./Apr. 1991 pp. 261-265. |