Number | Name | Date | Kind |
---|---|---|---|
4666556 | Fulton et al. | May 1987 | |
5229316 | Lee et al. | Jul 1993 | |
5256593 | Iwai | Oct 1993 | |
5298010 | Schoenborn et al. | Mar 1994 | |
5316965 | Philipossian et al. | May 1994 | |
5492858 | Bose et al. | Feb 1996 | |
5498565 | Gocho et al. | Mar 1996 | |
5677233 | Abiko | Oct 1997 | |
5866465 | Doan et al. | Feb 1999 |
Entry |
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Wolf, S. et al., Silicon Processing For the VLSI Era: vol. 1, Process Technology, Lattice Press, pp. 550-554, 1986.* |
Wolf, S., Silicon Processing For the VLSI Era: vol. 2, Process Integration, Lattice Press, pp. 54-56, 1986.* |
Wolf, “Chapter 2: Isolation Technologies for Integrated Circuits”, Silicon Processing for the VLSI Era—vol. 2—Process Integration, pp. 12-66 (1990). |