Number | Date | Country | Kind |
---|---|---|---|
027551 | Feb 1991 | JPX |
This application is a divisional of application Ser. No. 07/838,691, filed Feb. 21, 1992, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4249962 | Celler | Feb 1981 | |
4276114 | Takano et al. | Jun 1981 | |
4561171 | Schlosser | Dec 1985 | |
4645546 | Matsushita | Feb 1987 | |
4659400 | Garbis et al. | Apr 1987 | |
4751067 | Levin | Jun 1988 |
Number | Date | Country |
---|---|---|
0289379 | Apr 1991 | DEX |
169249 | Oct 1982 | JPX |
61-240638 | Oct 1986 | JPX |
240638 | Oct 1986 | JPX |
15825 | Jan 1987 | JPX |
76714 | Apr 1987 | JPX |
63-310123 | Dec 1988 | JPX |
46937 | Feb 1989 | JPX |
101636 | Apr 1989 | JPX |
0235242 | Sep 1989 | JPX |
201440 | Sep 1991 | JPX |
238824 | Oct 1991 | JPX |
Entry |
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IBM Technical Disclosure Bulletin, vol. 20, No. 9, Feb. 1978, New York, US, pp. 3454-3455, M. R. Poponiak, et al., "Impurity Gettering and Removing Gettered Imputities". |
IBM Technical Disclosure Bulletin, vol. 22, No. 8B, Jan. 1980, New York, U.S., p. 3856, M. C. Chen, et al., "Pre-Epitaxial Gettering For Defect Reduction in Silicon Films". |
Poponiak, M. R., et al. "Gettering Utilizing Implant Damage and Highly Disordered Epitaxial Layer", IBM Technical Disclosure Bulletin, vol. 19, No. 6, pp. 2052-2053 Nov. 1976. |
Number | Date | Country | |
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Parent | 838691 | Feb 1992 |