Number | Date | Country | Kind |
---|---|---|---|
6-315058 | Dec 1994 | JPX | |
6-315059 | Dec 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
2959483 | Kaplan | Nov 1960 | |
3114065 | Kaplan | Dec 1963 | |
4311773 | Kaneko et al. | Jan 1982 | |
5334468 | Yamasita et al. | Aug 1994 | |
5340673 | Tateyama et al. | Aug 1994 |
Number | Date | Country |
---|---|---|
36 11 875 | Oct 1987 | DEX |
77-077578 | Jun 1977 | JPX |
52-77578 | Jun 1977 | JPX |
53-45165 | Apr 1978 | JPX |
59-0129329 | Dec 1984 | JPX |
64-7457 | Jan 1989 | JPX |
1074286 | Mar 1989 | JPX |
5-266795 | Oct 1993 | JPX |
Entry |
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English Abstract of SU 1492706 (two abstracts), Oct. 1992. |
DeForest, W.S., Photoresist, Materials and Methods, McGraw-Hill, NY, 1975, p. 199. |