Method of manufacturing electroactive polymer transducers for sensory feedback applications

Information

  • Patent Grant
  • 9425383
  • Patent Number
    9,425,383
  • Date Filed
    Tuesday, August 9, 2011
    13 years ago
  • Date Issued
    Tuesday, August 23, 2016
    8 years ago
Abstract
A method for fabricating electroactive polymer transducers, the includes providing an electroactive polymer film comprising an elastomeric dielectric polymer, forming an array of electrodes on the film, and sandwiching the electrode array between a top and bottom array of frame components to form an array of electroactive polymer transducers.
Description
FIELD OF THE INVENTION

The present invention is directed to the use of electroactive polymer transducers to provide sensory feedback.


BACKGROUND

There are many known user interface devices which employ haptic feedback—the communication of information to a user through forces applied to the user's body, typically in response to a force initiated by the user. Examples of user interface devices which may employ haptic feedback include keyboards, touch screens, computer mice, trackballs, stylus sticks, joysticks, etc. The haptic feedback provided by these types of interface devices is in the form of physical sensations, such as vibrations, pulses, spring forces, etc., which are felt by the user.


Often, a user interface device with haptic feedback can be an input device which “receives” an action initiated by the user as well as an output device which provides haptic feedback indicating that the action was initiated. In practice, the position of some contacted or touched portion or surface, e.g., a button, of a user interface device is changed along at least one degree of freedom by the force applied by the user, where the force applied must reach some minimum threshold value in order for the contacted portion to change positions and to effect the haptic feedback. Achievement or registration of the change in position of the contacted portion results in a responsive force (e.g., spring-back, vibration, pulsing) which is also imposed on the contacted portion of the device acted upon by the user, which force is communicated to the user through his or her sense of touch.


One common example of a user interface device that employs a spring-back or “bi-phase” type of haptic feedback is a button on a mouse. The button does not move until the applied force reaches a certain threshold, at which point the button moves downward with relative ease and then stops—the collective sensation of which is defined as “clicking” the button. The user-applied force is substantially along an axis perpendicular to the button surface, as is the responsive (but opposite) force felt by the user.


Haptic feedback capabilities are known to improve user productivity and efficiency, particularly in the context of data entry. It is believed by the inventors hereof that further improvements to the character and quality of the haptic sensation communicated to a user may further increase such productivity and efficiency. It would be additionally beneficial if such improvements were provided by a sensory feedback mechanism which is easy and cost-effective to manufacture, and does not add to, and preferably reduces, the space, size and/or mass requirements of known haptic feedback devices.


SUMMARY OF THE INVENTION

The present invention includes devices, systems and methods involving electroactive transducers for sensory applications. In one variation, a user interface device having sensory feedback is provided. The device includes a user contact surface, an electroactive polymer transducer comprising an output member coupled to the contact surface, a sensor for sensing a mechanical force on the user contact surface and providing an activation signal to the transducer, wherein activation of the transducer moves at least a portion the user contact surface.


The coupling between the output member of the transducer and the user contact surface may include a mechanical means, magnetic means or both. In certain variations in which a mechanical coupling means is employed, at least one pin or protrusion extending between the output member and the user contact surface is provided. Where the pin or pins extends through the transducer sealing material, a compliant material may be used between the pin and the sealing material to ensure that the seal is not compromised upon movement of the pins. In certain embodiments, a pivotable lever is used to transfer motion from the transducer output member to the user contact surface whereby the pins extend from the lever through countersunk holes provided within the sealing material.


The user interface device may further include a sealing material adapted to substantially hermetically seal the transducer. A13. In certain embodiments, the sealing material forms a gasket between the user contact surface and the transducer, while in others, the sealing material encases the transducer.


The user interface device may be configured to provide a sensory feedback movement, i.e., movement of the contact surface which is sensed by the user, which is in a lateral or in a vertical direction relative to the contact surface. The user interface device may provide a single input or contact surface, e.g., a keypad, or may be provided in an array format having a plurality of contact surfaces, e.g., a keyboard.


The devices and systems of the present invention may be fabricated at least in part by web-based manufacturing techniques. For example, one such method includes forming at least the transducers by such techniques where an electroactive polymer film is provided and an array of electrodes is formed on the film. The electrode array is then sandwiched between a top and bottom array of frame components to form an array of electroactive polymer transducers. The resulting array may be kept in array format or may be singulated into a plurality of individual transducers, depending on the type of user interface device.


These and other features, objects and advantages of the invention will become apparent to those persons skilled in the art upon reading the details of the invention as more fully described below.





BRIEF DESCRIPTION OF THE DRAWINGS

The invention is best understood from the following detailed description when read in conjunction with the accompanying schematic drawings. To facilitate understanding, the same reference numerals have been used (where practical) to designate similar elements that are common to the drawings. Included in the drawings are the following:



FIGS. 1A-1C show top perspective, bottom perspective and cross-sectional views, respectively, of a sensory feedback device of the present invention;



FIGS. 2A and 2B show exploded top and bottom perspective views, respectively, of the sensory feedback device of FIGS. 1A-1C;



FIG. 3A is a top planar view of an assembled electroactive polymer actuator of the present invention; FIGS. 3B and 3C are top and bottom planar views, respectively, of the film portion of the actuator of FIG. 3A and, in particular, illustrate the two-phase configuration of the actuator;



FIG. 4 illustrates a side view of the sensory feedback device, of FIGS. 1A-1C with a human finger in operative contact with the contact surface of the device;



FIGS. 5A and 5B graphically illustrate the force-stroke relationship and voltage response curves, respectively, of the actuator of FIGS. 3A-3C when operated in a single-phase mode;



FIGS. 6A and 6B graphically illustrate the force-stroke relationship and voltage response curves, respectively, of the actuator of FIGS. 3A-3C when operated in a two-phase mode;



FIG. 7 is a block diagram of electronic circuitry, including a power supply and control electronics, for operating the sensory feedback device of FIGS. 1A-1C;



FIG. 8 illustrates an alternate bi-stable embodiment of a sensory feedback device of the present invention;



FIGS. 9A and 98 show exploded top and bottom perspective views, respectively, of another tactile feedback device of the present invention in which magnets are used to couple the actuator to the contact surface of the device;



FIGS. 10A and 10B illustrate perspective assembled and exploded views, respectively, of a hermetically sealed electroactive polymer actuator of the present invention for use in the tactile feedback devices of the present invention;



FIGS. 11A and 11B illustrate perspective assembled and exploded views, respectively, of another hermetically sealed electroactive polymer actuator of the present invention for use in the tactile feedback devices of the present invention;



FIGS. 12A-12C illustrate assembled, exploded and cross-sectional views, respectively, of another hermetically sealed electroactive polymer actuator of the present invention for use in the tactile feedback devices of the present invention;



FIGS. 13A-13C illustrate another haptic feedback device of the present invention employing another variation of a hermetically sealed actuator;



FIGS. 14A and 14B illustrate arrays, respectively, of electrode patterns disposed on opposite sides of a dielectric film material for use in an array of haptic feedback devices of the present invention;



FIG. 15 is an exploded view of an array of actuators for use in the sensory feedback devices of the present invention;



FIG. 16 is an assembled view of an array of actuators of the type illustrated in FIGS. 3A-3C; and



FIG. 17 is an assembled view of an array of actuators of the type illustrated in FIG. 8.





Variation of the invention from that shown in the figures is contemplated.


DETAILED DESCRIPTION OF THE INVENTION

The devices, systems and methods of the present invention are now described in detail with reference to the accompanying figures.


Referring to FIGS. 1A-1C, 2A and 2B, various views of are provided of an embodiment of a sensory feedback device 2 of the present invention which may be employed within a user interface device (not shown), such as with a single key within a keyboard or a discrete area of a touch screen. In an assembled form, as shown in FIGS. 1A-1C, sensory feedback device 2 has a very thin, low profile configuration (best illustrated in FIG. 1C) which may have any suitable width, length and height (thickness) dimensions to accommodate the user interface device component with which it is to be used. Typically, the width and length dimensions of device 2 substantially match or are within the width and length dimensions of the user contact surface with which it is associated. For example, for finger key or touch applications, the width and length dimensions of device 2 are typically in the range from about 10 mm to about 30 mm for square keys. The height or thickness dimension of device 2 is preferably as small as practically possible so as to reduce the profile (and size, weight and mass) of the device. For keypad applications, the thickness dimension of the device is typically about 2 mm, but may be less than about 1 mm.


Sensory or haptic feedback device 2 includes various components including, from top to bottom as illustrated in FIGS. 2A an 2B, a user interface pad 4 having a top contact surface 4a and a bottom surface 4b having a plurality of protrusions 16, the function of which is discussed below. Top surface 4a may optionally be textured to minimize slippage by a user's finger. Pad 4 is positioned atop a sensory feedback mechanism or actuator 30. Actuator 30 includes an electroactive polymer (EAP) transducer 10 in the form of an elastic film which converts electrical energy to mechanical energy. The resulting mechanical energy is in the form of physical “displacement” of an output member, here in the form of a disc 28 (discussed in greater detail below), which displacement is sensed or felt by the user's finger.


With reference to FIGS. 3A-3C. EAP transducer film 10 comprises two working pairs of thin elastic electrodes 32a, 32b and 34a, 34b where each working pair is separated by a thin layer of elastomeric dielectric polymer 26 (e.g. made of acrylic, silicone, or the like). When a voltage difference is applied across the oppositely-charged electrodes of each working pair (i.e., across electrodes 32a and 32b, and across electrodes 34a and 34b), the opposed electrodes attract each other thereby compressing the dielectric polymer layer 26 therebetween. As the electrodes are pulled closer together, the dielectric polymer 26 becomes thinner (i.e., the z-axis component contracts) as it expands in the planar directions (i.e., the x- and y-axes components expand) (see FIGS. 3B and 3C for axis references). Furthermore, like charges distributed across each electrode cause the conductive particles embedded within that electrode to repel one another, thereby contributing to the expansion of the elastic electrodes and dielectric films. The dielectric layer 26 is thereby caused to deflect with a change in electric field. As the electrode material is also compliant, the electrode layers change shape along with dielectric layer 26. Generally speaking, deflection refers to any displacement, expansion, contraction, torsion, linear or area strain, or any other deformation of a portion of dielectric layer 26. This deflection may be used to produce mechanical work.


In fabricating transducer 20, elastic film is stretched and held in a pre-strained condition by two opposing rigid frame sides 8a, 8b. It has been observed that the pre-strain improves the dielectric strength of the polymer layer 26, thereby improving conversion between electrical and mechanical energy, i.e. the pre-strain allows the film to deflect more and provide greater mechanical work. Typically, the electrode material is applied after pre-straining the polymer layer, but may be applied beforehand. The two electrodes provided on the same side of layer 26, referred to herein as same-side electrode pairs, i.e., electrodes 32a and 34a on top side 26a of dielectric layer 26 (see FIG. 3B) and electrodes 32b and 34b on bottom side 26b of dielectric layer 26 (see FIG. 3C), are electrically isolated from each other by inactive areas or gaps 25. The opposed electrodes on the opposite sides of the polymer layer from two sets of working electrode pairs, i.e., electrodes 32a and 32b for one working electrode pair and electrodes 34a and 34b for another working electrode pair. Each same-side electrode pair preferably has the same polarity, while the polarity of the electrodes of each working electrode pair are opposite each other, i.e., electrodes 32a and 32b are oppositely charged and electrodes 34a and 34b are oppositely charged. Each electrode has an electrical contact portion 35 configured for electrical connection to a voltage source (not shown).


In the illustrated embodiment, each of the electrodes has a semi-circular configuration where the same-side electrode pairs define a substantially circular pattern for accommodating a centrally disposed, rigid output disc 20a, 20b on each side of dielectric layer 26. Discs 20a, 20b, the functions of which are discussed below, are secured to the centrally exposed outer surfaces 26a, 26b of polymer layer 26, thereby sandwiching layer 26 therebetween. The coupling between the discs and film may be mechanical or be provided by an adhesive bond. Generally, the discs 20a, 20b will be sized relative to the transducer frame 22a, 22b. More specifically, the ratio of the disc diameter to the inner annular diameter of the frame will be such so as to adequately distribute stress applied to transducer film 10. The greater the ratio of the disc diameter to the frame diameter, the greater the force of the feedback signal or movement but with a lower linear displacement of the disc. Alternately, the lower the ratio, the lower the output force and the greater the linear displacement.


Because of their light weight and minimal components, EAP transducers offer a very low profile and, as such, are ideal for use in sensory/haptic feedback applications. Examples of EAP transducers and their construction are described in U.S. Pat. Nos. 7,368,862; 7,362,031; 7,320,457; 7,259,503; 7,233,097; 7,224,106; 7,211,937; 7,199,501; 7,166,953; 7,064,472; 7,062,055; 7,052,594; 7,049,732; 7,034,432; 6,940,221; 6,911,764; 6,891,317; 6,882,086; 6,876,135; 6,812,624; 6,809,462; 6,806,621; 6,781,284; 6,768,246; 6,707,236; 6,664,718; 6,628,040; 6,586,859; 6,583,533; 6,545,384; 6,543,110; 6,376,971 and 6,343,129; and U.S. Published Patent Application Nos. 2006/0208610; 2008/0022517; 2007/0222344; 2007/0200468; 2007/0200467; 2007/0200466; 2007/0200457; 2007/0200454; 2007/0200453; 2007/0170822; 2006/0238079; 2006/0208610; 2006/0208609; and 2005/0157893, the entireties of which are incorporated herein by reference. Materials used as an electroactive polymer may be selected based on one or more material properties such as a high electrical breakdown strength, a low modulus of elasticity—(for large or small deformations), a high dielectric constant, etc. In one embodiment, the polymer is selected such that it has an elastic modulus at most about 100 MPa. In another embodiment, the polymer is selected such that it has a maximum actuation pressure between about 0.05 MPa and about 10 MPa, and preferably between about 0.3 MPa and about 3 MPa.


Referring again to FIGS. 2A and 2B, a backstop or insulator shield 6a made of an insulating and preferably shock-absorbing material is provided between contact pad 4 and the top surface of top transducer frame 8a. Insulating shield 6a also acts a slide bearing surface for contact pad 4. To mechanically couple contact pad 4 with transducer 30, cut-outs or thru-holes 18 are provided within backstop 6a and thru-holes 28 are provided within discs 20a and 20b as well as within dielectric film 26 to receive and accommodate protrusions or pins 16 extending from the underside 4b of contact pad 4. The thru-holes 28 within the transducer component layers may also serve to receive a means (not shown), e.g., bolts, threaded bosses, for mechanically coupling the layers together. Optionally, a bottom backstop or shield 6b may be provided on the bottom side of transducer frame 8b to provide mechanical stability as well as to act as an additional shock absorber.


The bottom side of sensory feedback device 2 includes a plate 12 which provides mechanical stability to device 2 by way of a mechanical coupling (not shown), e.g., bolts, which are placed in thru-holes 24 within each of the above described layers of device 2. Plate 12 also functions as an electrical adaptor having electrical traces or contacts 14a, 14b, 14c, which may be in the form a printed circuit board housed within the user interface device, for electrical communication with the control electronics and a source of power (discussed in greater detail below). The exemplary pattern of electrical traces includes traces 14a and 14b for connection to each of the two designate high voltage electrodes and a single trace 14c for connection to both of the grounded electrodes.


With its overall very low-profile and square shape, the sensory/haptic feedback devices of the present invention are particularly suitable for use in a keyboard, touch screen, computer mouse and other user interface devices where only a single finger 38 is used to contact the input portion of the device, as illustrated in FIG. 4. However, those skilled in the art will appreciate other configurations that are suitable for user interface devices designed for contact by a user's palm or with a hand grip, such as trackballs, stylus sticks, joysticks, etc.


With the electrode configuration described above (i.e., two working electrode pairs), transducer 10 is capable of functioning in either a single or a two-phase mode. In the manner configured, the mechanical displacement of the output component, i.e., the two coupled discs 20a and 20b, of the subject sensory feedback device described above has is lateral rather than vertical. In other words, instead of the sensory feedback signal being a force in, a direction perpendicular to the contact surface 4a of the user interface pad 4 and parallel to the input force (designated by arrow 60a in FIG. 4) applied by the user's finger 38 (but in the opposing or upward direction), the sensed feedback or output force (designated by double-head arrow 60b in FIG. 4) of the sensory/haptic feedback devices of the present invention is in a direction parallel to the contact surface 4a and perpendicular to input force 60a. Depending on the rotational alignment of the electrode pairs about an axis perpendicular to the plane of transducer 10 and relative to the position of the user interface pad 4, e.g., a keyboard key pad, and the mode in which the transducer is operated (i.e., single phase or two phase), this lateral movement may be in any direction or directions within 360°. For example, the lateral feedback motion may be from side to side or up and down (both are two-phase actuations) relative to the forward direction of the user's finger (or palm or grip, etc.). While those skilled in the art will recognize certain other actuator configurations which provide a feedback displacement which is transverse or perpendicular to the contact surface of the haptic feedback device, the overall profile of a device so configured may be greater than the aforementioned design.


When operating sensory/haptic feedback device 2 in single-phase mode, only one working pair of electrodes of actuator 30 would be activated at any one time. The single-phase operation of actuator 30 may be controlled using a single high voltage power supply. As the voltage applied to the single-selected working electrode pair is increased, the activated portion (one half) of the transducer film will expand, thereby moving the output disc 20 in-plane in the direction of the inactive portion of the transducer film. FIG. 5A illustrates the force-stroke relationship of the sensory feedback signal (i.e., output disc displacement) of actuator 30 relative to neutral position when alternatingly activating the two working electrode pairs in single-phase mode. As illustrated, the respective forces and displacements of the output disc are equal to each other but in opposite directions. FIG. 5B illustrates the resulting non-linear relationship of the applied voltage to the output displacement of the actuator when operated in this single-phase mode. The “mechanical” coupling of the two electrode pairs by way of the shared dielectric film may be such as to move the output disc in opposite directions. Thus, when both electrode pairs are operated, albeit independently of each other, application of a voltage to the first working electrode pair (phase 1) will move the output disc 20 in one direction, and application of a voltage to the second working electrode pair (phase 2) will move the output disc 20 in the opposite direction. As the various plots of FIG. 5B reflect, as the voltage is varied linearly, the displacement of the actuator is non-linear.


To effect a greater displacement of the output member or component, and thus provide a greater sensory feedback signal to the user, actuator 30 is operated in a two-phase mode, i.e., activating both portions of the actuator simultaneously. FIG. 6A illustrates the force-stroke relationship of the sensory feedback signal of the output disc when the actuator is operated in two-phase mode. As illustrated, both the force and stroke of the two portions 32, 34 of the actuator in this mode are in the same direction and have double the magnitude than the force and stroke of the actuator when operated in single-phase mode. FIG. 6B illustrates the resulting linear relationship of the applied voltage to the output displacement of the actuator when operated in this two-phase mode. By connecting the mechanically coupled portions 32, 34 of the actuator electrically in series and controlling their common node 55, such as in the manner illustrated in the block diagraph 40 of FIG. 7, the relationship between the voltage of the common node 55 and the displacement (or blocked force) of the output member (in whatever configuration) approach a linear correlation. In this mode of operation, the non-linear voltage responses of the two portions 32, 34 of actuator 30 effectively cancel each other out to produce a linear voltage response. With the use of control circuitry 44 and switching assemblies 46a, 46b, one for each portion of the actuator, this linear relationship allows the performance of the actuator to be fine-tuned and modulated by the use of varying types of waveforms supplied to the switch assemblies by the control circuitry. Another advantage of using circuit 40 is ability to reduce the number of switching circuits and power supplies needed to operate the sensory feedback device. Without the use of circuit 40, two independent power supplies and four switching assemblies would be required. Thus, the complexity and cost of the circuitry are reduced while the relationship between the control voltage and the actuator displacement are improved, i.e., made more linear.


Various types of mechanisms may be employed to communicate the input force 60a from the user to effect the desired sensory feedback 60b (see FIG. 4). For example, a capacitive or resistive sensor 50 (see FIG. 7) may be housed within the user interface pad 4 to sense the mechanical force exerted on the user contact surface input by the user. The electrical output 52 from sensor 50 is supplied to the control circuitry 44 which in turn triggers the switch assemblies 46a, 46b to apply the voltage from power supply 42 to the respective transducer portions 32, 34 of the sensory feedback device in accordance with the mode and waveform provided by the control circuitry.


Referring now to FIG. 8, there is illustrated another actuator embodiment 70 of the present invention for use in a sensory/haptic feedback device of the present invention. Actuator 70 includes the same basic actuator structure 30 described above with the inclusion of a mechanism 72 which imposes a negative spring rate bias on output disc 20. Negative spring rate mechanism 72 includes a central hub 76 mechanically coupled to output disc 20 and two opposing leaf spring flexures 74a and 74b extending between hub 76 and a frame side 8a of the actuator. The flexures 74a, 74b are each coupled to the hub and frame by living spring joints 78. Whether operated in single-phase or two-phase mode, the actuator is inherently bi-stable. An advantage of negative biasing, at least in the context of the subject actuators, is that as the displacement/stroke distance of the output element increases, significantly less force is need to achieve a greater stroke distance. The force-stoke relationship of negative force biasing is described in detail in U.S. patent application Ser. No. 11/618,577, which is herein incorporated by reference in its entirety.


Another variation of the present invention involves the hermetic sealing of the EAP actuators to minimize any effects of humidity or moisture condensation that may occur on the EAP film. For the various embodiments described below, the EAP actuator is sealed in a barrier film substantially separately from the other components of the tactile feedback device. The barrier film or casing may be made of, such as foil, which is preferably heat sealed or the like to minimize the leakage of moisture to within the sealed film. Each of these device embodiments enables coupling of the feedback motion of the actuator's output member to the contact surface of the user input surface, e.g., keypad, while minimizing any compromise in the hermetically sealed actuator package. Various exemplary means for coupling the motion of the actuator to the user interface contact surface are also provided.


One such coupling means involves the use of magnets. FIGS. 9A and 913 illustrate a tactile feedback device employing such magnetic coupling. Device 80 includes user interface key cap 82 and EAP actuator 86, where the actuator is optionally hermetically sealed by top and bottom covers 88 and 90 which are made of magnetically inert, rigid materials. The key cap and actuator components are coupled by means of opposing magnetic units. A first magnetic unit 96a/b is provided centrally suspended within EAP film 84 held by frame 92. This magnetic unit, in essence, acts as the output member of actuator 86 and is displaced laterally or in-plane, as discussed above, upon actuation of the actuator. The second magnetic unit 102a/b is held by another cartridge 84, similarly constructed and sized to the actuator cartridge 86 in that a film 100 is held stretched within an open frame 98 with the magnetic unit held centrally suspended therein; however, unlike EAP film 84, film 100 is passive, i.e., has no electrodes. Key pad 82 or at least its underside is made of a material that is attractable to magnetic unit 102, thereby fixing the key pad to suspension cartridge 98. Both magnetic units are typically disc-shaped and may comprise a single magnet or a pair of stacked magnetic discs. In the latter arrangement, as illustrated in the FIGS. 9A and 913, the two magnets of each pair (96a, 96b and 102a, 102b) may be oppositely polarized and thereby fixed together. The opposing suspension and actuator magnetic units may either be oppositely polarized or similarly polarized. When oppositely polarized (i.e., N-S), the magnetic units 96, 102 attract each other (through top sealing layer 88) and, thus, move in parallel/tandem upon actuation of actuator 92, i.e., the feedback motion of the keypad is in the same planar direction as that of the displacement output of the actuator. When the magnetic units 96, 102 have the same polarization (i.e., either N-N or S-S), they repel each other resulting in the units moving both vertically and horizontally away from each other, i.e., the feedback motion of the keypad is in the opposite direction as that of the displacement output of the actuator. In the latter arrangement, the respective films 94, 100 must have sufficient suspension to counter the displacement of the magnetic units caused by the repulsion. An advantage of the repelling arrangement over the attracting arrangement is that it reduces the friction between the magnets and casing 88.


Another embodiment of a sealed actuator is illustrated in FIGS. 10A and 10B. Actuator package 110 includes actuator cartridge 112 sealed between a top and base barriers 114, 116. Actuator cartridge 112 includes open frame 122 having an EAP film 124 stretched between it and a centrally positioned output disc 126. Two (or more) protrusions or pins 120 extend from atop output disc 126 and extend through corresponding holes 118 within top sealing barrier 114 for mechanical coupling to a user input key (not shown). As such, movement of output disc 126, i.e., in the planar direction as configured, in turn translates the user input key. Mounted circumferentially about pins 120 or within holes 118 is a compliant barrier film, such as styrene-ethylene-butadiene-styrene (SEBS) block copolymer, in the form of a ring to provide an elastic and flexible seal therebetween. As such, the pins provide a bridge between the actuator and user interface pad that does not disrupt the hermetic seal about the actuator.



FIGS. 11A and 11B illustrate another sealed actuator package 130 having an actuator cartridge 132 sealed between top and base barriers 134, 136. Actuator cartridge 132 has an open frame 140 and an EAP film 148 stretched between it and a centrally positioned output disc 138. Top barrier 134 has a central section 144 having a shape and diameter substantially matching that of output disc 138. The gap or spacing 145 between the central section 144 and the outer portion of barrier 134 holds a compliant film material, SEBS block copolymer, to allow movement of the central portion without compromising the sealed actuator. Centrally disposed holes 142 and 146, respectively, within each of the actuator output member 138 and barrier film section 144 are aligned to provide a thru hole for receiving a pin, screw or the like for coupling the actuator output motion to a user input member (not shown).



FIGS. 12A-12C illustrate another sealed actuator 150 of the present invention. Actuator package 150 includes actuator cartridge 152 sealed between a top and base barriers 154, 156. Actuator cartridge 152 includes open frame 160 having an EAP film 164 stretched between it and a centrally positioned output disc 162. Two diametrically opposing pin holes extend through top barrier 154 (166a, 166b) and output disc 162 (162a, 162b) for receiving the legs 158a of a lever bar 158. The holes 166a, 166b are countersunk (best illustrated in FIG. 12C) to allow the pins 158a to pivot therein. As such, when actuator 152 is activated with the resulting planar translation of output disc 162, the pins are caused to pivot about the fulcrum defined by the countersunk holes 168a, 168b. The resulting movement of lever bar 158, illustrated by arrows 168 in FIG. 12C, is in a direction perpendicular to the alignment of the bar. The countersunk configuration of these holes allows a close fit between the lever legs and the holes within the top barrier so as to form a seal. Optionally, the legs may be coated with a compliant material to provide a more hermetically sealed environment.



FIG. 13A illustrates another manner of hermetically sealing the actuator employed in a haptic feedback device 170 of the present invention. The actuator includes open frame 174, output disc 176 and EAP film 178 extending therebetween. The actuator is positioned atop a back plate 188 and beneath a keypad 172. Extending about the perimeter of the keypad 172 and between the keypad and actuator frame 174 is a vapor barrier membrane or gasket 184. Membrane may be molded from SEBS, Butyl, or the like. The outer edge of the assembly, including barrier membrane 184, is encased by a sealed packaging 182, which may comprise top and bottom foil layers 180, 182 or the like which are heat sealed together. Optionally, a desiccant or buffer 186 may be positioned within the space between the keypad and the actuator. FIGS. 13B and 13C illustrate device 170 (shown without the desiccant and foil packaging for clarity) when the actuator component is in passive and active states, respectively. In the passive state (FIG. 13B), like the actuator EAP film 178, the barrier membrane 184 has a symmetrical configuration about key pad 172. In the active state (FIG. 13C), the EAP film is selectively activated and/or configured such that output disc 176 moves laterally in one direction, as indicated by arrow 190. In turn, keypad 172 is caused to move in the same direction. The barrier film material 184 is able to stretch and compress to accommodate the movement of keypad 172.


The actuators of the present invention may be provided in a planar array fabricated by continuous web-based manufacturing techniques. Such arrays are highly practical as sensory/haptic feedback devices are often provided in array formats themselves. A computer keyboard is a common example of such. FIGS. 14-17 illustrate arrays of various components of the haptic devices of the present invention at various points in the web fabrication process.



FIGS. 14A and 14B illustrate high voltage and ground sides 200a and 200b, respectively, of an EAP film array 200 (see FIG. 15) for use in an array of EAP actuators for use in the tactile feedback devices of the present invention. Film array 200 includes an electrode array provided in a matrix configuration to increase space and power efficiency. The high voltage side 200a of the EAP film array provides electrode patterns 202 running in vertically (according to the view point illustrated in FIG. 14A) on dielectric film 208 material. Each pattern 202 includes a pair of high voltage lines 202a, 202b. The opposite or ground side 200b of the EAP film array provides electrode patterns 206 running transversally relative to the high voltage electrodes, i.e., horizontally. Each pattern 206 includes a pair of ground lines 206a, 206b. Each pair of opposing high voltage and ground lines (202a, 206a and 202b, 206b) provides a separately activatable electrode pair such that activation of the opposing electrode pairs provides a two-phase output motion in the directions illustrated by arrows 212. The assembled EAP film array 200 (illustrating the intersecting pattern of electrodes on top and bottom sides of dielectric film 208) is provided in FIG. 15 within an exploded view of an array 204 of EAP transducers 222, the latter of which is illustrated in its assembled form in FIG. 16. EAP film array 200 is sandwiched between opposing frame arrays 214a, 214b, with each individual frame segment 216 within each of the two arrays defined by a centrally positioned output disc 218 within an open area. Each combination of frame/disc segments 216 and electrode configurations form an EAP transducer 222. Depending on the application and type of actuator desired, additional layers of components may be added to transducer array 204. For example, to form an array of the bi-stable EAP actuators of FIG. 8, an additional array layer 226 of negative spring rate flexures 224 is provided on one side of the transducer array 204. The complete transducer layer 220 having an array of EAP transducers 228 is illustrated in exploded and assembled views in FIGS. 15 and 17, respectively. The transducer array 220 may be incorporated in whole to a user interface array, such as a keyboard, for example, or the individual transducers 228 may be singulated for use in individual user interface devices, such as individual keypads, for example.


Regarding methodology, the subject methods may include each of the mechanical and/or activities associated with use of the devices described. As such, methodology implicit to the use of the devices described forms part of the invention. Other methods may focus on fabrication of such devices.


As for other details of the present invention, materials and alternate related configurations may be employed as within the level of those with skill in the relevant art. The same may hold true with respect to method-based aspects of the invention in terms of additional acts as commonly or logically employed. In addition, though the invention has been described in reference to several examples, optionally incorporating various features, the invention is not to be limited to that which is described or indicated as contemplated with respect to each variation of the invention. Various changes may be made to the invention described and equivalents (whether recited herein or not included for the sake of some brevity) may be substituted without departing from the true spirit and scope of the invention. Any number of the individual parts or subassemblies shown may be integrated in their design. Such changes or others may be undertaken or guided by the principles of design for assembly.


Also, it is contemplated that any optional feature of the inventive variations described may be set forth and claimed independently, or in combination with any one or more of the features described herein. Reference to a singular item, includes the possibility that there are plural of the same items present. More specifically, as used herein and in the appended claims, the singular forms “a,” “an,” “said,” and “the” include plural referents unless the specifically stated otherwise. In other words, use of the articles allow for “at least one” of the subject item in the description above as well as the claims below. It is further noted that the claims may be drafted to exclude any optional element. As such, this statement is intended to serve as antecedent basis for use of such exclusive terminology as “solely,” “only” and the like in connection with the recitation of claim elements, or use of a “negative” limitation. Without the use of such exclusive terminology, the term “comprising” in the claims shall allow for the inclusion of any additional element—irrespective of whether a given number of elements are enumerated in the claim, or the addition of a feature could be regarded as transforming the nature of an element set forth in the claims. Stated otherwise, unless specifically defined herein, all technical and scientific terms used herein are to be given as broad a commonly understood meaning as possible while maintaining claim validity.


In all, the breadth of the present invention is not to be limited by the examples provided. That being said, we claim:

Claims
  • 1. A method for fabricating electroactive polymer transducers, the method comprising: providing an electroactive polymer film comprising an elastomeric dielectric polymer having an elastic modulus of less than about 100 MPa;forming an array of electrodes on the electroactive polymer film;sandwiching the electrode array between a top and bottom array of frame components to form an array of electroactive polymer transducers; andapplying an array of negative spring rate biasing mechanisms onto the array of electroactive polymer transducers,wherein the array of negative spring rate biasing mechanisms are configured to impose a negative spring rate bias on the electroactive polymer film, andwherein the negative spring rate biasing mechanisms comprise a central hub mechanically coupled to an output disc and two opposing leaf spring flexures extending between the central hub and a frame side of an electroactive polymer transducer.
  • 2. The method of claim 1, further comprising singulating the array of electroactive polymer transducers.
  • 3. The method of claim 2, further comprising incorporating at least one singulated electroactive polymer transducer into a user interface device.
  • 4. The method of claim 1, further comprising incorporating the transducer array into an array of user interface devices.
  • 5. The method of claim 1, wherein each of the transducers are fabricated with web-based manufacturing techniques.
  • 6. The method of claim 1, further comprising sealing at least one electroactive polymer transducer of the array of electroactive polymer transducers.
  • 7. The method of claim 1, wherein sealing the at least one electroactive polymer transducer comprises hermetically sealing the at least one electroactive polymer transducer.
  • 8. The method of claim 1, further comprising applying at least one disc segment onto the array of electroactive polymer transducers.
  • 9. The method of claim 1, further comprising applying at least one output member onto the array of electroactive polymer transducers.
  • 10. The method of claim 9, further comprising mechanically coupling the at least one output member to at least one user contact surface.
  • 11. The method of claim 9, further comprising magnetically coupling the at least one output member to at least one user contact surface.
  • 12. The method of claim 1, wherein forming the array of electrodes on the film comprises applying a high voltage electrode pattern comprising high voltage lines and a ground side electrode pattern comprising ground lines.
  • 13. The method of claim 12, wherein the high voltage lines comprise a pair of high voltage lines and the ground lines comprise a pair of ground lines corresponding to the pair of high voltage lines.
  • 14. The method of claim 1, further comprising incorporating the array of electroactive polymer transducers into a user interface array.
  • 15. The method of claim 14, wherein the user interface array is a keyboard.
  • 16. The method of claim 1, further comprising applying at least one mechanical force sensor onto the array of electroactive polymer transducers.
  • 17. The method of claim 1, further comprising pre-straining the electroactive polymer film by stretching the electroactive polymer film and holding the electroactive polymer film in a pre-strained condition.
  • 18. The method of claim 1, wherein the array of negative spring rate biasing mechanisms are configured to impose the negative spring rate bias on a output component secured to the electroactive polymer film.
  • 19. A method for fabricating electroactive polymer transducers, the method comprising: providing an electroactive polymer film comprising an elastomeric dielectric polymer having an elastic modulus of less than about 100 MPa, wherein the electroactive polymer film is a first electroactive polymer film;forming an array of electrodes on the electroactive polymer film;sandwiching the electrode array between a top and bottom array of frame components to form an array of electroactive polymer transducers;applying at least one first magnetic unit to the first electroactive polymer film;providing a second electroactive polymer film;and applying at least one second magnetic unit to the second electroactive polymer film, and wherein the at least one first magnetic unit and the at least one second magnetic unit are oppositely polarized or similarly polarized.
Parent Case Info

This application is a divisional application of U.S. Ser. No. 13/069,908 filed in the U.S. Patent Office on Mar. 23, 2011, which issued as U.S. Pat. No. 8,319,403 on Nov. 27, 2012, which is a divisional of U.S. Ser. No. 12/766,771 filed Apr. 23, 2010, which issued as U.S. Pat. No. 8,127,437 on Mar. 6, 2012, which is a divisional of U.S. Ser. No. 12/163,554, filed in the U.S. Patent Office on Jun. 27, 2008, which issued as U.S. Pat. No. 7,952,261 on May 31, 2011, which was a nonprovisional of U.S. Ser. No. 60/937,787 filed Jun. 29, 2007.

US Referenced Citations (715)
Number Name Date Kind
2430013 Hansell Nov 1947 A
2967914 Pye Jan 1961 A
3050034 Benton Aug 1962 A
3056932 Wood Oct 1962 A
3303750 Powell Feb 1967 A
3304773 Rogallo Feb 1967 A
3400281 Malik Sep 1968 A
3403234 Barnes, Jr. et al. Sep 1968 A
3463942 Mellon Aug 1969 A
3509714 Walton May 1970 A
3516846 Matson Jun 1970 A
3539841 Riff Nov 1970 A
3558936 Horan Jan 1971 A
3606241 Bornholdt Sep 1971 A
3699963 Zaffaroni Oct 1972 A
3783480 Booe Jan 1974 A
3798473 Murayama et al. Mar 1974 A
3801839 Yo Apr 1974 A
3816774 Ohnuki et al. Jun 1974 A
3821967 Sturman et al. Jul 1974 A
3832580 Yamamuro et al. Aug 1974 A
3851363 Booe Dec 1974 A
3903733 Murayama et al. Sep 1975 A
3935485 Yoshida et al. Jan 1976 A
3940637 Ohigashi et al. Feb 1976 A
3943614 Yoshikawa et al. Mar 1976 A
3947644 Uchikawa Mar 1976 A
3965757 Barrus Jun 1976 A
4011474 O'Neill Mar 1977 A
4028566 Franssen et al. Jun 1977 A
4051395 Taylor Sep 1977 A
4056742 Tibbetts Nov 1977 A
4088915 Kodama May 1978 A
4089927 Taylor May 1978 A
4127749 Atoji et al. Nov 1978 A
4140936 Bullock Feb 1979 A
4155950 Berezuk et al. May 1979 A
4158787 Forward Jun 1979 A
4170742 Itagaki et al. Oct 1979 A
4190336 Frank et al. Feb 1980 A
4216403 Krempl et al. Aug 1980 A
4227347 Tam Oct 1980 A
4234813 Iguchi et al. Nov 1980 A
4236416 Barcita Dec 1980 A
4240535 Pierce et al. Dec 1980 A
4245815 Willis Jan 1981 A
4257594 Conrey et al. Mar 1981 A
4266339 Kalt May 1981 A
4283461 Wooden et al. Aug 1981 A
4283649 Heinouchi Aug 1981 A
4284921 Lemonon et al. Aug 1981 A
4290983 Sasaki et al. Sep 1981 A
4297394 Wooden et al. Oct 1981 A
4315433 Edelman et al. Feb 1982 A
4322877 Taylor Apr 1982 A
4326762 Hockenbrock et al. Apr 1982 A
4330730 Kurz et al. May 1982 A
4342936 Marcus et al. Aug 1982 A
4344743 Bessman et al. Aug 1982 A
4346505 Lemonon et al. Aug 1982 A
4363991 Edelman Dec 1982 A
4376302 Miller Mar 1983 A
4384394 Lemonon et al. May 1983 A
4387318 Kolm et al. Jun 1983 A
4400634 Micheron Aug 1983 A
4401911 Ravinet et al. Aug 1983 A
4404490 Taylor et al. Sep 1983 A
4413202 Krempl et al. Nov 1983 A
4433359 Hamabe et al. Feb 1984 A
4434452 Hamabe et al. Feb 1984 A
4435667 Kolm et al. Mar 1984 A
4442372 Roberts Apr 1984 A
4469920 Murphy Sep 1984 A
4469978 Hamada et al. Sep 1984 A
4472255 Millington et al. Sep 1984 A
4473806 Johnston Sep 1984 A
4500377 Broussoux et al. Feb 1985 A
4518555 Ravinet et al. May 1985 A
4566135 Schmidt Jan 1986 A
4588998 Yamamuro et al. May 1986 A
4592383 Rikuta Jun 1986 A
4595338 Kolm et al. Jun 1986 A
4598338 Van Devender et al. Jul 1986 A
4605167 Maehara Aug 1986 A
4626730 Hubbard, Jr. Dec 1986 A
4638207 Radice Jan 1987 A
4654554 Kishi Mar 1987 A
4668449 Soni et al. May 1987 A
4678955 Toda Jul 1987 A
4686440 Hatamura et al. Aug 1987 A
4689614 Strachan Aug 1987 A
4704556 Kay Nov 1987 A
4715396 Fox Dec 1987 A
4733121 Hebert Mar 1988 A
4748366 Taylor May 1988 A
4762733 Thiel et al. Aug 1988 A
4783888 Fujii et al. Nov 1988 A
4784479 Ikemori Nov 1988 A
4785837 Hansen et al. Nov 1988 A
4786837 Kalnin et al. Nov 1988 A
4787411 Moldenhauer Nov 1988 A
4793588 Laverty, Jr. Dec 1988 A
4803671 Rochling et al. Feb 1989 A
4814661 Ratzlaff et al. Mar 1989 A
4820236 Berliner et al. Apr 1989 A
4824107 French Apr 1989 A
4825116 Itoh et al. Apr 1989 A
4833659 Geil et al. May 1989 A
4835747 Billet May 1989 A
4839872 Gragnolati et al. Jun 1989 A
4843275 Radice Jun 1989 A
4849668 Crawley et al. Jul 1989 A
4868447 Lee et al. Sep 1989 A
4869282 Sittler et al. Sep 1989 A
4870868 Gastgeb et al. Oct 1989 A
4877957 Okada et al. Oct 1989 A
4877988 McGinniss et al. Oct 1989 A
4879698 Langberg Nov 1989 A
4885783 Whitehead et al. Dec 1989 A
4885830 Ohtaka Dec 1989 A
4904222 Gastgeb et al. Feb 1990 A
4906886 Breimesser et al. Mar 1990 A
4911057 Fishman Mar 1990 A
4911995 Belanger et al. Mar 1990 A
4958100 Crawley et al. Sep 1990 A
4961956 Simopoulos et al. Oct 1990 A
4969197 Takaya Nov 1990 A
4971287 Shaw Nov 1990 A
4980597 Iwao Dec 1990 A
4989951 Miyano et al. Feb 1991 A
5024872 Wilson et al. Jun 1991 A
RE33651 Blonder et al. Jul 1991 E
5030874 Saito et al. Jul 1991 A
5048791 Ellison et al. Sep 1991 A
5065067 Todd et al. Nov 1991 A
5076538 Mohr et al. Dec 1991 A
5085401 Botting et al. Feb 1992 A
5090246 Colla et al. Feb 1992 A
5090794 Hatano et al. Feb 1992 A
5100100 Benson et al. Mar 1992 A
5119840 Shibata Jun 1992 A
5132582 Hayashi et al. Jul 1992 A
5142510 Rodda Aug 1992 A
5148735 Veletovac Sep 1992 A
5149514 Sanjurjo Sep 1992 A
5153820 MacFarlane et al. Oct 1992 A
5153859 Chatigny et al. Oct 1992 A
5156885 Budd Oct 1992 A
5170089 Fulton Dec 1992 A
5171734 Sanjurjo et al. Dec 1992 A
5172024 Broussoux et al. Dec 1992 A
5188447 Chiang et al. Feb 1993 A
5199641 Hohm et al. Apr 1993 A
5206557 Bobbio Apr 1993 A
5229979 Scheinbeim et al. Jul 1993 A
5232196 Hutchings et al. Aug 1993 A
5240004 Walinsky et al. Aug 1993 A
5244707 Shores Sep 1993 A
5250784 Muller et al. Oct 1993 A
5254296 Perlman Oct 1993 A
5258201 Munn et al. Nov 1993 A
5281885 Watanabe et al. Jan 1994 A
5288551 Sato et al. Feb 1994 A
5291335 Ogino Mar 1994 A
5302318 Dutta et al. Apr 1994 A
5305178 Binder et al. Apr 1994 A
5321332 Toda Jun 1994 A
5350966 Culp Sep 1994 A
5352574 Guiseppi-Elie Oct 1994 A
5356500 Scheinbeim et al. Oct 1994 A
5361240 Pearce Nov 1994 A
5368704 Madou et al. Nov 1994 A
5369995 Scheinbeim et al. Dec 1994 A
5377258 Bro Dec 1994 A
5380396 Shikida et al. Jan 1995 A
5410210 Sato et al. Apr 1995 A
5417235 Wise et al. May 1995 A
5424596 Mendenhall et al. Jun 1995 A
5428523 McDonnal Jun 1995 A
5430565 Yamanouchi et al. Jul 1995 A
5438553 Wilson et al. Aug 1995 A
5440194 Beurrier Aug 1995 A
5452878 Gravesen et al. Sep 1995 A
5481152 Bushulte Jan 1996 A
5488872 McCormick Feb 1996 A
5493372 Mashtare et al. Feb 1996 A
5495137 Park et al. Feb 1996 A
5499127 Tsubota et al. Mar 1996 A
5500635 Mott Mar 1996 A
5504388 Kimura et al. Apr 1996 A
5509888 Miller Apr 1996 A
5515341 Toda et al. May 1996 A
5548177 Carroll Aug 1996 A
5559387 Beurrier Sep 1996 A
5563466 Rennex et al. Oct 1996 A
5571148 Loeb et al. Nov 1996 A
5578889 Epstein Nov 1996 A
5589725 Haertling Dec 1996 A
5591986 Niigaki et al. Jan 1997 A
5593462 Gueguen et al. Jan 1997 A
5632841 Hellbaum et al. May 1997 A
5636072 Shibata et al. Jun 1997 A
5636100 Zheng et al. Jun 1997 A
5642015 Whitehead et al. Jun 1997 A
5647245 Takei Jul 1997 A
5668703 Rossi et al. Sep 1997 A
5678571 Brown Oct 1997 A
5682075 Bolleman et al. Oct 1997 A
5684637 Floyd Nov 1997 A
5696663 Unami et al. Dec 1997 A
5703295 Ishida et al. Dec 1997 A
5717563 MacDougall et al. Feb 1998 A
5722418 Bro Mar 1998 A
5744908 Kyushima Apr 1998 A
5751090 Henderson May 1998 A
5755909 Gailus May 1998 A
5761782 Sager Jun 1998 A
5766934 Guiseppi-Elie Jun 1998 A
5777540 Dedert et al. Jul 1998 A
5788468 Dewa et al. Aug 1998 A
5800421 Lemelson Sep 1998 A
5801475 Kimura Sep 1998 A
5814921 Carroll Sep 1998 A
5828157 Miki et al. Oct 1998 A
5831371 Bishop Nov 1998 A
5835453 Wynne et al. Nov 1998 A
5847690 Boie et al. Dec 1998 A
5857694 Lazarus et al. Jan 1999 A
5876675 Kennedy Mar 1999 A
5883466 Suyama et al. Mar 1999 A
5889354 Sager Mar 1999 A
5892314 Sager et al. Apr 1999 A
5896287 Mihara et al. Apr 1999 A
5897097 Biegelsen et al. Apr 1999 A
5900572 Aeroe May 1999 A
5902836 Bennett et al. May 1999 A
5910107 Iliff Jun 1999 A
5912499 Diem et al. Jun 1999 A
5913310 Brown Jun 1999 A
5914901 Pascucci Jun 1999 A
5915377 Coffee Jun 1999 A
5918502 Bishop Jul 1999 A
5928262 Harber Jul 1999 A
5928547 Shea et al. Jul 1999 A
5933170 Takeuchi et al. Aug 1999 A
5971355 Biegelsen et al. Oct 1999 A
5977685 Kurita et al. Nov 1999 A
5984760 Marine Nov 1999 A
5988902 Holehan Nov 1999 A
6012961 Sharpe, III et al. Jan 2000 A
6037707 Gailus et al. Mar 2000 A
6040356 Kanki et al. Mar 2000 A
6048276 Vandergrift Apr 2000 A
6048622 Hagood, IV et al. Apr 2000 A
6055859 Kozuka et al. May 2000 A
6059546 Brenan et al. May 2000 A
6060811 Fox et al. May 2000 A
6069420 Mizzi et al. May 2000 A
6074178 Bishop et al. Jun 2000 A
6075504 Stoller Jun 2000 A
6078126 Rollins et al. Jun 2000 A
6084321 Hunter et al. Jul 2000 A
6089701 Hashizume et al. Jul 2000 A
6093078 Cook Jul 2000 A
6093995 Lazarus et al. Jul 2000 A
6094988 Aindow Aug 2000 A
6097821 Yokoyama et al. Aug 2000 A
6108275 Hughes et al. Aug 2000 A
6111743 Lavene Aug 2000 A
6117396 Demers Sep 2000 A
6130510 Kurihara et al. Oct 2000 A
6133398 Bhat et al. Oct 2000 A
6140131 Sunakawa et al. Oct 2000 A
6140740 Porat et al. Oct 2000 A
6140746 Miyashita et al. Oct 2000 A
6148842 Kappel et al. Nov 2000 A
6156842 Hoenig et al. Dec 2000 A
6157528 Anthony Dec 2000 A
6161966 Chang et al. Dec 2000 A
6165126 Merzenich et al. Dec 2000 A
6168133 Heinz et al. Jan 2001 B1
6181351 Merrill et al. Jan 2001 B1
6184044 Sone et al. Feb 2001 B1
6184608 Cabuz et al. Feb 2001 B1
6184609 Johansson et al. Feb 2001 B1
6184844 Filipovic et al. Feb 2001 B1
6190805 Takeuchi et al. Feb 2001 B1
6194815 Carroll Feb 2001 B1
6196935 Spangler et al. Mar 2001 B1
6198203 Hotomi Mar 2001 B1
6198204 Pottenger Mar 2001 B1
6201398 Takada Mar 2001 B1
6210827 Dopp et al. Apr 2001 B1
6228533 Ohashi et al. May 2001 B1
6232702 Newnham et al. May 2001 B1
6239535 Toda et al. May 2001 B1
6239536 Lakin May 2001 B1
6240814 Boyd et al. Jun 2001 B1
6248262 Kubotera et al. Jun 2001 B1
6249076 Madden et al. Jun 2001 B1
6252221 Kaneko et al. Jun 2001 B1
6252334 Nye et al. Jun 2001 B1
6252336 Hall Jun 2001 B1
6255758 Cabuz et al. Jul 2001 B1
6262516 Fukuda et al. Jul 2001 B1
6268219 McBride et al. Jul 2001 B1
6282074 Anthony Aug 2001 B1
6284435 Cao Sep 2001 B1
6286961 Ogawa Sep 2001 B1
6291155 Raguse et al. Sep 2001 B1
6291928 Lazarus et al. Sep 2001 B1
6294859 Jaenker Sep 2001 B1
6297579 Martin et al. Oct 2001 B1
6311950 Kappel et al. Nov 2001 B1
6316084 Claus et al. Nov 2001 B1
6321428 Toda et al. Nov 2001 B1
6330463 Hedrich Dec 2001 B1
6333595 Horikawa et al. Dec 2001 B1
6334673 Kitahara et al. Jan 2002 B1
6336367 Raeisaenen Jan 2002 B1
6336880 Agner Jan 2002 B1
6339527 Farooq et al. Jan 2002 B1
6343129 Pelrine et al. Jan 2002 B1
6345840 Meyer et al. Feb 2002 B1
6349141 Corsaro Feb 2002 B1
6355185 Kubota Mar 2002 B1
6358021 Cabuz Mar 2002 B1
6359370 Chang Mar 2002 B1
6366193 Duggal et al. Apr 2002 B2
6369954 Berge et al. Apr 2002 B1
6375857 Ng et al. Apr 2002 B1
6376971 Pelrine et al. Apr 2002 B1
6377383 Whitehead et al. Apr 2002 B1
6379393 Mavroidis et al. Apr 2002 B1
6379809 Simpson et al. Apr 2002 B1
6385021 Takeda et al. May 2002 B1
6385429 Weber et al. May 2002 B1
6388043 Langer et al. May 2002 B1
6388553 Shea et al. May 2002 B1
6388856 Anthony May 2002 B1
6400065 Toda et al. Jun 2002 B1
6404107 Lazarus et al. Jun 2002 B1
6411009 Jaenker Jun 2002 B2
6411013 Horning Jun 2002 B1
6424079 Carroll Jul 2002 B1
6429573 Koopmann et al. Aug 2002 B2
6429576 Simes Aug 2002 B1
6433689 Hovind et al. Aug 2002 B1
6434245 Zimmermann Aug 2002 B1
6435840 Sharma et al. Aug 2002 B1
6436531 Kollaja et al. Aug 2002 B1
6437489 Shinke et al. Aug 2002 B1
6457697 Kolze Oct 2002 B1
6459088 Yasuda et al. Oct 2002 B1
6471185 Lewin et al. Oct 2002 B2
6475931 Bower et al. Nov 2002 B2
6486589 Dujari et al. Nov 2002 B1
6492762 Pant et al. Dec 2002 B1
6495945 Yamaguchi et al. Dec 2002 B2
6499509 Berger et al. Dec 2002 B2
6502803 Mattes Jan 2003 B1
6504286 Porat et al. Jan 2003 B1
6509802 Kasperkovitz Jan 2003 B2
6514237 Maseda Feb 2003 B1
6522516 Anthony Feb 2003 B2
6523560 Williams et al. Feb 2003 B1
6528925 Takeuchi et al. Mar 2003 B1
6528928 Burns et al. Mar 2003 B1
6530266 Adderton et al. Mar 2003 B1
6532145 Carlen et al. Mar 2003 B1
6540893 Wakida et al. Apr 2003 B1
6543110 Pelrine et al. Apr 2003 B1
6545384 Pelrine et al. Apr 2003 B1
6562513 Takeuchi et al. May 2003 B1
6583533 Pelrine et al. Jun 2003 B2
6586859 Kornbluh et al. Jul 2003 B2
6590267 Goodwin-Johansson et al. Jul 2003 B1
6593155 Mohler et al. Jul 2003 B2
6613816 Mahdi et al. Sep 2003 B2
6617759 Zumeris et al. Sep 2003 B1
6617765 Lagier et al. Sep 2003 B1
6619799 Blum et al. Sep 2003 B1
6628040 Pelrine et al. Sep 2003 B2
6631068 Lobo Oct 2003 B1
6637276 Adderton et al. Oct 2003 B2
6640402 Vooren et al. Nov 2003 B1
6644027 Kelly Nov 2003 B1
6646077 Lyons Nov 2003 B1
6650455 Miles Nov 2003 B2
6652938 Nishikawa et al. Nov 2003 B1
6664718 Pelrine et al. Dec 2003 B2
6668109 Nahum et al. Dec 2003 B2
6673533 Wohlstadter et al. Jan 2004 B1
6680825 Murphy et al. Jan 2004 B1
6682500 Soltanpour et al. Jan 2004 B2
6690101 Magnussen et al. Feb 2004 B2
6700314 Cuhat et al. Mar 2004 B2
6701296 Kramer et al. Mar 2004 B1
6707236 Pelrine et al. Mar 2004 B2
6720710 Wenzel et al. Apr 2004 B1
6733130 Blum et al. May 2004 B2
6743273 Chung et al. Jun 2004 B2
6762050 Fukushima et al. Jul 2004 B2
6781284 Pelrine et al. Aug 2004 B1
6784227 Simon et al. Aug 2004 B2
6791205 Woodbridge Sep 2004 B2
6796639 Sugahara Sep 2004 B2
6800155 Senecal et al. Oct 2004 B2
6804068 Sasaki et al. Oct 2004 B2
6806621 Heim et al. Oct 2004 B2
6806806 Anthony Oct 2004 B2
6806808 Watters et al. Oct 2004 B1
6809462 Pelrine et al. Oct 2004 B2
6809928 Gwin et al. Oct 2004 B2
6812624 Pei et al. Nov 2004 B1
6824689 Wang et al. Nov 2004 B2
6847153 Balizer Jan 2005 B1
6847155 Schwartz et al. Jan 2005 B2
6856305 Nagano Feb 2005 B2
6864592 Kelly Mar 2005 B1
6866242 Hirota Mar 2005 B2
6867533 Su et al. Mar 2005 B1
6869275 Dante et al. Mar 2005 B2
6876125 Basheer et al. Apr 2005 B2
6876135 Pelrine et al. Apr 2005 B2
6879318 Chan et al. Apr 2005 B1
6882086 Kornbluh et al. Apr 2005 B2
6891317 Pei et al. May 2005 B2
6902048 Chung Jun 2005 B1
6911764 Pelrine et al. Jun 2005 B2
6935287 Shinogle Aug 2005 B2
6938945 Wald et al. Sep 2005 B2
6940211 Pelrine et al. Sep 2005 B2
6940212 Mueller Sep 2005 B2
6940221 Matsukiyo et al. Sep 2005 B2
6944931 Shcheglov et al. Sep 2005 B2
6952313 Schrader Oct 2005 B2
6967430 Johansson Nov 2005 B2
6994314 Garnier et al. Feb 2006 B2
6997870 Couvillon, Jr. Feb 2006 B2
7008838 Hosking et al. Mar 2006 B1
7011378 Maluf et al. Mar 2006 B2
7011760 Wang et al. Mar 2006 B2
7029056 Browne et al. Apr 2006 B2
7034432 Pelrine et al. Apr 2006 B1
7037270 Seward May 2006 B2
7038357 Goldenberg et al. May 2006 B2
7049732 Pei et al. May 2006 B2
7052594 Pelrine et al. May 2006 B2
7062055 Pelrine et al. Jun 2006 B2
7063268 Chrysler et al. Jun 2006 B2
7063377 Brei et al. Jun 2006 B2
7064472 Pelrine et al. Jun 2006 B2
7071596 Krill Jul 2006 B2
7075162 Unger Jul 2006 B2
7075213 Krill Jul 2006 B2
7092238 Saito et al. Aug 2006 B2
7099141 Kaufman et al. Aug 2006 B1
7104146 Benslimane et al. Sep 2006 B2
7109643 Hirai et al. Sep 2006 B2
7113318 Onuki et al. Sep 2006 B2
7113848 Hanson Sep 2006 B2
7115092 Park et al. Oct 2006 B2
7140180 Gerber et al. Nov 2006 B2
7141888 Sabol et al. Nov 2006 B2
7142368 Kim et al. Nov 2006 B2
7142369 Wu et al. Nov 2006 B2
7144616 Unger et al. Dec 2006 B1
7148789 Sadler et al. Dec 2006 B2
7164212 Leijon et al. Jan 2007 B2
7166952 Topliss et al. Jan 2007 B2
7166953 Heim et al. Jan 2007 B2
7170665 Kaneko et al. Jan 2007 B2
7190016 Cahalen et al. Mar 2007 B2
7193350 Blackburn et al. Mar 2007 B1
7195393 Potter Mar 2007 B2
7195950 Taussig Mar 2007 B2
7196688 Schena Mar 2007 B2
7199302 Raisanen Apr 2007 B2
7199501 Pei et al. Apr 2007 B2
7205704 Audren et al. Apr 2007 B2
7205978 Poupyrev et al. Apr 2007 B2
7209280 Goossens Apr 2007 B2
7211937 Kornbluh et al. May 2007 B2
7220785 Saito May 2007 B2
7224106 Pei et al. May 2007 B2
7235152 Bell et al. Jun 2007 B2
7237524 Pelrine et al. Jul 2007 B2
7242106 Kelly Jul 2007 B2
7242141 Pschenitzka et al. Jul 2007 B2
7245440 Peseux Jul 2007 B2
7256943 Kobrin et al. Aug 2007 B1
7259495 Asai et al. Aug 2007 B2
7259503 Pei et al. Aug 2007 B2
7276090 Shahinpoor et al. Oct 2007 B2
7291512 Unger Nov 2007 B2
7298054 Hirsch Nov 2007 B2
7298559 Kato et al. Nov 2007 B2
7298603 Mizuno et al. Nov 2007 B2
7301261 Ifuku et al. Nov 2007 B2
7310874 Higuchi et al. Dec 2007 B2
7312917 Jacob Dec 2007 B2
7316794 O/Brien Jan 2008 B2
7320457 Heim et al. Jan 2008 B2
7321185 Schultz Jan 2008 B2
7323790 Taylor et al. Jan 2008 B2
7332688 Browne et al. Feb 2008 B2
7339285 Negron Crespo Mar 2008 B2
7339572 Schena Mar 2008 B2
7342573 Ryynanen Mar 2008 B2
7344763 Kokeguchi et al. Mar 2008 B2
7355293 Bernhoff et al. Apr 2008 B2
7359124 Fang et al. Apr 2008 B1
7362031 Maita et al. Apr 2008 B2
7362032 Pelrine et al. Apr 2008 B2
7362889 Dubowsky et al. Apr 2008 B2
7368862 Pelrine et al. May 2008 B2
7371596 Warner, Jr. et al. May 2008 B2
7373454 Noe May 2008 B1
7378783 Pelrine et al. May 2008 B2
7392876 Browne et al. Jul 2008 B2
7394182 Pelrine et al. Jul 2008 B2
7394282 Sinha et al. Jul 2008 B2
7394641 Won et al. Jul 2008 B2
7397166 Morgan et al. Jul 2008 B1
7401846 Browne et al. Jul 2008 B2
7411332 Kornbluh et al. Aug 2008 B2
7426340 Seo Sep 2008 B2
7429074 McKnight et al. Sep 2008 B2
7429495 Wan Sep 2008 B2
7436099 Pei et al. Oct 2008 B2
7436646 Delince et al. Oct 2008 B2
7442421 Li et al. Oct 2008 B2
7442760 Roberts et al. Oct 2008 B2
7444072 Seo Oct 2008 B2
7446926 Sampsell Nov 2008 B2
7449821 Dausch Nov 2008 B2
7454820 Nakamura Nov 2008 B2
7456549 Heim et al. Nov 2008 B2
7468575 Pelrine et al. Dec 2008 B2
7481120 Gravesen et al. Jan 2009 B2
7482745 Shirogane et al. Jan 2009 B2
7492076 Heim et al. Feb 2009 B2
7498729 Ogino Mar 2009 B2
7499223 Berge et al. Mar 2009 B2
7511706 Schena Mar 2009 B2
7513624 Yavid et al. Apr 2009 B2
7515350 Berge et al. Apr 2009 B2
7518284 Benslimane et al. Apr 2009 B2
7521847 Heim Apr 2009 B2
7537197 Heim et al. May 2009 B2
7548015 Benslimane et al. Jun 2009 B2
7548232 Shahoian et al. Jun 2009 B2
7567681 Pelrine et al. Jul 2009 B2
7573064 Benslimane et al. Aug 2009 B2
7585122 Eromaki et al. Sep 2009 B2
7586242 Yokoyama et al. Sep 2009 B2
7595580 Heim Sep 2009 B2
7608989 Heydt et al. Oct 2009 B2
7626319 Heim Dec 2009 B2
7646544 Batchko et al. Jan 2010 B2
7648118 Ukpai et al. Jan 2010 B2
7659918 Turner Feb 2010 B2
7679267 Heim Mar 2010 B2
7679839 Polyakov et al. Mar 2010 B2
7690622 Ito et al. Apr 2010 B2
7702227 Ito et al. Apr 2010 B2
7703740 Franklin Apr 2010 B1
7703742 Heim et al. Apr 2010 B2
7703839 McKnight et al. Apr 2010 B2
7705521 Pelrine et al. Apr 2010 B2
7714701 Altan et al. May 2010 B2
7732999 Clausen et al. Jun 2010 B2
7733575 Heim et al. Jun 2010 B2
7745374 Tanaka et al. Jun 2010 B2
7750532 Heim Jul 2010 B2
7750617 Omi Jul 2010 B2
7761981 Rosenthal et al. Jul 2010 B2
7772745 Kawakubo et al. Aug 2010 B2
7785656 Pei et al. Aug 2010 B2
7787646 Pelrine et al. Aug 2010 B2
7813047 Wang et al. Oct 2010 B2
7824580 Boll et al. Nov 2010 B2
7886993 Bachmaier et al. Feb 2011 B2
7893965 Heim et al. Feb 2011 B2
7898159 Heydt et al. Mar 2011 B2
7911115 Pelrine et al. Mar 2011 B2
7911761 Biggs et al. Mar 2011 B2
7915789 Smith Mar 2011 B2
7915790 Heim et al. Mar 2011 B2
7921541 Pei et al. Apr 2011 B2
7923064 Pelrine et al. Apr 2011 B2
7923902 Heim Apr 2011 B2
7923982 Sumita Apr 2011 B2
7940476 Polyakov et al. May 2011 B2
7952261 Lipton et al. May 2011 B2
7958789 Hayakawa et al. Jun 2011 B2
7971850 Heim et al. Jul 2011 B2
7980671 Nystrom et al. Jul 2011 B2
7986466 Lee et al. Jul 2011 B2
7990022 Heim Aug 2011 B2
7997260 Kaakkola et al. Aug 2011 B2
8004339 Barrow Aug 2011 B2
8007986 Zhang et al. Aug 2011 B2
8026023 Hamada Sep 2011 B2
8033324 Mukasa et al. Oct 2011 B2
8042264 Rosenthal et al. Oct 2011 B2
8049333 Alden et al. Nov 2011 B2
8050601 Lin et al. Nov 2011 B2
8054566 Heim et al. Nov 2011 B2
8058861 Pelrine et al. Nov 2011 B2
8072121 Heim et al. Dec 2011 B2
8074939 Hyde et al. Dec 2011 B2
8093783 Rosenthal et al. Jan 2012 B2
8127437 Lipton et al. Mar 2012 B2
8133932 Kijlstra et al. Mar 2012 B2
8164835 Heim et al. Apr 2012 B2
8172998 Bennett et al. May 2012 B2
8183739 Heim May 2012 B2
8211054 Dewey Jul 2012 B2
8221944 Shirasaki et al. Jul 2012 B2
8222799 Polyakov et al. Jul 2012 B2
8237324 Pei et al. Aug 2012 B2
8248750 Biggs et al. Aug 2012 B2
8258238 Boersma et al. Sep 2012 B2
8283839 Heim Oct 2012 B2
8294600 Peterson et al. Oct 2012 B2
8310444 Peterson et al. Nov 2012 B2
8316526 Pei et al. Nov 2012 B2
8319403 Lipton et al. Nov 2012 B2
8419822 Li Apr 2013 B2
8421316 Tryson et al. Apr 2013 B2
8508109 Pelrine et al. Aug 2013 B2
8545987 Strader et al. Oct 2013 B2
8585007 Schapeler et al. Nov 2013 B2
8594839 Hanson Nov 2013 B2
8679575 Biggs et al. Mar 2014 B2
8679621 Blaiszik et al. Mar 2014 B2
8773373 Sato et al. Jul 2014 B2
8779650 Jenninger et al. Jul 2014 B2
8842355 Lipton et al. Sep 2014 B2
8975888 Pelrine et al. Mar 2015 B2
8981621 Pelrine et al. Mar 2015 B2
RE45464 Kornbluh et al. Apr 2015 E
20010007449 Kobachi et al. Jul 2001 A1
20010035723 Pelrine et al. Nov 2001 A1
20020054060 Schena May 2002 A1
20020083858 MacDiarmid et al. Jul 2002 A1
20030210811 Dubowsky Nov 2003 A1
20040014860 Meier et al. Jan 2004 A1
20040046739 Gettemy Mar 2004 A1
20040124738 Pelrine et al. Jul 2004 A1
20050002113 Berge Jan 2005 A1
20050046312 Miyoshi Mar 2005 A1
20050085693 Belson et al. Apr 2005 A1
20050113892 Sproul May 2005 A1
20050140922 Bekerman et al. Jun 2005 A1
20050157893 Pelrine Jul 2005 A1
20050200984 Browne et al. Sep 2005 A1
20060057377 Harrison et al. Mar 2006 A1
20060079619 Wang et al. Apr 2006 A1
20060108416 Hirai May 2006 A1
20060122954 Podlasek et al. Jun 2006 A1
20060138371 Garnier Jun 2006 A1
20060163725 Haba et al. Jul 2006 A1
20060197741 Biggadike Sep 2006 A1
20060208610 Heim Sep 2006 A1
20060238069 Maruyama et al. Oct 2006 A1
20060258912 Belson et al. Nov 2006 A1
20070080435 Lin Apr 2007 A1
20070122132 Misawa et al. May 2007 A1
20070152982 Kim et al. Jul 2007 A1
20070170910 Chang et al. Jul 2007 A1
20070173602 Brinkman et al. Jul 2007 A1
20070189667 Wakita et al. Aug 2007 A1
20070200457 Heim et al. Aug 2007 A1
20070219285 Kropp et al. Sep 2007 A1
20070230222 Drabing et al. Oct 2007 A1
20080043318 Whitesides et al. Feb 2008 A1
20080062589 Drabing Mar 2008 A1
20080143696 Goulthorpe Jun 2008 A1
20080152921 Kropp Jun 2008 A1
20080191832 Tsai Aug 2008 A1
20080303782 Grant et al. Dec 2008 A1
20090028491 Fillion et al. Jan 2009 A1
20090104448 Thompson et al. Apr 2009 A1
20090184606 Rosenthal et al. Jul 2009 A1
20090250021 Zarrabi et al. Oct 2009 A1
20090297829 Pyles et al. Dec 2009 A1
20100006827 Buckley Jan 2010 A1
20100236843 Englund Sep 2010 A1
20100265031 Yen Oct 2010 A1
20110021917 Morita Jan 2011 A1
20110128239 Polyakov et al. Jun 2011 A1
20110155307 Pelrine et al. Jun 2011 A1
20110256383 Cochet et al. Oct 2011 A1
20120128960 Büsgen May 2012 A1
20140014715 Moran et al. Jan 2014 A1
20140176753 Hillis et al. Jun 2014 A1
20140290834 Egron et al. Oct 2014 A1
20140319971 Yoo et al. Oct 2014 A1
20140322522 Yoo Oct 2014 A1
20140352879 Yoo et al. Dec 2014 A1
20150009009 Zarrabi et al. Jan 2015 A1
20150034237 Biggs et al. Feb 2015 A1
20150043095 Lipton et al. Feb 2015 A1
20150070740 Zarrabi et al. Mar 2015 A1
20150084483 Yoo et al. Mar 2015 A1
20150096666 Yoo et al. Apr 2015 A1
20150221851 Biggs et al. Aug 2015 A1
20150221852 Biggs et al. Aug 2015 A1
20150221861 Biggs et al. Aug 2015 A1
20150231802 Quan et al. Aug 2015 A1
20150270791 Sutherland et al. Sep 2015 A1
20160025429 Muir et al. Jan 2016 A1
Foreign Referenced Citations (168)
Number Date Country
2329804 Nov 1999 CA
2330384 Nov 1999 CA
2769441 Feb 2011 CA
1447365 Oct 2003 CN
2535833 Feb 1977 DE
4408618 Sep 1995 DE
19636909 Mar 1998 DE
19952062 May 2000 DE
10058096 Jun 2002 DE
10161349 Jul 2003 DE
10335019 Feb 2005 DE
0196839 Oct 1986 EP
0295907 Dec 1988 EP
0154473 May 1992 EP
0522882 Jan 1993 EP
0833182 Apr 1998 EP
0980103 Feb 2000 EP
1050955 Nov 2000 EP
1090835 Apr 2001 EP
1323925 Jul 2004 EP
1528609 May 2005 EP
1698876 Sep 2006 EP
1843406 Oct 2007 EP
1976036 Oct 2008 EP
2119747 Nov 2009 EP
2511314 Oct 2012 EP
2208461 Jun 1974 FR
2745476 Sep 1997 FR
2338513 Dec 1999 GB
2470006 Nov 2010 GB
S 5181120 Jul 1976 JP
S 52120840 Oct 1977 JP
S 5445593 Apr 1979 JP
S 5542474 Mar 1980 JP
S 5565569 May 1980 JP
S 5661679 May 1981 JP
S 59126689 Jul 1984 JP
S 6199499 May 1986 JP
S 61239799 Oct 1986 JP
S 6397100 Apr 1988 JP
02222019 Feb 1989 JP
H 02162214 Jun 1990 JP
03173022 Jul 1991 JP
05244782 Sep 1993 JP
H 07111785 Apr 1995 JP
H 07240544 Sep 1995 JP
11134109 Oct 1997 JP
H 09275688 Oct 1997 JP
H 10137655 May 1998 JP
H 10321482 Dec 1998 JP
H 112764 Jan 1999 JP
H 11133210 May 1999 JP
2000-081504 Mar 2000 JP
2000-331874 Nov 2000 JP
2001-130774 May 2001 JP
2001-136598 May 2001 JP
2001-286162 Oct 2001 JP
2001-291906 Oct 2001 JP
2003-040041 Feb 2003 JP
3501216 Mar 2004 JP
2004-516966 Jun 2004 JP
2004-205827 Jul 2004 JP
2004-221742 Aug 2004 JP
2004-296154 Oct 2004 JP
2004-353279 Dec 2004 JP
2005-001885 Jan 2005 JP
2005-202707 Jul 2005 JP
3709723 Aug 2005 JP
2005-260236 Sep 2005 JP
2006-509052 Mar 2006 JP
2006-178434 Jul 2006 JP
200624490 Sep 2006 JP
2007-206362 Aug 2007 JP
2007-287670 Nov 2007 JP
2008-262955 Oct 2008 JP
2008-277729 Nov 2008 JP
2009-077618 Apr 2009 JP
2009-249313 Oct 2009 JP
2010-273524 Dec 2010 JP
5415442 Feb 2014 JP
2004-0097921 Dec 2004 KR
10-0607839 Aug 2006 KR
10-0650190 Nov 2006 KR
2008-0100757 Nov 2008 KR
2010-0121801 Nov 2010 KR
20110122244 Nov 2011 KR
I1269615 Dec 2006 TW
I272194 Feb 2007 TW
WO 8707218 Dec 1987 WO
WO 8902658 Mar 1989 WO
WO 9418433 Aug 1994 WO
WO 9508905 Mar 1995 WO
WO 9626364 Aug 1996 WO
WO 9715876 May 1997 WO
WO 9819208 May 1998 WO
WO 9835529 Aug 1998 WO
WO 9845677 Oct 1998 WO
WO 9917929 Apr 1999 WO
WO 9923749 May 1999 WO
WO 9937921 Jul 1999 WO
WO 0101025 Jan 2001 WO
WO 0106575 Jan 2001 WO
WO 0106579 Jan 2001 WO
WO 0158973 Aug 2001 WO
WO 0159852 Aug 2001 WO
WO 0191100 Nov 2001 WO
WO 0237660 May 2002 WO
WO 0237892 May 2002 WO
WO 02071505 Sep 2002 WO
WO 03056274 Jul 2003 WO
WO 03056287 Jul 2003 WO
WO 03081762 Oct 2003 WO
WO 03107523 Dec 2003 WO
WO 2004009363 Jan 2004 WO
WO 2004027970 Apr 2004 WO
WO 2004053782 Jun 2004 WO
WO 2004074797 Sep 2004 WO
WO 2004079832 Sep 2004 WO
WO 2004086289 Oct 2004 WO
WO 2004093763 Nov 2004 WO
WO 2005027161 Mar 2005 WO
WO 2005053002 Jun 2005 WO
WO 2005079187 Sep 2005 WO
WO 2005079353 Sep 2005 WO
WO 2005081676 Sep 2005 WO
WO 2005086249 Sep 2005 WO
WO 2006040532 Apr 2006 WO
WO 2006121818 Nov 2006 WO
WO 2006123317 Nov 2006 WO
WO 2007018877 Feb 2007 WO
WO 2007029275 Mar 2007 WO
WO 2007072411 Jun 2007 WO
WO 2008039658 Apr 2008 WO
WO 2008052559 May 2008 WO
WO 2008105861 Sep 2008 WO
WO 2008150817 Dec 2008 WO
WO 2009056497 May 2009 WO
WO 2009076477 Jun 2009 WO
WO 2009112988 Sep 2009 WO
WO 2010054014 May 2010 WO
WO 2010104953 Sep 2010 WO
WO 2010115549 Oct 2010 WO
WO 2011097020 Aug 2011 WO
WO 2011118315 Sep 2011 WO
WO 2012032437 Mar 2012 WO
WO 2012044419 Apr 2012 WO
WO 2012099854 Jul 2012 WO
WO 2012118916 Sep 2012 WO
WO 2012129357 Sep 2012 WO
WO 2012148644 Nov 2012 WO
WO 2013044195 Mar 2013 WO
WO 2013055733 Apr 2013 WO
WO 2013103470 Jul 2013 WO
WO 2013142552 Sep 2013 WO
WO 2013155377 Oct 2013 WO
WO 2013192143 Dec 2013 WO
WO 2014028819 Feb 2014 WO
WO 2014028822 Feb 2014 WO
WO 2014028825 Feb 2014 WO
WO 2014062776 Apr 2014 WO
WO 2014066576 May 2014 WO
WO 2014074554 May 2014 WO
WO 2014089388 Jun 2014 WO
WO 2014187976 Nov 2014 WO
WO 2015020698 Feb 2015 WO
WO 2015051291 Apr 2015 WO
WO 2015126928 Aug 2015 WO
WO 2015126928 Dec 2015 WO
Non-Patent Literature Citations (189)
Entry
Todorov et al, “WWWeb Application for Ferropiezoelectric Ceramic Parameters Calculation”, Proceedings 24th International Conference on Microelectronics, vol. 1, May 2004, pp. 507-510.
Prahlad, H. et al., “Programmable Surface Deformation: Thickness-Mode Electroactive Polymer Actuators and Their Applications,” Proc. SPIE, vol. 5759, 102, 2005, 12 pages.
International Search Report for PCT/US2008/068614, dated Oct. 22, 2008 (1 page).
Ajluni, Cheryl, “Pressure Sensors Strive to Stay on Top, New Silicon Micromachining Techniques and Designs Promise Higher Performance,” Electronic Design—Advanced Technology Series, Oct. 3, 1994, pp. 67-74.
Akle, Barbar J., et al., “Ionic Electroactive Hybrid Transducers,” Smart Structures and Materials 2005: Electroactive Polymer Actuators and Devices (EAPAD), Proceedings of SPIE, Bellingham, WA, vol. 5759, 2005, pp. 153-164.
Anderson, R.A., “Mechanical Stress in a Delectric Solid From a Uniform Electric Field,” The American Physical Society, 1986, pp. 1302-1307.
Aramaki, S., S. Kaneko, K. Arai, Y. Takahashi, H. Adachi, and K. Yanagisawa. 1995. “Tube Type Micro Manipulator Using Shape Memory Alloy (SMA),” Proceedings of the IEEE Sixth International Symposium on Micro Machine and Human Science, Nagoya, Japan, pp. 115-120.
Ashley, S., “Artificial Muscles”, Scientific American 2003, pp. 53-59.
Ashley, S., “Smart Skis and Other Adaptive Structures,” Mechanical Engineering, Nov. 1995, pp. 77-81.
Bar-Cohen, Yoseph, JPL, WorldWide ElectroActive Polymers, EAP (Artifical Muscles) Newsletter, vol. 1, No. 1, Jun. 1999.
Bar-Cohen, Yoseph, JPL, WorldWide ElectroActive Polymers, EAP (Artifical Muscles) Newsletter, vol. 1, No. 2, Dec. 1999.
Bar-Cohen, Yoseph, JPL, WorldWide ElectroActive Polymers, EAP (Artifical Muscles) Newsletter, vol. 2, No. 1, Jul. 2000.
Bar-Cohen, Yoseph, JPL, WorldWide ElectroActive Polymers, EAP (Artifical Muscles) Newsletter, vol. 2, No. 2, Dec. 2000.
Bar-Cohen, Yoseph, JPL, WorldWide ElectroActive Polymers, EAP (Artifical Muscles) Newsletter, vol. 3, No. 1, Jun. 2001.
Bar-Cohen, Yoseph, JPL, WorldWide ElectroActive Polymer Actuators Webhub webpages 1-7, http://ndeaa.jpl.nasa.gov/nasa-nde/lommas/eap/EAP-web.htm, downloaded Jul. 23, 2001 (7 pages).
Baughman, R., L. Shacklette, R. Elsenbaumer, E. Plichta, and C. Becht “Conducting Polymer Electromechanical Actuators,” Conjugated Polymeric Materials: Opportunities in Electronics, Optoelectronics and Molecular Electronics, eds. J.L. Bredas and R.R. Chance, Kluwer Academic Publishers, The Netherlands, pp. 559-582, 1990.
Baughman, R.H., L.W. Shacklette, R.L. Elsenbaumer, E.J. Plichta, and C. Becht “Micro electromechanical actuators based on conducting polymers,” in Molecular Electronics, Materials and Methods, P.I. Lazarev (ed.), Kluwer Academic Publishers, pp. 267-289 (1991).
Beckett, J., “New Robotics Tap the Mind, Help the Heart, SRI shows of latest technologies,” San Francisco Chronicle, Aug. 27, 1998.
Begley, M. et al., “The Electro-Mechanical Response to Highly Compliant Substrates and Thin Stiff Films with Periodic Cracks,” International Journal of Solids and Structures, 42:5259-5273, 2005.
Benslimane, M and P. Gravesen, “Mechanical Properties of Dielectric Elastomer Actuators with Smart Metallic Compliant Electrodes,” Proceedings of SPIE, International Society for Optical Engineering, vol. 4695, Jan. 1, 2002, pp. 150-157.
Bharti, V., Y. Ye, T.-B. Xu and Q.M. Zhang, “Correlation Between Large Electrostrictive Strain and Relaxor Behavior with Structural Changes Induced in P(VDF-TrFE) Copolymer by Electron Irradiation,” Mat. Res. Soc. Symp. Proc. vol. 541, pp. 653-659 (1999).
Bharti, V., Z.-Y.Cheng S. Gross, T.-B. Xu and Q.M. Zhang, “High Electrostrictive Strain Under High Mechanical Stress in Electron-Irradiated Poly(vinylidene fluoride-trifluoroethylene) Copolymer,” Applied Physics Letters, vol. 75, No. 17, pp. 2653-2655 (Oct. 25, 1999).
Bharti, V., H.S. Xu, G. Shanthi and Q.M. Zhang, “Polarization and Structural Properties of High Energy Electron Irradiated Poly(vinylidene fluoride-trifluoroethylene) Copolymer Films,” to be published in J. Appl. Phys. (2000).
Bharti, V.,X.-Z. Zhao, Q.M. Zhang, T. Romotowski, F. Tito, and R. Ting, “Ultrahigh Field Induced Strain and Polarization Response in Electron Irradiated Poly(Vinylidene Fluoride-Trifluoroethylene) Copolymer,”Mat. Res. Innovat. vol. 2, pp. 57-63 (1998).
Biomimetic Products, Inc., hhtp://www.biomimetic.com, Jun. 6, 2001.
Bobbio, S., M. Kellam, B. Dudley, S. Goodwin Johansson, S. Jones, J. Jacobson, F. Tranjan, and T. DuBois, “Integrated Force Arrays,” in Proc. IEEE Micro Electro Mechanical Systems Workshop, Fort Lauderdale, Florida, Feb. 7-10, 1993, pp. 146-154.
Bohon, K. and S. Krause, “An Electrorheological Fluid and Siloxane Gel Based Electromechanical Actuator: Working Toward an Artificial Muscle,” to be published in J. Polymer Sci., Part B. Polymer Phys. (2000).
Boyle, W. et al., “Departure from Paschen's Law of Breakdown in Gases,” The Physical Review, Second Series, 97(2): 255-259, Jan. 15, 1955.
Brock, D.L., “Review of Artifical Muscle based on Contractile Polymers,” MIT Artificial Intelligence Laboratory, A.I. Memo No. 1330, Nov. 1991.
Caldwell, D., G. Medrano-Cerda, and M. Goodwin, “Characteristics and Adaptive Control of Pneumatic Muscle Actuators for a Robotic Elbow,” Proc. IEEE Int. Conference on Robotics and Automation, San Diego, California (May 8-13, 1994).
Calvert, P. and Z. Liu, “Electrically Stimulated Bilayer Hydrogels as Muscles,” Proceedings of the SPIE International Symposium on Smart Structures and Materials: Electro-Active Plymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, California, USA, pp. 236-241.
Campolo, D., et al., “Efficient Charge Recovery Method for Driving Piezoelectric Actuators with Quasi-Square Waves,” IEEE Transaction on Ultrasonics, Ferroelectrics and Frequency Control, IEE, US, vol. 50, No. 3, Mar. 1, 2003, pp. 237-244.
Chen et al., “Active control of low-frequency sound radiation from vibrating panel using planar sound sources,” Journal of Vibration and Acoustics, vol. 124, pp. 2-9, Jan. 2002.
Chen, Zheng et al., “Quasi-Static Positioning of Ionic Polymer-Metal Composite (IPMC) Actuators,” Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Monterey, California, Jul. 24-28, 2005, pp. 60-65.
Cheng, Z.-Y., H.S. Xu, J. Su, Q. M. Zhjang, P.-C. Wang and A.G. MacDiarmid, “High Performance of All-Polymer Electrostrictive Systems,” Proceedings of the Spie Ineternational Symposium on Smart Structures and Materials: Electro-Active Polymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, California, USA, pp. 140-148.
Cheng, Z.-Y., T.-B. Xu, V. Bharti, S. Wang, and Q.M. Zhang, “Transverse Strain Responses in the Electrostrictive Poly(Vinylidene Fluoride-Trifluorethylene) Copolymer,” Appl. Phs. Lett. vol. 74, No. 13, pp. 1901-1903, Mar. 29, 1999.
Chiarelli, P., A. Della Santa, D. DeRossi, and A. Mazzoldi, “Actuation Properties of Electrochemically Driven Polypyrrole Free-Standing Films,” Journal of Intelligent Material Systems and Structures, vol. 6, pp. 32-37, Jan. 1995.
Delille, R. et al., “Novel Compliant Electrodes Based on Platinum Salt Reduction,” Smart Structures and Materials 2006: Electroactive Polymer Actuators and Devices (EAPAD), edited by Yoseph Bar-Cohen, Proceedings of SPIE, 6168 (6168Q), 2006.
De Rossi, D., and P. Chiarelli, “Biomimetic Macromolecular Actuators,” Macro-Ion Characterization, American Chemical Society Symposium Series, vol. 548, Ch. 40, pp. 517-530 (1994).
Dowling, K., Beyond Faraday-NonTraditional Actuation, available on the World Wide Web at http://www.frc.ri.cmu.edu/˜nivek/OTH/beyond-faraday/beyondfaraday.html, 9 pages, 1994.
Egawa, S. and T. Higuchi, “Multi-Layered Electrostatic Film Actuator,” Proc. IEEE Micro Electra Mechanical Systems, Napa Valley, California, pp. 166-171 (Feb. 11-14, 1990).
Elhami, K. B. Gauthier-Manuel, “Electrostriction of the Copolymer of Vinylidene-Fluoride and Trifluoroethylene,” J. Appl. Phys. vol. 77 (8), 3987-3990, Apr. 15, 1995.
Flynn, Anita M., L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, Kr.R. Udayakumar, and L.E. Cross. 1992. “Piezoelectric Micromotors for Microrobots,” IEEE Journal of Microelectromechanical Systems, vol. 1, No. 1, pp. 44-51 (Mar. 1992); also published as MIT AI Laboratory Memo 1269, Massachusetts Institute of Technology (Feb. 1991).
Ford, V. and J. Kievet, “Technical Support Package on Traveling-Wave Rotary Actuators”, NASA Tech Brief, vol. 21, No. 10, Item #145, from JPL New Technology Report NPO-19261, Oct. 1997.
Full, R.J. and K. Meijer, “Artificial Muscles Versus Natural Actuators from Frogs to Flies,” Proceedings of the 7th SPIE Symposium on Smart Structures and Materials-Electroactive Polymers and Devices (EAPAD) Conference, Mar. 6-8, 2000, Newport Beach, California, USA, pp. 2-9.
Furuhata, T., T. Hirano, and H. Fujita, “Array-Driven Ultrasonic Microactuators,” Solid State Sensors and Actuators, 1991, Digest of Tech. Papers, Transducers, pp. 1056-1059.
Furukawa, T. and N. Seo, “Electrostriction as the Origin of Piezoelectricity in Ferroelectric Polymers,” Japanese J. Applied Physics, vol. 29, No. 4, pp. 675-680 (Apr. 1990).
Gardner, J.W., “Microsensors: Principles and Applications,” John Wiley, 1994. (Book—not attached).
Ghaffarian, S.R., et al., “Electrode Structures in High Strain Actuator Technology,” Journal of Optoelectronics and Advanced Materials, Nov. 2007, 9(11), pp. 3585-3591.
Gilbertson, R.G. and J.D. Busch. “Survey of MicroActuator Technologies for Future Spacecraft Missions,” presented a the conference entitled “Practical Robotic Interstellar Flight: Are We Ready?” New York University and the United Nations, New York. (Aug. 29 and Sep. 1, 1994); also published on the World Wide Web at http://nonothinc.com/nanosci/microtech/mems/ten-actuators/gilbertson.html.
Goldberg, Lee, “Adaptive-Filtering Developments Extend Noise-Cancellation Applications,” Electronic Design, Feb. 6, 1995, pp. 34 and 36.
Greene, M. J.A. Willett, and R. Kornbluh, “Robotic Systems,” in ONR Report 32198-2, Ocean Engineering and Marine Systems 1997 Program (Dec. 1997).
Greenland, P. Allegro Microsystems Inc., and B. Carsten, Bruce Carsten Associates, “Stacked Flyback Converters Allow Lower Voltage MOSFETs for High AC Line Voltage Operation,” Feature PCIM Article, PCIM, Mar. 2000.
Hansen, G., “High Aspect Ratio Sub-Micron and Nano-Scale Metal Filaments,” SAMPE Journal, 41(2): 24-33, 2005.
Heydt, R., R. Pelrine, J. Joseph, J. Eckerle, and R. Kornbluh, “Acoustical Performance of an Electrostrictive Polymer Film Loudspeaker,” Journal of the Acoustical Society of America, vol. 107(2), pp. 833-839 (Feb. 2000).
Heydt, R., R. Kornbluh, R. Pelrine, and B. Mason, “Design and Performance of an Electrostrictive Polymer Film Acoustic Actuator,” Journal of Sound and Vibration (1998) 215(2), 297-311.
Hirano, M., K. Yanagisawa, H. Kuwano, and S. Nakano, “Microvalve with Ultra-Low Leakage,” Tenth Annual International Workshop on Micro Electromechanical Systems, Nagoya, Japan, IEEE Proceedings (Jan. 26-30, 1997), pp. 323-326.
Hirose, S., Biologically Inspired Robots: Snake-like Locomotors and Manipulators, “Development of the ACM as a Manipulator,” Oxford University Press, New York, 1993, pp. 170-172.
http://www.neurosupplies.com/pdf—files/transducers.pdf, printed from web Jul. 25, 2001.
Huang, Cheng et al., “Colossal Dielectric and Electromechanical Responses in Self-Assembled Polymeric Nanocomposites”, Applied Physics Letters 87, 182901 (2005), pp. 182901-1 through 182901-3.
Hunter, I.W. and S. Lafontaine, “A Comparison of Muscle with Artificial Actuators,” Technical Digest of the IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, Jun. 22-25, 1992, pp. 178-185.
Hunter, I., S. Lafontaine, J. Hollerbach, and P. Hunter, “Fast Reversible NiTi Fibers for Use in MicroRobotics,” Proc. 1991 IEEE Micro Electro Mechanical Systems-MEMS '91, Nara, Japan, pp. 166-170.
Jacobsen, S., R. Price, J. Wood, T. Rytting and M. Rafaelof, “A Design Overview of an Eccentric-Motion Electrostatic Microactuator (the Wobble Motor)”, Sensors and Actuators, 20 (1989) pp. 1-16.
Joseph, J., R. Pelrine, J. Eckerle, J. Bashkin, and P. Mulgaonkar, “Micro Electrochemical Composite Sensor”, SRI International, printed from web Jul. 25, 2001.
Kaneto, K., M. Kaneko, Y. Min, and A.G. MacDiarmid, “Artifical Muscle: Electromechanical Actuators Using Polyaniline Films,” Synthetic Metals 71, pp. 2211-2212, 1995.
Kawamura, S., K. Minani, and M. Esashi, “Fundamental Research of Distributed Electrostatic Micro Actuator,” Technical Digest of the 11th Sensor Symposium, pp. 27-30 (1992).
Khuri-Yakub et al., “Silicon micromachined ultrasonic transducers,” Japan Journal of Applied Physics, vol. 39 (2000), pp. 2883-2887, Par 1, No. 5B, May 2000.
Kinsler et al., Fundamentals of Acoustics, Third Edition, John Wiley and Sons, 1982.
Kondoh, Y., and T. Ono. 1991. “Bimorph Type Actuators using Lead Zinc Niobate-based Ceramics,” Japanese Journal of Applied Physics, vol. 30, No. 9B, pp. 2260-2263, Sep. 1991.
Kornbluh, R., R. Pelrine, R. Heydt, and Q. Pei, “Acoustic Actuators Based on the Field-Activated Deformation of Dielectric Elastomers,” (2000).
Kornbluh, R., G. Andeen, and J. Eckerle, “Artificial Muscle: The Next Generation of Robotic Actuators,” presented at the Fourth World Conference on Robotics Research, SME Paper M591-331, Pittsburgh, PA, Sep. 17-19, 1991.
Kornbluh, R., “Description of Children's Tour,” Aug. 20, 2000.
Kornbluh, R. D and R. E. Pelrine., “Dexterous Multiarticulated Manipulator with Electrostrictive Polymer Artificial Muscle,” ITAD-7247-QR-96-175, SRI Project No. 7247, Prepared for Office of Naval Research, Nov. 1996.
Kornbluh, R., R. Pelrine, J. Joseph, “Elastomeric Dielectric Artificial Muscle Actuators for Small Robots,” Proceedings of the Third IASTED International Conference on Robotics and Manufacturing, Jun. 14-16, 1995, Cancun, Mexico.
Kornbluh, R., R. Pelrine, Q. Pei, and V. Shastri “Electroactive Polymer (EAP) Actuators as Artificial Muscles—Reality, Potential and Challenges”, Chapter 16, Application of Dielectric EAP Actuators, SPIE Press, May 2001.
Kornbluh, R. et al., “Electroactive polymers: An emerging technology for MEMS,” (invited) in MEMS/MOEMS Components and Their Applications, eds. S. Janson, W. Siegfried, and A. Henning, Proc. SPIE, 5344:13-27, 2004.
Kornbluh, R. et al., “Electroelastomers: Applications of dielectric elastomer transducers for actuation, generation and smart structures,” Smart Structures and Materials 2002: Industrial and Commercial Applications of Smart Structures Technologies, ed., A. McGowan, Proc. SPIE, 4698:254-270, 2002.
Kornbluh, R., Pelrine, R., Eckerie, J., Joseph, J., “Electrostrictive Polymer Artificial Muscle Actuators,” IEEE International Conference on Robotic and Automation, Leuven, Belgium, 1998.
Kornbluh, R., R. Pelrine, Jose Joseph, Richard Heydt, Qibing Pei, Seiki Chiba, 1999. “High-Field Electrostriction of Elastomeric Polymer Dielectrics for Actuation”, Proceedings of the SPIE International Symposium on Smart Structures and Materials: Electro-Active Polymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, California, USA. pp. 149-161.
Kornbluh et al., “Medical Applications of New Electroactive Polymer Artificial Muscles,” SRI International, Menlo Park, CA, JSPP, v. 16, 2004.
Kornbluh, Roy D., Robotic Systems, Ocean Engineering and Marine Systems, 2000 Program, Jan. 2001, Office of Naval Research Public Release, ONR-32100-1.
Kornbluh, Roy D., Robotic Systems, Ocean Engineering and Marine Systems, 1999 Program, Feb. 2000, Office of Naval Research Public Release, ONR-32100-2.
Kornbluh, Roy D., Robotic Systems, Ocean Engineering and Marine Systems, 1997 Program, Dec. 1997, Office of Naval Research Public Release, ONR-32198-2.
Kornbluh, Roy D., Robotic Systems, Ocean Engineering and Marine Systems, 1998 Program, Feb. 1999, Office of Naval Research Public Release, ONR-32199-4.
Kornbluh, R., “Presentation to Colin Corporation”, Jan. 1997.
Kornbluh, R. Presentation to Medtronic, “Elastomeric Polymer Actuator and Transducers: The Principles, Performance and Applications of a New High-Strain Smart Material Technology”, SRI International Medtronic Forum, Brooklyn Center, Minnesota, Jan. 2000.Jan. 2000.
Kornbluh, R. et al., “Shape control of large lightweight mirrors with dielectric elastomer actuation,” Actuation Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices, ed. Y. Bar-Cohen, Proc. SPIE, 5051, 2003.
Kornbluh, R., Pelrine, R. Joseph, J., Pei, Q. and Chiba., “Ultra-High Strain Response of Elastomeric Polymer Dielectrics”, Proc. Materials Res. Soc., Fall meeting, Boston, MA, pp. 1-12, Dec. 1999.
Kornbluh, R., R. Pelrine, Q. Pei, S. Oh, and J. Joseph, 2000. “Ultrahigh Strain Response of Field-Actuated Elastomeric Polymers,” Proceedings of the 7th SPIE Symposium on Smart Structures and Materials-Electroactive Polymers and Devices (EAPAD) Conference, Mar. 6-8, 2000, Newport Beach, California, USA, pp. 51-64.
Kornbluh, R., “Use of Artificial Muscle Butterfly for Chronicle Newpaper Photograph,” Aug. 1998.
Ktech's PVDF Sensors, http://www.ktech.com/pvdf.htm, Jun. 6, 2001, pp. 1-5.
Kymissis et al., “Parasitic Power Harvesting in Shoes,” XP-010312825—Abstract, Physics and Media Group, MIT Media Laboratory E15-410, Cambridge, MA, Oct. 19, 1998, pp. 132-139.
Lacour, S. et al., “Mechanisms of Reversible Stretchability of Thin Metal Films on Elastomeric Substrates, ” Applied Physics Letters 88, 204103, 2006.
Lacour, S. et al., “Stretchable Interconnects for Elastic Electronic Surfaces,” Proceedings of the IEEE on Flexible Electronics Technology, 93(8): 1459-1467, 2005.
Lakes, R.S., “Extreme damping in compliant composites with a negative stiffness phase” or “Extreme Damping in Composite Materials with Negative Stiffness Inclusions”, Nature, 410, 565-567, Mar. (2001).
Lakes, R.S., “Extreme damping in compliant composites with a negative stiffness phase”, Philosophical Magazine Letters, 81, 95-100 (2001).
Lakes, R.S., “Extreme damping in compliant composites with a negative stiffness phase” or “Extreme Damping in Composite Materials with a Negative Stiffness Phase”, Physical Review Letters, 86, 2897-2900, Mar. 26 (2001).
Lang, J, M. Schlect, and R. Howe, “Electric Micromotors: Electromechanical Characteristics,” Proc. IEEE Micro Robots and Teleoperators Workshop, Hyannis, Massachusetts (Nov. 9-11, 1987).
Lawless, W. and R. Arenz, “Miniature Solid-state Gas Compressor,” Rev. Sci Instrum., 58(8), pp. 1487-1493, Aug. 1987.
Liu, C., Y. Bar-Cohen, and S. Leary, “Electro-statically stricted polymers (ESSP),” Proceedings of the Spie International Symposium on Smart Structures and Materials: Electro-Active Polymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, California, USA., pp. 186-190.
Liu, C. & Y. Bar-Cohen, “Scaling Laws of Microactuators and Potential Aplications of Elecroactive Polymers in MEMS”, SPIE, Conference on Electroactive Polymer Actuators and Devices, Newport Beach, CA Mar. 1999.
Liu, Y., T. Zeng, Y.X. Wang, H. Yu, and R. Claus, “Self-Assembled Flexible Electrodes on Electroactive Polymer Actuators,” Proceedings of the SPIE International Symposium on Smart Structures and Materials: Electro-Active Polymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, California, USA., pp. 284-288.
Madden et al., “Conducting polymer actuators as engineering materials,” SPIE: Smart Materials and Structures, ed. Yoseph Bar-Cohen, Bellingham, WA, pp. 176-190, Pub 2002.
Madden, J.D. et al., “Fast contracting polypyrrole actuators”, Jan. 6, 2000, Elsevier Science S.A., pp. 185-192.
Martin, J. and R. Anderson, 1999. “Electrostriction in Field-Structured Composites: Basis for a Fast Artificial Muscle?”, The Journal of Chemical Physics, vol. 111, No. 9, pp. 4273-4280, Sep. 1, 1999.
Measurements Specialties, Inc.-Piezo Home, http://www.msiusa.com/piezo/index.htm, Jun. 6, 2001.
Möller, S. et al., A Polymer/semiconductor write-once read-many-times memory, Nature, vol. 26, Nov. 13, 2003, pp. 166-169, Nature Publishing Group.
Nguyen, T.B., C.K. DeBolt, S.V. Shastri and A. Mann, “Advanced Robotic Search,” in ONR Ocean, Atmosphere, and Space Fiscal Year 1999 Annual Reports (Dec. 1999).
Nguyen, T., J. A. Willett and Kornbluh, R., “Robotic systems,” in ONR Ocean, Atmosphere, and Space Fiscal Year 1998 Annual Reports (Dec. 1998).
Nguyen, T., Green, M., and Kornbluh, R., “Robotic Systems,” in ONR Ocean, Atmosphere, and Space Fiscal Year 1999 Annual Reports (Dec. 1999).
Nguyen, T., Green, M., and Kornbluh, R., “Robotic Systems,” in ONR Ocean, Atmosphere, and Space Fiscal Year 2000 Annual Reports (Jan. 2001). (Cited in U.S. Pat. No. 7,211,937 however, unable to locate).
Nihon Kohden Corporation, Operators Manual, available Oct. 1, 2001.
NXT plc, Huntingdon, UK (www.nxtsound.com) Sep. 17, 2008.
Ohara, K., M. Hennecke, and J. Fuhrmann, “Electrostriction of polymethylmethacrylates,” Colloid & Polymer Sci. vol. 280, 164-168 (1982).
Olsson, A., G. Stemme, and E. Stemme, “The First Valve-less Diffuser Gas Pump,” Tenth Annual International Workshop on Micro Electromechanical Systems, Nagoya, Japan, IEEE Proceedings (Jan. 26-30, 1997), pp. 108-113.
Olsson, A., O. Larsson, J. Holm, L. Lundbladh, O. Ohinan, and G. Stemme. 1997. “Valve-less Diffuser Micropumps Fabricated using Thermoplastic Replication,” Proc. IEEE Micro Electro Mechanical Systems, Nagoya, Japan, pp. 305-310 (Jan. 26-30, 1997).
Osterbacka, R. et al., “Two-Dimensional Electronic Excitations in Self-Assembled Conjugated Polymer Nanocrystals,” Science, vol. 287:839-842, Feb. 4, 2000.
Otero, T.F., J. Rodriguez, E. Angulo and C. Santamaria, “Artificial Muscles from Bilayer Structures,” Synthetic Metals, vol. 55-57, pp. 3713-3717 (1993).
Otero, T.F., J. Rodriguez, and C. Santamaria, “Smart Muscle Under Electrochemical Control of Molecular Movement in Polypyrrole Films,” Materials Research Society Symposium Proceedings, vol. 330, pp. 333-338, 1994.
Park, S.E., and T. Shrout., “Ultrahigh Strain and Piezoelectric Behavior in Relaxor Based Ferroelectric Single Crystals,” J. Appl. Phys., vol. 82, No. 4, pp. 1804-1811, Aug. 15, 1997.
Pei, Q., O. Inganäs, and I. Lundström, “Bending Bilayer Strips Built From Polyaniline for Artificial Electrochemical Muscles,” Smart Materials and Structures, vol. 2, pp. 1-6., Jan. 22, 1993.
Pei, Qibing “Description of Conference Demonstration” Mar. 2001.
Pei et al., “Electrochemical Applications of the Bending Beam Method. 1. Mass Transport and Volume Changes in Polypyrrole During Redox,” J. Phys. Chem., 1992, 96, pp. 10507-10514.
Pei, Q. et al., “Multifunctional Electroelastomer Roll Actuators and Their Application for Biomimetic Walking Robots,” Smart Structures and Materials 2003. Electroactive Polymer Actuators and Devices, San Diego, CA, USA, Mar. 2003, vol. 5051, 2003, pp. 281-290, XP002291729, Proceedings of the SPIE, ISSN: 0277-786X, the whole document.
Pei, Q. et al., “Multifunctional Electroelastomer Rolls,” Mat. Res. Soc. Symp. Proc., vol. 698, Nov. 26-30, 2001, Boston, MA, pp. 165-170.
Pei, Q., Pelrine, R., Kornbluh, R., Jonasdottir, S., Shastri, V., Full, R., “Multifunctional Electroelastomers: Electroactive Polymers Combining Structural, Actuating, and Sensing Functions,” ITAD-433-PA-00-123, University of California at Berkeley, Berkeley, CA, available at www.sri.com-publications, Jan. 17, 2001.
Pei, Q. et al., “Recent Progress on Electroelastomer Artificial Muscles and Their Application for Biomimetic Robots”, SPIE, Pub. Jun. 2004, 11 pages.
Pelrine, R. et al., “Applications of dielectric elastomer actuators,” (invited paper) in Smart Structures and Materials 2001: Electroactive Polymer Actuators and Devices, ed., Y. Bar Cohen, Proc. SPIE, 4329:335-349, 2001.
Pelrine, R. and Kornbluh, R., and. 1995. “Dexterous Multiarticulated Manipulator with Electrostrictive Polymer Artificial Muscle Actuator,” EMU 95-023, SRI International, Menlo Park, California, Apr. 28, 1995.
Pelrine, R., R. Kornbluh, and J. Joseph, “Electrostriction of Polymer Dielectrics with Compliant Electrodes as a Means of Actuation,” Sensors and Actuators A: Physical, vol. 64, No. 1, 1998, pp. 77-85.
Pelrine, R., R. Kornbluh, J. Joseph and S. Chiba, “Electrostriction of Polymer Films for Microactuators,” Proc. IEEE Tenth Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, Jan. 26-30, 1997, pp. 238-243.
Pelrine et al., “Electrostrictive Polymer Artificial Muscle Actuators,” May 1998, Proc. of the 1998 IEEE Conf. on Robotics & Automation, pp. 2147-2154.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1992 Final Report on Artifical Muscle for Small Robots, ITAD-3393-FR-93-063, SRI International, Menlo Park, California, Mar. 1993.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1993 Final Report on Artifical Muscle for Small Robots, ITAD-4570-FR-94-076, SRI International, Menlo Park, California, 1994.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1994 Final Report on Artifical Muscle for Small Robots, ITAD-5782-FR-95-050, SRI International, Menlo Park, California, 1995.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1995 Final Report on Artifical Muscle for Small Robots, ITAD-7071-FR-96-047, SRI International, Menlo Park, California, 1996.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1996 Final Report on Artifical Muscle for Small Robots, ITAD-7228-FR-97-058, SRI International, Menlo Park, California, 1997.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1997 Final Report on Artifical Muscle for Small Robots, ITAD-1612-FR-98-041, SRI International, Menlo Park, California, 1998.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1998 Final Report on Artifical Muscle for Small Robots, ITAD-3482-FR-99-36, SRI International, Menlo Park, California, 1999.
Pelrine, R., R. Kornbluh, and J. Joseph, FY 1999 Final Report on Artifical Muscle for Small Robots, ITAD-10162-FR-00-27, SRI International, Menlo Park, California, 2000.
Pelrine, R., R. Kornbluh, Q. Pei, and J. Joseph, “High Speed Electrically Actuated Elastomers with Over 100% Strain,” Science, vol. 287, No. 5454, pp. 1-21, 2000.
Pelrine, R., R. Kornbluh, Q. Pei, and J. Joseph. “High Speed Electrically Actuated Elastomers with Strain Greater Than 100%”, Science, Reprint Series, Feb. 4, 2000, vol. 287, pp. 836-839.
Pelrine, R., R. Kornbluh, and G. Kofod, “High Strain Actuator Materials Based on Dielectric Elastomers,” submitted to Advanced Materials (May 2000).
Pelrine, R., Roy Kornbluh, Jose Joseph, Qibing Pei, Seiki Chiba “Recent Progress in Artificial Muscle Micro Actuators,” SRI Interational, Tokyo, 1999 MITI/NEEDOIMNIC, 1999.
Pelrine, R., R. Kornbluh, J. Joseph and S. Chiba, “Review of Artificial Muscle Approaches,” invited paper, in Proc. Third International Symposium on Micro Machine and Human Science, Nagoya, Japan, Oct. 14-16, 1992.
Piezoflex(TM) PVDF Polymer Sensors, http://www.airmar.com/piezo/pvdf.htm. Jun. 6, 2001.
PowerLab ADInstruments, MLT001 High-Sensitivity Force Transducers, AD Instruments Transducers Series, printed from web Jul. 25, 2001.
Puers et al, “A Capacitive Pressure Sensor with Low Impedance Output and Active Suppression of Parasitic Effects,” Sensors and Actuators, A21-A23 (1990) 108-114.
Puers, Robert, “Capacitive sensors: when and how to use them,” Sensors and Actuators A, 37-38 (1993) 93-105.
Reed, C. et al., “The Fundamentals of Aging HV Polymer-Film Capacitors, ” IEEE Transactions on Dielectrics and Electrical Insulation, 1(5): 904-922, 1994.
Sakarya, S., “Micromachining Techniques for Fabrication of Integrated Light Modulting Devices”, Netherlands 2003, pp. 1-133.
Scheinbeim, J., B. Newman, Z. MA, and J. Lee, “Electrostrictive Response of Elastomeric Polymers,” ACS Polymer Preprints, 33(2), pp. 385-386, 1992.
Schlaberg, H. I., and J. S. Duffy, “Piezoelectric Polymer Composite Arrays for Ultrasonic Medical Imaging Applications,” Sensors and Actuators, A 44, pp. 111-117, Feb. 22, 1994.
Seoul et al., “Electrospinning of Poly(vinylidene fluoride) Dimethylformamide Solutions with Carbon Nanotubes,” Department of Textile Engineering, Inha University, Mar. 31, 2003.
Shahinpoor, M., “Micro-electro-mechanics of Ionic Polymer Gels as Electrically Controllable Artificial Muscles,” J. Intelligent Material Systems and Structures, vol. 6, pp. 307-314, May 1995.
Shkel, Y. and D. Klingenberg, “Material Parameters for Electrostriction,” J. Applied Physics, vol. 80(8), pp. 4566-4572, Oct. 15, 1996.
Smela, E., O. Inganas, and I. Lundstrom, “Controlled Folding of Micrometer-size Structures,” Science, vol. 268, pp. 1735-1738 (Jun. 23, 1995).
Smela, E., O. Inganas, Q. Pei and I. Lundstrom, “Electrochemical Muscles: Micromachinging Fingers and Corkscrews,” Advanced Materials, vol. 5, No. 9, pp. 630-632, Sep. 1993.
Smith, S. et al., A low switching voltage organic-on-inorganic heterojunction memory element utilizing a conductive polymer fuse on a doped silicon substrate, Applied Physics Letters, vol. 84, No. 24, May 28, 2004, pp. 5019-5021.
Sokolova, M. et al., “Influence of a Bias Voltage on the Characteristics of Surface Discharges in Dry Air,” Plasma Processes and Polymers, 2: 162-169, 2005.
Sommer-Larsen, P. and A. Ladegaard Larsen, “Materials for Dielectric Elastomer Actuators,” SPIE, vol. 5385, Mar. 1, 2004, pp. 68-77.
Standard Test Methods for Rubber Deterioration—Cracking in an Ozone Controlled Environment, ASTM International, D 1149-07.
Su, J., Q.M. Zhang, C.H. Kim, R.Y. Ting and R. Capps, “Effects of Transitional Phenomena on the Electric Field induced Strain-electrostrictive Response of a Segmented Polyurethane elastomer,” pp. 1363-1370, Jan. 20, 1997.
Su, J, Z. Ounaies, J.S. Harrison, Y. Bara-Cohen and S. Leary, “Electromechanically Active Polymer Blends for Actuation,” Proceedings of 7th SPIE Symposium on Smart Structures and Materials-Electroactive Polymers and Devices (EAPAD) Conference, Mar. 6-8, 2000, Newport Beach, CA, USA, pp. 65-72.
Suzuki et al., “Sound radiation from convex and concave domes in infinite baffle,” Journal of the Acoustical Society of America, vol. 69(2), Jan. 1981.
Technology, http://www.micromuscle.com/html/technology.html, Jun. 6, 2001.
“The Rubbery Ruler”, http://www.ph.unimelb.edu.au, printed from web Jul. 25, 2001.
Tobushi, H., S. Hayashi, and S. Kojima, “Mechanical Properties of Shape Memory Polymer of Polyurethane Series,” in JSME International Journal, Series I, vol. 35, No. 3, 1992.
Treloar, L.R.G., “Mechanics of Rubber Elasticity,” J Polymer Science, Polymer Symposium, No. 48, pp. 107-123, 1974.
Uchino, K. 1986. “Electrostrictive Actuators: Materials and Applicaions,” Ceramic Bulletin, 65(4), pp. 647-652, 1986.
Unger et al. (2000), “Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography,” Science 288:113-116, no month.
Wade, Jr., W.L., R.J. Mannone and M. Binder, “Increased Dielectric Breakdown Strengths of Melt-Extruded Polyporphlene Films,” Polymer vol. 34, No. 5, pp. 1093-1094 (1993).
Wax, S.G. and R.R. Sands, “Electroactive Polymer Actuators and Devices,” Proceedings of the SPIE International Symposium on Smart Structures and Materials: Electro-Active Polymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, CA, USA, pp. 2-10.
Whitesides et al. (2001), “Flexible Methods for Microfluidics,” Physics Today 52(6):42-47, no month.
Winters, J., “Muscle as an Actuator for Intelligent Robots,” Robotics Research: Trans. Robotics International of SME, Scottsdale, AZ (Aug. 18-21, 1986).
Woodard, Improvements of ModalMax High-Fidelity Peizoelectric Audio Device (LAR-16321-1), NASA Tech Briefs, May 2005, p. 36.
Xia, Younan et al., “Triangular Nanoplates of Silver: Synthesis, Characterization, and Use as Sacrificial Templates for Generating Triangular Nanorings of Gold,” Adv. Mater., 2003, 15, No. 9, pp. 695-699.
Yam, P., “Plastics Get Wired,” Scientific American, vol. 273, pp. 82-87, Jul. 1995.
Yoshio, O., “Ablation Characteristics of Silicone Insulation,” Journal of Polymer Science: Part A: Polymer Chemistry, 36: 233-239, 1998.
Yuan, W. et al. “New Electrode Materials for Dielectric Elastomer Actuators, ” Proc. SPIE, 6524 (6524ON), 2007.
Zhang, Q.M., V. Bharti, Z.Y. Cheng, T.B. Xu, S. Wang, T.S. Ramotowski, F. Tito, and R. Ting, “Electromechanical Behavior of Electroactive P(VDF-TrFE) Copolymers,” Proceedings of the SPIE International Symposium on Smart Structures and Materials: Electro-Active Polymer Actuators and Devices, Mar. 1-2, 1999, Newport Beach, CA, USA, pp. 134-139.
Zhang, Q., V. Bharti and X. Zhao, “Giant Electrostriction and Relaxor Ferroelectric Behavior in Electron-irradiated Poly(vinylidene fluoride-trifluoroethylene) Copolymer,” Science, vol. 280, pp. 2101-2104 (Jun. 26, 1998).
Zhang, Q.M., Z.Y. Cheng, V. Bharti, T.B. Xu, H. Xu, T. Mai and S.J. Gross, “Piezoelectric and Electrostrictive Polymeric Actuator Materials,” Proceedings of the 7th SPIE Symposium on Smart Structures and Materials: Electroactive Polymers and Devices (EAPAD) Conference, Mar. 6-8, 2000, Newport Beach, CA, USA, pp. 34-50.
Zhenyi, M., J.I. Scheinbeim, J.W. Lee, and B.A. Newman. 1994. “High Field Electrostrictive Response of Polymers,” Journal of Polymer Sciences, Part B-Polymer Physics, vol. 32, pp. 2721-2731, 1994.
U.S. Appl. No. 14/437,741, filed Apr. 22, 2015.
U.S. Appl. No. 14/771,371, filed Aug. 28, 2015.
U.S. Appl. No. 14/649,743, filed Jun. 4, 2015.
Polyoxymethylene urea NPL document, retrieved Nov. 11, 2015.
U.S. Appl. No.14/892,762, filed Nov. 20, 2015.
Related Publications (1)
Number Date Country
20110285247 A1 Nov 2011 US
Provisional Applications (1)
Number Date Country
60937787 Jun 2007 US
Divisions (2)
Number Date Country
Parent 13069908 Mar 2011 US
Child 13205888 US
Parent 12766771 Apr 2010 US
Child 13069908 US
Continuations (1)
Number Date Country
Parent 12163554 Jun 2008 US
Child 12766771 US