Claims
- 1. A method of manufacturing iron garnet layers having refractive indices n adjusted in a defined manner and lattice constants a.sub.o adjusted in a defined manner, in which the layers are deposited on a substrate by means of rf cathode sputtering using a target containing substantially an iron garnet phase besides residual phases of substantially the same sputtering rates in a noble gas plasma of an ion energy of the ions bombarding the growing layer smaller than 10.sup.2 ev and an overall pressure in the range of 0.1 to 2.0 Pa, characterized in that the noble gas is doped with from 0.2 to 5% by volume of at least one reactive gas selected from the group consisting of hydrogen and oxygen.
- 2. A method as claimed in claim 1, characterized in that the noble gas is doped with from 0.2% to 2% by volume of at least one reactive gas.
- 3. A method as claimed in claim 1; characterized in that at least one of the gases argon, krypton or xenon is used as a noble gas.
- 4. A method as claimed in claim 1, characterized in that oxygen is used as a reactive gas.
- 5. A method as claimed in claim 1 characterized in that hydrogen is used as a reactive gas.
- 6. A method as claimed in claim 1 characterized in that the overall pressure is adjusted at a value in the range from 0.3 to 1.0 Pa.
- 7. A method as claimed in claim 1 characterized in that the iron garnet layer has a composition according to the general formula (A, B).sub.3 (A, B).sub.5 O.sub.12 with
- A=at least a rare earth metal, Bi, Pb and/or Ca and
- B=Ga, Al, Fe, Co, Ni, Mn, Ru, Ir, In and/or Sc.
- 8. A method as claimed in claim 1 characterized in that a (111)-oriented non-magnetic garnet monocrystalline disc is used as a substrate.
- 9. A method as claimed in claim 1 characterized in that a (110)-oriented non-magnetic garnet monocrystalline disc is used as a substrate.
- 10. A method as claimed in claim 9, characterized in that calcium-magnesium-zirconium-substituted gadolinium-gallium garnet (Gd, Ca).sub.3 (Ga, Mg, Zr).sub.5 O.sub.12 is used as a substrate.
- 11. A method as claimed in claim 1 characterized in that the iron garnet layer(s) is (are) deposited as single crystals.
- 12. A method as claimed in claim 11, characterized in that the resultant iron garnet layers are deposited as a succession of layers of individual monocrystalline layers of different refractive indices n and different lattice constants a.sub.o.
- 13. A method as claimed in claim 11 characterized in that during the layer deposition process the substrate is heated at a temperature above 470.degree. C.
- 14. A method as claimed in claim 1 characterized in that the iron garnet layer(s) is (are) deposited in a non-crystalline manner.
- 15. A method as claimed in claim 14, characterized in that the resultant iron garnet layer is deposited as a succession of layers of individual non-crystalline layers of different refractive indices n.
- 16. A method as claimed in claim 14 characterized in that the substrate is heated at a temperature below 460.degree. C.
- 17. A method as claimed in claim 1 characterized in that a magnetron in which the rf power required for the sputtering process is fed is used as a target electrode.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3825788 |
Jul 1988 |
DEX |
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Parent Case Info
This is a continuation of application Ser. No. 07/626,323, filed Dec. 13, 1990, which is a continuation of application Ser. No. 379,507, filed Jul. 13, 1989, both abandoned.
US Referenced Citations (5)
Number |
Name |
Date |
Kind |
3607698 |
Kay |
Sep 1971 |
|
3949387 |
Chaudhari et al. |
Apr 1976 |
|
4444635 |
Kobayashi et al. |
Apr 1984 |
|
4778580 |
Doormann et al. |
Oct 1988 |
|
4849080 |
Doormann et al. |
Jul 1989 |
|
Non-Patent Literature Citations (1)
Entry |
J. Schneider et al., "O.sub.2 Contaminated . . . Films", J. Appl. Phys. 49(3), 3/1978, pp. 1747-1749. |
Continuations (2)
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Number |
Date |
Country |
Parent |
626323 |
Dec 1990 |
|
Parent |
379507 |
Jul 1989 |
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