Number | Date | Country | Kind |
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87120059 | Dec 1998 | TW |
Number | Name | Date | Kind |
---|---|---|---|
5677867 | Hazani | Oct 1997 | |
6083778 | Gardner et al. | Jul 2000 |
Entry |
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“Conventional and Rapid Thermal Processes” McGraw-Hill International Editions (ULSI Technology)/C.Y. Chang and S.M. Sze/p. 169-170. 1996. |