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4422885 | Brower et al. | Dec 1983 | |
4574467 | Halfacre et al. | Mar 1986 | |
4717683 | Parrillo et al. | Jan 1988 | |
5348910 | Namose | Sep 1994 | |
5358890 | Sivan et al. | Oct 1994 |
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0089463 | Apr 1989 | JPX |
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F. S. Lai et al., A Highly Latchup-Immune 1 .mu.m CMOS Technology Fabricated with 1 MeV Ion Implantation and Self-Aligned TiSi.sub.2 ; IEEE; IEDM 85; pp. 513-516, May 1985. |