Number | Date | Country | Kind |
---|---|---|---|
3-008464 | Jan 1991 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4826785 | McClure et al. | May 1989 | |
4968643 | Mukai | Nov 1990 | |
4970176 | Tracy et al. | Nov 1990 | |
5032233 | Yu et al. | Jul 1991 | |
5110759 | Mukai | May 1992 |
Number | Date | Country |
---|---|---|
0194950 | Sep 1986 | EPX |
0351001 | Jan 1990 | EPX |
0353120 | Jan 1990 | EPX |
0388563 | Sep 1990 | EPX |
59-33850 | Feb 1984 | JPX |
59-61146 | Apr 1984 | JPX |
63-37634 | Feb 1988 | JPX |
1-287949 | Nov 1989 | JPX |
Entry |
---|
Patent Abstracts of Japan, vol. 12, No. 265 (E-637) 23 Jul. 1988 & JP-A-63 048841 dated Mar. 1, 1988. |
W. Spiess et al., "Via hole filling with gold melting by KrF excimer laser irradiation," Journal of Vacuum Science and Technology: Part B, vol. 7, No. 1 Feb. 1989, New York, N.Y., pp. 127-128. |