Number | Date | Country | Kind |
---|---|---|---|
7-337877 | Dec 1995 | JPX | |
8-043603 | Feb 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4566935 | Hornbeck | Jan 1986 | |
4710732 | Hornbeck | Dec 1987 | |
5083857 | Hornbeck | Jan 1992 | |
5784190 | Worley | Jul 1998 | |
5835256 | Huibers | Nov 1998 |
Number | Date | Country |
---|---|---|
4-230722 | Aug 1992 | JPX |
5-188308 | Jul 1993 | JPX |
5-196880 | Aug 1993 | JPX |
Entry |
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"Nikkei Microdevices", Mar. 1994; News Probe, Conference Preview; pp. 90-93. |
Proceedings of the IEEE, vol. 70, No. 5, May 1982; "Silicon as a Mechanical Material"; pp. 420-457. |