Claims
- 1. A projector comprising:a light source that emits light; at least one modulation device that modulates the light emitted from said light source, said modulation device comprising: a plurality of micromirrors for reflecting the light; a plurality of pillars for supporting said plurality of micromirrors; and a plurality of electrodes for driving said plurality of micromirrors by means of a coulomb force; a circuit substrate comprising a plurality of pairs of said electrodes, each pair positioned opposite a respective one of said plurality of micromirrors, and a circuit element for energizing said plurality of pairs of electrodes; and a projection lens that projects the light modulated by said modulation device.
- 2. The projector of claim 1, further comprising a color filter arranged between said light source and said modulation device.
- 3. The projector of claim 2, wherein said color filter is rotary color filter.
- 4. The projector of claim 1, further comprising a separating prism for separating the light into at least two wavelength regions.
- 5. The projector of claim 1, further comprising a torsion bar coupling said micromirrors, and wherein said pillars and said torsion bar are bonded.
Priority Claims (2)
Number |
Date |
Country |
Kind |
7-337877 |
Dec 1995 |
JP |
|
8-43603 |
Feb 1996 |
JP |
|
CONTINUING APPLICATION DATA
This application is a continuation of U.S. patent application Ser. No. 09/398,263, filed Sep. 17, 1999 U.S. Pat. No. 6,107,115, which is a divisional of U.S. patent application Ser. No. 08/756,463, filed Nov. 26, 1996, issued as U.S. Pat. No. 5,999,306, the contents of which applications are incorporated herein in their entirety by reference.
US Referenced Citations (9)
Foreign Referenced Citations (3)
Number |
Date |
Country |
4-230722 |
Aug 1992 |
JP |
5-188308 |
Jul 1993 |
JP |
5-196880 |
Aug 1993 |
JP |
Non-Patent Literature Citations (2)
Entry |
“Nikkei Microdevices”, Mar. 1994; News Probe, Conference Preview; pp. 90-93, (Not in english). |
Proceedings of the IEEE, vol. 70, No. 5, May 1982; “Silicon as a Mechanical Material”; pp. 420-457. |
Continuations (1)
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Number |
Date |
Country |
Parent |
09/398263 |
Sep 1999 |
US |
Child |
09/585880 |
|
US |