Patent Application
20080073819
Referring to
1. wet milling: mixing and grinding indium-tin oxide (ITO) powders, a sintering aid agent, a binder agent, and additive agent by wet milling method;
2. granulation: drying the mixed and grinded mixtures to form granulated ITO powers;
3. shaping: granulated ITO powders into rough-shaped green bodies by using dry pressing;
4. Strengthening: strengthening the rough-shaped green bodies by cold isostatic pressing machine;
5. dewaxing: putting rough-shaped green bodies into a high-temperature furnace to remove the additive agent so as to obtain dewaxed green bodies; and
6. sintering: putting the dewaxed green bodies into an controlled atmosphere furnace and sintering the dewaxed green bodies at a gas pressure ranged from 1.1 atm to 1.9 atm by injecting an adoptable gas into the atmosphere furnace.
During practical manufacture process, the ITO powders are first put into wet mill or desolver. Then, water and 0.001 weight percent to 1 weight percent sintering aid agent are added into the wet mill or desolver, wherein the sintering aid agent is a mixture of K2O, Al2O3, and SiO2. Thereafter, a wet milling method is performed for mixing and grinding the mixtures until their particle dimensions are smaller than 0.2 μm. Then, a binder agent is added into the mixture and the mixing process is continued until the binder is properly dispersed. The foregoing mixture is dried to provide granulated ITO powders with a tapped density ranged from 1.2 to 1.7 g/cm2. The ITO powders shaped by dry pressing at the forming pressure between 100 kg/cm2 and 1000 kg/cm2. The shaped ITO green bodies strengthened by cold isostatic pressing at a pressure between 200 Mpa and 300 Mpa. The strengthened ITO green bodies are put into a high-temperature furnace and the temperature is raised by 0.1 to 0.5° C. to maintain the temperature between 250° C. to 800° C. for removing the additive agent so as to obtain non-sintered dewaxed green bodies. Finally, the dewaxed green bodies are put into a controlled atmosphere furnace, which is vacuumed first and then filled with gas before use. In this preferred embodiment, the oxygen gas is adopted for exemplification. In the sintering step, the pressure of the oxygen gas is ranged from 1.1 to 1.9 atm, and the temperature is raised by 0.5 to 5° C. to maintain the temperature between 1400° C. to 1600° C. for producing sputtering targets with an ITO density over 7.08 g/cm2.
In the sintering step, the pressure of the gas (oxygen gas) inside the atmosphere furnace is different from the conventional normal pressure (1 atm) so the required sintering time can be reduced effectively and the extent of decomposition can be minimized. Therefore, the weight lost of the materials can be reduced and the density of the sputtering target can be thus increased.
In summary, the present invention improves the conventional normal-pressure sintering step, which takes longer time and loses more materials, by disclosing a method of manufacturing the sputtering target so as to decrease the sintering time and the weight loss of the materials. Accordingly, the present invention satisfies patentability and is therefore submitted for a patent application.
While the preferred embodiment of the invention has been set forth for the purpose of disclosure, modifications of the disclosed embodiment of the invention as well as other embodiments thereof may occur to those skilled in the art. Accordingly, the appended claims are intended to cover all embodiments, which do not depart from the spirit and scope of the invention.
