Number | Date | Country | Kind |
---|---|---|---|
7-223468 | Aug 1995 | JPX | |
8-147238 | Jun 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5238858 | Matsushita | Aug 1993 | |
5244820 | Kamata | Sep 1993 | |
5348897 | Yen | Sep 1994 |
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Bruhl et al, "Generation of Residual Deformations by Pulsed Ion Implantation", J. Phys. D: Appl Phys., vol. 28 (1995), pp. 1655-1660 (No month). |
Mishima et al, Implantation Temperature Effect on Polycrystalline Silicon by Ion Shower Doping, J. Appl Phys., vol. 74 No. 12, Dec. 15, 1993, pp. 7114-7117. |