METHODS AND APPARATUS FOR OPENING AND CLOSING SUBSTRATE CARRIERS

Abstract

The invention provides methods, systems and apparatus for opening a substrate carrier. The invention provides a novel loadport for receiving a substrate carrier from a substrate carrier transport system. The loadport includes a door opening mechanism adapted use vacuum pressure to hold a substrate carrier door against the door opening mechanism. The loadport is further adapted to apply a gas flow to the periphery of the substrate carrier to block potential contaminants from entering the substrate carrier. Numerous other features are provided.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an exemplary embodiment of a substrate carrier having an overhead transfer flange and that is adapted to transport a single substrate;

FIGS. 2A-L illustrate a first exemplary embodiment of a door opening mechanism for opening the door of a substrate carrier;

FIGS. 3A-L illustrate a second exemplary embodiment of a door opening mechanism for opening the door of a substrate carrier;

FIGS. 4A-B illustrate a third exemplary embodiment of a door opening mechanism for opening the door of a substrate carrier;

FIGS. 5A-E illustrate a fourth exemplary embodiment of a door opening mechanism for opening the door of a substrate carrier;

FIGS. 6A-G illustrate various components of an exemplary substrate carrier;

FIGS. 7A-E illustrate an apparatus for storing a plurality of substrate carriers in accordance with an embodiment of the present invention;

FIGS. 8A-C illustrate an exemplary door for sealing a substrate carrier in accordance with an embodiment of the present invention;

FIGS. 9A-B illustrate isometric views of a front of a door opening mechanism in accordance with an embodiment of the present invention;

FIGS. 10A-B illustrate isometric views of a rear of the door opening mechanism in accordance with an embodiment of the present invention;

FIG. 11 is a cross-sectional side view of the door opening mechanism in accordance with an embodiment of the present invention; and

FIG. 12 is a cross-sectional side view of the door opening mechanism coupled to the door for sealing a substrate carrier in accordance with an embodiment of the present invention.

Claims

1. A system for opening a substrate carrier comprising: a substrate carrier adapted to hold one or more substrates; anda loadport for receiving a substrate carrier from a substrate carrier transport system, wherein the loadport includes a door opening mechanism, the door opening mechanism adapted use vacuum pressure to hold a substrate carrier door against the door opening mechanism.

2. The system of claim 1 wherein the door opening mechanism includes a port adapted to apply vacuum pressure from a vacuum source to the door of the substrate carrier.

3. The system of claim 2 wherein the door opening mechanism further includes one or more channels adapted to direct vacuum pressure from the vacuum source to the door of the substrate carrier.

4. The system of claim 1 wherein the door opening mechanism further includes one or more kinematic features adapted to couple with and align the door of the substrate carrier with the door opening mechanism.

5. The system of claim 1 wherein the door includes one or more cup features that are disposed so as to align with the port of the door opening mechanism when the door opening mechanism is adjacent the door.

6. The system of claim 5 wherein the one or more cup features are adapted to create a seal against the door opening mechanism.

7. The system of claim 1 wherein the loadport is further adapted to apply a gas flow around a periphery of the substrate carrier when the substrate carrier is disposed adjacent the loadport.

8. A method comprising: receiving a substrate carrier at a loadport;aligning a door opener of the loadport with a door of the substrate carrier; andapplying a vacuum pressure to the door via the door opener to hold the door.

9. The method of claim 8 further comprising applying a gas flow around a periphery of the substrate carrier.

10. The method of claim 8 further comprising removing the door from the substrate carrier.

11. The method of claim 10 further comprising removing a substrate from the substrate carrier.

12. The method of claim 10 further comprising inserting a substrate into the substrate carrier.

13. The method of claim 10 further comprising lowering the door below a level the substrate carrier.

14. The method of claim 13 further comprising raising the door of the substrate carrier to align the door with the substrate carrier.

15. The method of claim 14 further comprising removing the vacuum pressure from the door thereby releasing the door from the door opener.

16. The method of claim 15 further comprising decoupling the door opener from the door of the substrate carrier.

17. An apparatus for use with a substrate carrier comprising: a loadport including a door opening mechanism, wherein the door opening mechanism is adapted use vacuum pressure to hold a substrate carrier door against the door opening mechanism.

18. The apparatus of claim 17 wherein the door opening mechanism includes a port adapted to apply vacuum pressure from a vacuum source to the door of the substrate carrier.

19. The apparatus of claim 18 wherein the door opening mechanism further includes one or more channels adapted to direct vacuum pressure from the vacuum source to the door of the substrate carrier.

20. The apparatus of claim 17 wherein the door opening mechanism further includes one or more kinematic features adapted to couple with and align the door of the substrate carrier with the door opening mechanism.

21. The apparatus of claim 17 wherein the door includes one or more cup features that are disposed so as to align with the port of the door opening mechanism when the door opening mechanism is adjacent the door.

22. The apparatus of claim 21 wherein the one or more cup features are adapted to create a seal against the door opening mechanism.

23. The apparatus of claim 17 wherein the loadport is adapted to apply a gas flow around a periphery of the substrate carrier when the substrate carrier is disposed adjacent the loadport.