involving removal of lid, door, cover

Industry

CPC
H01L21/67772

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67772involving removal of lid, door, cover

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Purge controlling system
- Patent number 12,334,363
- Issue date Jun 17, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Chen-Wei Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for inspecting wafer carriers
- Patent number 12,334,373
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Kang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport carrier docking device
- Patent number 12,327,747
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port adapter
- Patent number 12,283,509
- Issue date Apr 22, 2025
- Nidec-Read Corporation
- Toshihide Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring apparatus
- Patent number 12,283,494
- Issue date Apr 22, 2025
- RORZE SYSTEMS CORPORATION
- Seung Bae Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cassette lid opening device
- Patent number 12,237,195
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking device with moveable frame and sealing component
- Patent number 12,237,196
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow modification fixture for an equipment front end module
- Patent number 12,183,611
- Issue date Dec 31, 2024
- Entegris, Inc.
- Seong Chan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for air flow optimization in environment for se...
- Patent number 12,142,507
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port
- Patent number 12,131,933
- Issue date Oct 29, 2024
- Sinfonia Technology Co., Ltd.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Safeguarding device, wafer transport container with at least one sa...
- Patent number 12,106,987
- Issue date Oct 1, 2024
- VAT Holding AG
- Florian Ehrne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 12,094,738
- Issue date Sep 17, 2024
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chiller make-break connector for substrate processing systems
- Patent number 12,074,039
- Issue date Aug 27, 2024
- Lam Research Corporation
- Alexander Charles Marcacci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,018,373
- Issue date Jun 25, 2024
- Kokusai Electric Corporation
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer transport container
- Patent number 12,009,242
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly with detector to detect cassette
- Patent number 12,009,241
- Issue date Jun 11, 2024
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening-and-closing device
- Patent number 11,961,752
- Issue date Apr 16, 2024
- Murata Machinery, Ltd.
- Ryoma Nunome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspecting wafer carriers
- Patent number 11,929,271
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system having a front opening unified pod (FOUP) load lock
- Patent number 11,923,217
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing arrangement and method for adjusting gas flow
- Patent number 11,923,225
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface tool
- Patent number 11,854,851
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Seal mechanisms for load ports
- Patent number 11,842,913
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Douglas B. Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 11,804,390
- Issue date Oct 31, 2023
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20250157842
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
- Publication number 20250118582
- Publication date Apr 10, 2025
- Entegris, Inc.
- Seong Chan Kim
- G05 - CONTROLLING REGULATING
Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20250087524
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAPPING APPARATUS AND LOAD PORT APPARATUS
- Publication number 20250054790
- Publication date Feb 13, 2025
- TDK Corporation
- Tatsuhiro KOTSUGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20250038024
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...
- Publication number 20250014929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Risa TANIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240412983
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Alexander Charles MARCACCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20240387221
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20240347364
- Publication date Oct 17, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Rie ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFA...
- Publication number 20240321611
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Hiroyuki MITSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT CONTAINER
- Publication number 20240282610
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CARRYING WAFER AND WAFER-CARRYING APPARATUS
- Publication number 20240282609
- Publication date Aug 22, 2024
- Shin-Etsu Handotai Co., Ltd.
- Seiji SATOH
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW
- Publication number 20240203771
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS
- Publication number 20240186162
- Publication date Jun 6, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Kang HU
- G01 - MEASURING TESTING
Information Patent Application
LOAD PORT
- Publication number 20240145285
- Publication date May 2, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER RELAY UNIT AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME
- Publication number 20240096674
- Publication date Mar 21, 2024
- SEMES CO., LTD.
- Myeong Jin BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE TOOL
- Publication number 20240087935
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20240014056
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20240006201
- Publication date Jan 4, 2024
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240006200
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Hiroshi HIROTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230395406
- Publication date Dec 7, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- G01 - MEASURING TESTING
Information Patent Application
LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT
- Publication number 20230395416
- Publication date Dec 7, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20230386877
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
- Publication number 20230386879
- Publication date Nov 30, 2023
- BROOKS AUTOMATION US, LLC
- Leigh F. SHARROCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20230335424
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT
- Publication number 20230253229
- Publication date Aug 10, 2023
- Rorze Corporation
- Daigo TAMATSUKURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230207366
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Chang Jun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT ADAPTER
- Publication number 20230163008
- Publication date May 25, 2023
- NIDEC-READ CORPORATION
- Toshihide MATSUKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230111929
- Publication date Apr 13, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230116577
- Publication date Apr 13, 2023
- LAM RESEARCH CORPORATION
- Alexander Charles MARCACCI
- H01 - BASIC ELECTRIC ELEMENTS

involving removal of lid, door, cover

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Purge controlling system

Apparatus and method for inspecting wafer carriers

Transport carrier docking device

Load port adapter

Substrate transferring apparatus

Cassette lid opening device

Docking device with moveable frame and sealing component

Flow modification fixture for an equipment front end module

Process kit enclosure system

Systems and methods for air flow optimization in environment for se...

Load port

Substrate processing apparatus and method of manufacturing semicond...

Safeguarding device, wafer transport container with at least one sa...

Systems for integrated decomposition and scanning of a semiconducti...

Chiller make-break connector for substrate processing systems

Prevention of contamination of substrates during gas purging

Substrate processing apparatus

Wafer transport container

Vertical batch furnace assembly with detector to detect cassette

Lid opening-and-closing device

Apparatus and method for inspecting wafer carriers

Processing system having a front opening unified pod (FOUP) load lock

Processing arrangement and method for adjusting gas flow

Interface tool

Seal mechanisms for load ports

Reticle transportation container

Indexable side storage pod apparatus, heated side storage pod appar...

Prevention of contamination of substrates during gas purging

Systems for integrated decomposition and scanning of a semiconducti...

Side storage pods, electronic device processing systems, and method...

Patents Applicationslast 30 patents

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE

PROCESS KIT ENCLOSURE SYSTEM

MAPPING APPARATUS AND LOAD PORT APPARATUS

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...

CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD

CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFA...

WAFER TRANSPORT CONTAINER

METHOD FOR CARRYING WAFER AND WAFER-CARRYING APPARATUS

PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW

APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS

LOAD PORT

CONTAINER RELAY UNIT AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME

INTERFACE TOOL

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

LOAD PORT

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

LOAD PORT ADAPTER

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS