Number | Name | Date | Kind |
---|---|---|---|
4070211 | Harari | Jan 1978 | |
4160260 | Weitzel et al. | Jul 1979 | |
4753896 | Matloubian | Jun 1988 |
Entry |
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Wolf, S., Silicon Processing for the VSLI Era, vol. 1, Lattice Press, 1986, pp. 264-265, 280-327. |
Capell, A. et al., "Process Refinements . . . ", Electronics, May 26, 1977, pp. 99-105. |