Recent developments in semiconductor and flexible electronics applications have observed a rapid increase in demands for lower cost, higher throughput, and higher resolution micro/nanofabrication techniques. This is due to the fact that conventional techniques such as electron beam lithography (EBL) have a low throughput for mass production and other alternatives such as extreme ultraviolet lithography and focused ion beam lithography are very costly, limiting feasibility.
Nanoimprint lithography (NIL) is a simpler, low-cost, and high-throughput alternative to micro- and nanofabrication. In the NIL process, a prefabricated mold containing an inverse of the desired patterns is pressed onto a resist-coated substrate to replicate the patterns via mechanical deformation. Hence, many replications may be produced from a single prefabricated mold using this method. As the NIL process is based on direct mechanical deformation, its resolution is not constrained to the limitations of light diffraction or beam scattering factors as observed in conventional nanolithography methods. Roll-to-roll (R2R) nanoimprint lithography (NIL) is a particularly desirable technique due to its high-throughput suitable for industrial-scale usage.
Nanoimprint lithography forms microchannels or an array of microchannels on a substrate responsive to ink printing techniques for high resolution printing of circuit elements and other features with highly accurate fidelity to predetermined boundaries. Ink is deposited into the microchannels and the flow of liquid ink is constrained by the walls of the microchannels. The microchannels are either in the shape of the circuit or pattern to be printed, or a microfeature array is defined by micropillars formed between intersecting microchannels in the substrate. The microchannels are responsive to a sequence of ink droplets in a highly controlled and predictable manner based on the droplet volume, droplet spacing and temperature. The flow of liquid ink is restrained by the microchannels for pinning the ink for avoiding uncontrolled ink flow as occurs on a flat surface. Subsequent layers of deposited ink tend to follow pinning of previous layers, allowing an iterative buildup of layers for forming a trace of sufficient thickness and a high aspect ratio allowing traces extending above the depth of the microchannels for aiding connection to surface mount components.
Configurations herein are based, in part, on the observation that digital printing techniques are often employed for precision deposition of liquid and solvent based substances onto a substrate. Unfortunately, conventional approaches to ink deposition suffer from the shortcoming presented by adequate flow control of liquid inks to adhere to a predetermined or intended flow pattern. Liquid inkflow follows a flow pattern on a flat surface that varies according to somewhat unpredictable principles, causing ink to “run” or flow indiscriminately across the surface. Accordingly, configurations herein substantially overcome the shortcomings of conventional ink droplets and sprayed or extruded inkjet mediums by providing microchannels or a microchannel array on a surface and a method for filling the microchannels using printed ink and inkjet mediums. The disclosed approach addresses the need for printing electrically conductive features (such as circuit traces and features for attaching electrical components) with higher resolution, larger thickness and aspect ratio, improved cross-section profile, improved edge definition, tighter dimensional tolerance, and higher adhesion.
In particular configurations, a method of printing circuit traces and components includes forming microchannels on a substrate or a microfeature array on a substrate based on intersecting arrays of microchannels, where the substrate retains micropillars defined by protruding substrate regions flanked by intersecting microchannels. A nozzle or print apparatus deposits a sequence of ink droplets onto or into the microchannels based on a trace pattern, in which each ink droplet having a volume of ink and a spacing from adjacent ink droplets, as well as a viscosity. The microchannels confine the flow of each ink droplet to a width of the trace pattern while meeting a flow of adjacent droplets in the sequence for forming a continuous trace having well-defined and controllable boundaries.
The foregoing and other objects, features and advantages of the invention will be apparent from the following description of particular embodiments of the invention, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention.
The description below presents an example of a surface having microchannels and a method for filling the microchannels using printing. The microchannels are created in the substrate by nanoimprint lithography or another suitable method. The substrate having microchannels can be made from a range of materials. The microchannels can be imprinted into sheets of materials such as PET and polyimide, which are commonly used for printed electronics, or can be imprinted into coatings. Ink (of any type including graphic inks, conductive, resistive, or other functional inks) is printed into the microchannels by inkjet printing or similar fluidic printing process.
Conventional approaches rely on capillary action to promote or extend fluid flow, from a point of supply or deposition along a flow path for extending coverage. In contrast, configurations herein employ pillar structures and channels for directing fluid only to the deposited regions, and limit flow from a point of deposition for increased accuracy. In other words, conventional approaches extend or promote fluid (ink) flow from a deposition (print) source; configurations herein limit or restrict fluid flow to the point or region of deposition.
Configurations herein printed or deposit along the entire length the intended trace or pattern defined by the microchannel. This is unlike previous approaches for filling microchannels with ink, in which ink is only printed or otherwise filled into a reservoir connected to the microchannels, and is then pulled into the microchannels by capillary forces (i.e. by wicking). Extended capillary flow is required in conventional approaches to direct an extended ink flow from a deposition source. In the disclosed approach, printing of the ink along the entire length of the microchannels can be achieved using either digital or pattern-based printing methods, with appropriate alignment of the microchannels in the printing platform. The ink fills the microchannels when the floor and walls of the microchannel are receptive to the ink, i.e. if there is a sufficiently low ink contact angle with the floor and walls. Sufficient velocity and/or pressure of the ink can also facilitate filling of the microchannels.
In conventional approaches, relying on flat surface properties and/or capillary action, the ink tends to flow and spread out more than desired on the surface during printing, e.g. during inkjet printing. It can be difficult to print very small features, i.e. it places an upper limit on the print resolution. Higher print resolution (ability to print smaller features) is generally preferable. This is especially important for printing fan outs for surface mount of packaged and unpackaged ICs (Integrated Circuits) having a high pin/bump count with a small pitch between pins/bumps. Another drawback of conventional approaches is difficulty with printing thick and narrow features (i.e. having a high aspect ratio). Thicker and narrower features are desired to simultaneously achieve high electrical conductance within a smaller area footprint. This benefits conductive traces that need to carry high currents, and dense circuit board arrangements where circuit board “real estate” is limited. A further complication arises from instabilities such as bulging and pooling, which lead to printed features having nonuniform (rough or wavy) edges and poor control of dimensions (poor dimensional tolerance). Conventional approaches often require substrate electroplating or other chemical treatment to assist with proper trace formation.
During the R2R (or other suitable) lithographic process, each microchannel 51 is formed having a width 51-W, 51′-W based on an intended width of a printed trace of ink onto the substrate. Multiple microchannels may contribute to the printed, or ink bearing region of a trace 40; the trace may call for multiple widths of microchannels 51/micropillars 62, but fidelity to maintain ink flow within the designated microchannels is preserved; the ink resists flow beyond the intended microchannels.
Multiple layers of ink can be printed into the microchannel, to fill it to the desired depth. The ink is allowed to dry partially or completely in the microchannel between printing of successive layers, leaving behind the functional material to be deposited, often a conductive trace. Printing at an elevated substrate temperature can accelerate the drying of the ink and enable fast filling of the microchannels by multiple printed layers.
If the walls and floor of the microchannel are made more receptive or adhesive to the ink compared to the surface of the substrate, or if the surface of the substrate is made to repel the ink, then it is possible to achieve complete filling or even over-filling of the ink in the microchannel, so that the final dried material in the microchannel is flush with the surface of the substrate, or even protruding above the surface. This is beneficial for attachment of surface mount electrical components to conductors filled in the microchannels.
Each microchannel, therefore, has a width 51-W and a depth 51-D based on the height of the micropillars 62. In particular configurations the width is at least 10 times the depth. Alternatively, the depth may be substantially greater for increasing an aspect ratio (height to depth), for example for thicker traces having a greater current carrying capacity. In a typical implementation, for example, 10× width to height is desirable but could be as high as 1:1 or greater.
Microchannels 51 having much greater depth 51-D and aspect ratio can also be created by nanoimprint lithography or other methods using various processes. This approach of filling ink into microchannels would also apply to such deeper and higher-aspect-ratio channels.
The nanoimprint lithography applied to the substrate 10 surface therefore forms an array of microfeatures with regular size, shape and spacing defining the micropillars 62, which are created by nanoimprint lithography or another suitable method. The ink penetrates into the microfeature array, wetting the sides and surfaces in between the microfeatures (so-called Wenzel wetting) because of the energy of impact of the ink onto the surface and because of elevated surface temperature, rather than remaining on top of the array (so-called Cassie wetting). The ink, now wetting the microfeature array and surface between the microfeatures, begins to spread outward from the point of initial placement in a manner limited by the micropillars 62 in a highly controlled and predictable manner based on the volume and spacing of the ink droplets.
The microchannels in the substrate can be used to make an entire printed electronic circuit, or only some critical portions that require narrow and/or finely-spaced features, such as component attach features and fan-out traces. If the microchannels are used to make only a part of a printed electronic circuit, the rest of the circuit can be printed using digital inkjet or another printing method. In this manner, the digital nature of inkjet can be preserved for the rest of the circuit. For instance, substrates can be imprinted with microchannels comprising component attachment features and fan-out traces designed for a particular component, and can be distributed along with that component. Subsequent manufacturing fills these microchannels with conductive ink to print the remainder of the desired circuit using a suitable printing method.
In another example, a conductive ink containing silver is employed for printing conductive traces.
Referring to
In
During deposition, the ink, being a solvent based carrier of solids such as conductive particles, is affected by heat and evaporation to aid in “pinning”—an adherence of the ink to the substrate and termination of liquid flow. Pinning occurs with each successive layer. When applied to the micropillar array 50, a trace formed from a first ink layer having a first width results in a second ink layer having a second width less than or equal to the first width. In other words, the previously applied layer tends to define the pinning of successive layers to the same boundary and mitigate flow.
A high surface temperature is therefore important during printing, to cause drying of the advancing contact line of the ink and pinning of the ink at the micropillars 62. The importance of surface temperature is clearly seen if the printing is done instead at a low surface temperature of 30° C., which results in the ink spreading out more on the micropillar surface than it would on a flat surface (opposite to the result at 70° C.). This is because the ink wicks through the micropillar array and has more time to spread in the absence of drying-induced pinning caused by high surface temperature.
Pinning increases with the filling fraction of the microfeature array. The micropillars in
Further, when compared to the printed features on the flat surface, the edges of the printed features on the microfeatured surface are precisely defined by pinning of the ink along the rows and columns of the microfeature array, leading to very straight, smooth edges with tight dimensional tolerance.
Importantly, the printed silver ink fully wets the micropillars 62 and the surface in between the micropillars, forming a continuous trace of material. The ink remains continuous (and electrically conductive in the case of conductive ink). The electrical resistance of 1-2 layers of 1 pixel-wide printed traces both on the flat surface and on the micropillar array having width of 2.472 μm and spacing of 2.472 μm were measured after annealing for 30 minutes at 130° C. As shown in
While the system and methods defined herein have been particularly shown and described with references to embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention encompassed by the appended claims.
This patent application claims the benefit under 35 U.S.C. § 119(e) of U.S. Provisional Patent App. No. 63/271,100, filed Oct. 22, 2021, entitled “SURFACE WITH MICROFEATURE ARRAY,” and U.S. Provisional Patent App. No. 63/272,302, filed Oct. 27, 2021, entitled “INK DEPOSITION ONTO MICROFEATURE ARRAY,” all incorporated herein by reference in entirety.
This patent application is based on research sponsored, in part, by Air Force Research Laboratory under agreement number FA8650-15-2-5401. The Government has certain rights in the invention.
Number | Date | Country | |
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63272302 | Oct 2021 | US | |
63271100 | Oct 2021 | US |