Micromachined field asymmetric ion mobility filter and detection system

Information

  • Patent Grant
  • 7435950
  • Patent Number
    7,435,950
  • Date Filed
    Wednesday, January 11, 2006
    18 years ago
  • Date Issued
    Tuesday, October 14, 2008
    16 years ago
Abstract
A micromechanical field asymmetric ion mobility filter for a detection system includes a pair of spaced substrates defining between them a flow path between a sample inlet and an outlet; an ion filter disposed in the path and including a pair of spaced filter electrodes, one electrode associated with each substrate; and an electrical controller for applying a bias voltage and an asymmetric periodic voltage across the ion filter electrodes for controlling the paths of ions through the filter.
Description
BACKGROUND OF THE INVENTION

This invention relates to a Field Asymmetric Ion Mobility (FAIM) filter, and more particularly, to a micromachined FAIM filter and spectrometer.


The ability to detect and identify explosives, drugs, chemical and biological agents as well as air quality has become increasingly more critical given increasing terrorist and military activities and environmental concerns. Previous detection of such agents was accomplished with conventional mass spectrometers, time of flight ion mobility spectrometers and conventionally machined FAIM spectrometers.


Mass spectrometers are very sensitive, highly selective and provide a fast response time. Mass spectrometers, however, are large and require significant amounts of power to operate. They also require a powerful vacuum pump to maintain a high vacuum in order to isolate the ions from neutral molecules and permit detection of the selected ions, and are also very expensive.


Another spectrometric technique which is less complex is time of flight ion mobility spectrometry which is the method currently implemented in most portable chemical weapons and explosives detectors. The detection is based not solely on mass, but on charge and cross-section of the molecule as well. However, because of these different characteristics, molecular species identification is not as conclusive and accurate as the mass spectrometer. Time of flight ion mobility spectrometers typically have unacceptable resolution and sensitivity limitations when attempting to reduce their size, that is a drift tube length less than 2 inches. In time of flight ion mobility, the resolution is proportional to the length of the drift tube. The longer the tube the better the resolution, provided the drift tube is also wide enough to prevent all ions from being lost to the side walls due to diffusion. Thus, fundamentally, miniaturization of time of flight ion mobility systems leads to a degradation in system performance. While these devices are relatively inexpensive and reliable, they suffer from several limitations. First, the sample volume through the detector is small, so to increase spectrometer sensitivity either the detector electronics must have extremely high sensitivity, requiring expensive electronics, or a concentrator is required, adding to system complexity. In addition, a gate and gating electronics are usually needed to control the injection of ions into the drift tube.


FAIM spectrometry was developed in the former Soviet Union in the 1980's. FAIM spectrometry allows a selected ion to pass through a filter while blocking the passage of undesirable ions. Conventional FAIM spectrometers are large and expensive, e.g., the entire device is nearly a cubic foot in size and costs over $25,000. These systems are not suitable for use in applications requiring small detectors. They are also relatively slow, taking as much as one minute to produce a complete spectrum of the sample gas, are difficult to manufacture and are not mass producible.


SUMMARY OF THE INVENTION

It is therefore an object of this invention to provide a FAIM filter and detection system which can more quickly and accurately control the flow of selected ions to produce a sample spectrum than conventional FAIM devices.


It is a further object of this invention to provide such a filter and detection system which can detect multiple pre-selected ions without having to sweep the bias voltage.


It is a further object of this invention to provide such a filter and detection system which can even detect selected ions without a bias voltage.


It is a further object of this invention to provide such a filter and detection system which can detect ions spatially based on the ions' trajectories.


It is a further object of this invention to provide such a filter and detection system which has a very high resolution.


It is a further object of this invention to provide such a filter and detection system which can detect selected ions faster than conventional detection devices.


It is a further object of this invention to provide such a filter and detection system which has a sensitivity of parts per billion to parts per trillion.


It is a further object of this invention to provide such a filter and detections system which may be packaged in a single chip.


It is further object of this invention to provide such filter and detection system which is cost effective to implement and produce.


The invention results from the realization that an extremely small, accurate and fast FAIM filter and detection system can be achieved by defining a flow path between a sample inlet and an outlet using a pair of spaced substrates and disposing an ion filter within the flow path, the filter including a pair of spaced electrodes, one electrode associated with each substrate and a controller for selectively applying a bias voltage and an asymmetric periodic voltage across the electrodes to control the path of ions through the filter.


The invention results from the further realization that by providing an array of filters, each filter associated with a different bias voltage, the filter may be used to detect multiple selected ions without sweeping the bias voltage.


The invention results from the realization that by varying the duty cycle of the periodic voltage, no bias voltage is required.


The invention results from the further realization that by segmenting the detector, ion detection may be achieved with greater accuracy and resolution by detecting ions spatially according to the ions' trajectories as the ions exit the filter.


This invention features a micromechanical field asymmetric ion mobility filter for a detection system. There is a pair of spaced substrates defining between them a flow path between a sample inlet and an outlet, an ion filter disposed in the path and including a pair of spaced filter electrodes, one electrode associated with each substrate and an electrical controller for applying a bias voltage and an asymmetric periodic voltage across the ion filter electrodes for controlling the paths of ions through the filter.


In a preferred embodiment there may be a detector, downstream from the ion filter, for detecting ions that exit the filter. The detector may include a plurality of segments, the segments separated along the flow path to spatially separate the ions according to their trajectories. There may be confining electrodes, responsive to the electrical controller, for concentrating selected ions as they pass through the filter. The confining electrodes may be silicon. The silicon electrodes may act as spaces for spacing the substrates. There may be heater for heating the flow path. The heater may include the ion filter electrodes. The electrical controller may include means for selectively applying a current through the filter electrodes to heat the filter electrodes. The substrate may be glass. The glass may be Pyrex®. There may be an ionization source, upstream from the filter, for ionizing a fluid flow from the sample inlet. The ionization source may include a radioactive source. The ionization source may include an ultraviolet lamp. The ionization source may include a corona discharge device. There may be a clean air outlet for introducing purified air into the flow path. There may be a pump in communication with the flow path, for regulating a fluid flow through the flow path.


The invention also features a field asymmetric ion mobility filter and detection system. There is a housing having a flow path between a sample inlet and an outlet, an ion filter disposed in the flow path and including a pair of spaced filter electrodes, an electrical controller for applying a bias voltage and an asymmetric periodic voltage across the ion filter electrodes for controlling the path of ions through the filter, and a segmented detector, downstream from the ion filter, its segments separated along the flow path to spatially separate the ions according to their trajectories.


In a preferred embodiment there may be confining electrodes, responsive to the electrical controller, for concentrating the ions as they pass through the filter. The confining electrode may be silicon. The silicon electrodes may act as a spacer for spacing the filter electrodes. There may be a heater for heating the flow path. The heater may include the ion filter electrodes. The electrical controller may include means for selectively applying current through the filter electrodes to heat the filter electrodes. There may be an ionization source upstream from the filter for ionizing fluid flow from the sample inlet. The ionization source may include a radioactive source. The ionization source may include an ultraviolet lamp. The ionization source may include a corona discharge device. There may be a clean air inlet for introducing purified air into the flow path. There may be a pump in communication with the flow path for regulating a fluid flow through the flow path.


The invention also features a field asymmetric ion mobility filter array. There is a housing defining at least one flow path between a sample inlet and an outlet, a plurality of ion filters disposed within the housing, each ion filter including a pair spaced filter electrodes, and an electrical controller for applying a bias voltage and an asymmetric periodic voltage across each pair of ion filter electrodes for controller the path of ions through each filter.


In a preferred embodiment each ion filter may be associated with one of the flow paths. There may be a detector downstream from each ion filter for detecting ions that exit each said filter. Each detector may include a plurality of segments, the segments separated along the flow path to spatially separate the ions according to their trajectories. There may be a plurality of confining electrodes, responsive to the electrical controller, for concentrating the ions as they pass through each filter. Each confining electrode may be silicon. The silicon electrode may act as a spacer for spacing the filter electrodes. There may be a heater fro heating the at least one flow path. The heater may include each pair of ion filter electrodes. The electrical controller may include means for selectively applying a current through each pair of filter electrodes to heat the filter electrodes. There may be an ionization source upstream from each filter for ionizing a fluid flow from the sample inlet. The ionization source may be a radioactive source. The ionization source may be an ultraviolet lamp. The ionization source may be a corona discharge device. There may be a clean air inlet for introducing purified air into at least one flow path. There may be a pump in communication with each flow path for regulating a fluid flow through each flow path.


The invention also features an uncompensated field asymmetric ion mobility filter for a detection system. There is a housing having a flow path between a sample inlet and an outlet, an ion filter disposed in the path and including a pair of spaced filter electrodes, an electrical controller for applying an uncompensated asymmetric periodic voltage across the ion filter for controlling the path of ions through the ion filter, and a selection circuit for selectively adjusting the duty cycle of the periodic voltage to target a selected specie or species of ion to be detected.


In a preferred embodiment there may be a detector downstream from the ion filter for detecting ions that exit the filter. The detector may include a plurality of segments, the segments separated along the flow path to spatially separate the ions according to their trajectories. There may be a confining electrode, responsive to the electrical controller, for concentrating the ions as they pass through the filter. The confining electrode may be silicon. The silicon electrode may act as a spacer for spacing the filter electrodes. There may be a heater for heating the flow path. The heater may include the ion filter electrodes. The electrical controller may include means for selectively applying a current through the filter electrodes to heat the filter electrodes. There may be an ionization source, upstream from the filter, for ionizing a fluid flow from sample inlet. The ionization source may include a radioactive source. The ionization source may include an ultraviolet lamp. The ionization source may include a corona discharge device. There may be a clean air inlet for introducing purified air into the flow path. There may be a pump in communication with the flow path for regulating a fluid flow through the flow path.


The invention also features a field asymmetric ion mobility filter. There is a housing having a flow path between a sample inlet and an outlet, an ion filter disposed in the flow path and including a pair of spaced filter electrodes, a pair of confining electrodes transverse to the flow path, and an electrical controller for applying a first bias voltage and an asymmetric periodic voltage across the ion filter electrodes and for applying a second bias voltage across the confining electrodes for controlling the path of ions through the filter.


In a preferred embodiment there may be a detector downstream from the ion filter for detecting ions that exit the filter. The detector may include a plurality of segments, the segments separated along the flow path to spatially separate the ions according to their trajectories. The confining electrodes may be silicon. The silicon electrodes may act as a spacer for spacing the filter electrodes. There may be a heater for heating the flow path. The heater may include the ion filter electrodes. The heater may include the confining electrodes. The electrical controller may include means for selectively applying a current through the filter electrodes to heat the filter electrodes. The electrical controller may include means for selectively applying a current through the confining electrodes to heat the confining electrodes. There may be an ionization source upstream from the filter for ionizing fluid flow from the sample inlet. The ionization source may include a radiation source. The ionization source may include an ultraviolet lamp. The ionization source may be a corona discharge device. There may be a clean air inlet for introducing purified air into the flow path. There may be a pump in communication with the flow path for regulating a fluid flow through the flow path.





BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular description of preferred embodiments of the invention, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention.


Other objects, features and advantages will occur to those skilled in the art from the following description of a preferred embodiment and the accompanying drawings, in which:



FIG. 1 is a schematic block diagram of the micromachined filter and detection system according to the present invention;



FIG. 2 is a schematic representation of the ions as they pass through the filter electrodes of FIG. 1 toward the detector;



FIG. 3A is a graphical representation of the bias voltage required to detect acetone and the sensitivity obtainable;



FIG. 3B is a representation, similar to FIG. 3A, of the bias voltage required to detect Diethyl methyl amine;



FIG. 4 is a cross sectional of the view of the spaced, micromachined filter according to the present invention;



FIG. 5 is a three dimensional view of the packaged micromachined filter and detection system, including fluid flow pumps, demonstrating the miniaturized size which maybe realized;



FIG. 6 is an exploded view of one embodiment according to the present invention in which an array of filters and detectors are disposed in a single flow path;



FIG. 7 is an exploded view, similar to FIGS. 6, in which the array of filters is stacked and one filter and detector is associated with a single flow path.



FIG. 8 is a cross sectional representation of a single flow path of the arrayed filter and detector system of FIG. 7;



FIG. 9 is a graphical representation demonstrating simultaneous multiple detections of benzene and acetone;



FIG. 10 is a schematic block diagram, similar FIG. 1, in which the filter is not compensated by a bias voltage and the duty cycle of the periodic voltage is instead varied to control the flow of ions through the filter;



FIG. 11 is a graphical representation of an asymmetric periodic voltage having a varying duty cycle which is applied to the filter of FIG. 9 to filter selected ions without a bias voltage; and



FIG. 12 is a schematic diagram of a filter and detector system in which the detector is segmented to spatially detect ions as they exit the filter.





DETAILED DESCRIPTION OF THE INVENTION

A description of preferred embodiments of the invention follows.


FAIM spectrometer 10, FIG. 1, operates by drawing a gas, indicated by arrow 12, via pump 14, through inlet 16 into ionization region 18. The ionized gas is passed between parallel electrode plates 20 and 22, which comprise ion filter 24, following flow path 26. As the gas ions pass between plates 20 and 22, they are exposed to an asymmetric oscillating electric field between electrode plates 20 and 22 induced by a voltage applied to the plates by voltage generator 28 in response to electronic controller 30


As ions pass through filter 24, some are neutralized by plates 20 and 22 while others pass through and are sensed by detector 32. Detector 32 includes a top electrode 33 at a predetermined voltage and a bottom electrode 35, typically at ground. Top electrode 33 deflects ions downward to electrode 35. However either electrode may detect ions depending on the ion and the voltage applied to the electrodes. Moreover, Multiple ions may be detected by using top electrode 33 as one detector and bottom electrode 35 as a second detector. Electronic controller 30 may include for example, amplifier 34 and microprocessor 36. Amplifier 34 amplifies the output of detector 32, which is a function of the charge collected by detector 34, and provides the output to microprocessor 36 for analysis. Similarly, amplifier 34′, shown in phantom, may be provided where electrode 33 is also utilized as a detector.


As ions 38, FIG. 2, pass through alternating asymmetric electric field 40, which is transverse to gas flow 12, electric field 40, causes the ions to “wiggle” along paths 42a, 42b and 42c. Field 40 is typically in the range of ±(1000-2000) volts dc and has a maximum field strength of 40,000 V/cm. The path taken by a particular ion is a function of its mass, size, cross-section and charge. Once an ion reaches electrode 20 or 22, it is neutralized. A second, bias or compensation field 44, typically in the range of ±2000 V/cm or ±100 volts dc, is concurrently induced between electrodes 20 and 22 by as bias voltage applied to plates 20 and 22, also by voltage generator 28, FIG. 1, in response to microprocessor 36 to enable a preselected ion species to pass through filter 24 to detector 32. Compensation field 44 is a constant bias which offsets alternating asymmetric field 40 to allow the preselected ions, such as ion 38c to pass to detector 32. Thus, with the proper bias voltage, a particular species of ion will follow path 42c while undesirable ions will follow paths 42a and 42b to be neutralized as they encounter electrode plates 20 and 22.


The output of FAIM spectrometer 10 is a measure of the amount of charge on detector 32 for a given bias voltage 44. The longer filter 24 is set at a given compensation bias voltage, the more charge will accumulate on detector 32. However, by sweeping compensation voltage 44 over a predetermined voltage range, a complete spectrum for sample gas 23 can be achieved. The FAIM spectrometer according to the present invention requires typically less than thirty seconds and as little as one second to produce a complete spectrum for a given gas sample.


By varying compensation bias voltage 44 the species to be detected can be varied to provide a complete spectrum of the gas sample. For example, with a bias voltage of −3.5 volts acetone was detected as demonstrated by concentration peaks 46, FIG. 3A in concentrations as low as 83 parts per billion. In contrast, at a bias voltage of −6.5 volts, diethyl methyl amine, peaks 48, FIG. 3B, was detected in concentrations as low as 280 parts per billion.


Filter 24, FIG. 4, is on the order of one inch is size. Spectrometer 10 includes spaced substrates 52 and 54, for example glass such as Pyrex® available from Corning Glass, Corning, N.Y., and electrodes 20 and 22, which may be example gold, titanium, or platinum, mounted or formed on substrates 52 and 54, respectively. Substrates 52 and 54 are separated by spacers 56a and 56b which may be formed by etching or dicing silicon wafer. The thickness of spacers 56a and 56b defines the distance between electrodes 20 and 22. Moreover, applying the same voltage to silicon spacers 56a-b, typically ±(10-1000 volts dc) transforms spacers 56a-b into electrodes which produce a confining electric field 58, which guides or confines the ions' paths to the center of flow path 26. This increases the sensitivity of the system by preserving more ions so that more ions strike detector 34. However, this is not a necessary limitation of the invention.


To maintain accurate and reliable operation of spectrometer 10, neutralized ions which accumulate on electrode plates 20 and 22 must be purged. This may be accomplished by heating flow path 26. For example, controller 30, FIG. 1, may include current source 29, shown in phantom, which provides, in response to microprocessor 36, a current I to electrode plates 20 and 22 to heat the plates, removing accumulated molecules. Similarly, current I may instead be applied to spacer electrodes 56a and 56b, FIG. 4, to heat flow path 26 and clean plates 20 and 22.


Packaged FAIM spectrometer 10, FIG. 5, may be reduced in size to one inch by one inch by one inch. Pump 14 is mounted on substrate 52 for drawing a gas sample 12 into inlet 16. Clean dry air may be introduced into flow path 26, FIG. 1, by recirculation pump 14a prior to or after ionization of the gas sample. Electronic controller 30 may be etched into silicon control layer 60 which combines with substrates 52 and 54 to form a housing for spectrometer 10. Substrates 52 and 54 and control layer 60 may be bonded together, for example, using anodic bonding, to provide an extremely small FAIM spectrometer. Micro pumps 14 and 14a provide a high volume thoughput which further expedites the analysis of gas sample 12. Pumps 14 and 14a may be, for example, conventional miniature disk drive motors fitted with small centrifugal air compressor rotors or micromachined pumps, which produce flow rates of 1 to 4 liters per minute. One example of pump 14 is available from Sensidyne, Inc., Clearwater, Fla.


While the FAIM spectrometer according to the present invention quickly produces a spectrum for a particular gas sample, the time for doing so may be further reduced with an array of filters 32. FAIM spectrometer 10, FIG. 6, may include filter array 62, a single inlet 16 and single flow path 26. Sample gas 23 is guided by confining electrodes 56a-h to filter array 62 after passing by ionization source 18, which may include an ultraviolet light source, a radioactive device or corona discharge device. Filter array 62 includes, for example, paired filter electrodes 20a-d and 22a-e and may simultaneously detect different ion species by applying a different compensation bias voltage 44, FIG. 2, to each electrode pair and sweeping each electrode pair over a different voltage range greatly reducing the sweep time. However, array 62 may include any number of filters depending on the size of the spectrometer. Detector array 64, which includes detectors 32a-e, detects multiple selected ion species simultaneously, thereby reduce the time necessary to obtain a spectrum of the gas sample 12. The electrode pairs share the same asymmetric periodic ac voltage 40.


Clean dry air may be introduced into flow path 26 through clean air inlet 66 via recirculator pump 14a, FIG. 5. Drawing in clean dry air assists in reducing the FAIM spectrometer's sensitivity to humidity. Moreover, if the spectrometer is operated without clean dry air and a known gas sample is introduced in the device, the device can be used as a humidity sensor since the resulting spectrum will change with moisture concentration from the standardized spectrum for the given sample.


However, rather than each filter 32a-e of filter array 62 sharing the same flow path 26, individual flow paths 26a-e, FIG. 7, may be provided so that each flow path has associated with it, for example, inlet 16a, ionization region 18a, confining electrodes 56a′, 56b′, ion filter electrode pair 20a, 22a, detector electrode pair 33a, 35a, and exit port 68a.


In operation, sample gas 12 enters sample inlet 16a, FIG. 8, and is ionized by, for example, a corona discharge device 18a. The ionized sample is guided towards ion filter 24a by confining electrodes 56a. As ions pass between ion filter electrodes 20a and 22a, undesirable ions will be neutralized while selected ions will pass through filter 24a to be detected by detector 32a.


As shown in FIG. 9, multiple, simultaneous detections were made of Benzene, peaks 50 and acetone peaks 51, demonstrating the advantage of the arrayed filters and detectors according to the present invention.


It has also been found that a compensation bias voltage is not necessary to detect a selected specie or species of ion. By varying the duty cycle of the asymmetric periodic voltage applied to electrodes 20 and 22 of filter 24, FIG. 10, there is no need to apply a constant bias voltage to plate electrodes 20 and 22. Voltage generator 28, in response to control electronics 30 varies the duty cycle of asymmetric alternating voltage 40. By varying the duty cycle of periodic voltage 40, FIG. 11, the path of selected ion 32c may be controlled. As an example, rather than a limitation, the duty cycle of field 40 may be one quarter: 25% high, peak 70, and 75% low, valley 72, and ion 38c approaches plate 20 to be neutralized. However, by varying the duty cycle of voltage 40a to 40%, peak 70a, ion 38c passes through plates 20 and 22 without being neutralized. Typically the duty cycle is variable from 10-50% high and 90-50% low. Accordingly, by varying the duty cycle of field 40, an ion's path may be controlled without the need of a bias voltage.


To improve FAIM spectrometry resolution even further, detector 32, FIG. 12, may be segmented. Thus as ions pass through filter 24 between filter electrodes 20 and 22, the individual ions 38c′-38c″″ may be detected spatially, the ions having their trajectories 42′-42′″ determined according to their size, charge and cross section. Thus detector segment 32′ will have one a concentration of one species of ion while detector segment 32″ will have a different ion species concentration, increasing the spectrum resolution as each segment may detect a particular ion species.


Although specific features of the invention are shown in some drawings and not in others, this is for convenience only as each feature may be combined with any or all of the other features in accordance with the invention.


Other embodiments will occur to those skilled in the art and are within the following claims:


While this invention has been particularly shown and described with references to preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention encompassed by the appended claims.

Claims
  • 1. An ion mobility based system for analyzing a sample comprising: an asymmetric electric field for dispersing ions of the sample,a filter electrode in communication with a flow path, within which the asymmetric field is formed, anda controller for automatically adjusting at least one condition of the asymmetric field to separate particular ones of the dispersed ions from others of the dispersed ions for analyzing a component in the sample.
  • 2. The system of claim 1, wherein the controller is configured to selectively adjust at least one condition of the flow path.
  • 3. The system of claim 1 including a detector for providing spectral information, at least about the separated ions, for analyzing the component in the sample.
  • 4. The system of claim 3 including a detector for measuring a quantity of the component in the sample.
  • 5. The system of claim 1, wherein the at least one condition includes a DC bias voltage applied to the filter electrode to bias the asymmetric field.
  • 6. The system of claim 1 wherein the at least one condition includes an amount of time that the DC bias voltage is applied to the filter electrode to control an amount of charge collected on a detector in the flow path.
  • 7. The system of claim 1, wherein the at least one condition includes a duty cycle of the periodic voltage applied to the filter electrodes.
  • 8. The system of claim 1 including a longitudinally extending spacer in the flow path for spacing apart the filter electrode from a second filter electrode.
  • 9. The system of claim 1 including a spacer plate for spacing apart the filter electrode from a second filter electrode.
  • 10. The system of claim 1 including an electrically conductive spacer for spacing apart the filter electrode from a second filter electrode.
  • 11. The system of claim 1 including an electrically insulative spacer for spacing apart the filter electrode from a second filter electrode.
  • 12. The system of claim 1 including an electrode for confining the ions to a substantially central portion of the flow path.
  • 13. The system of claim 2, wherein the at least one condition includes an amount of heating or ion flow rate in the ion flow path.
  • 14. The system of claim 1 including a doping inlet.
  • 15. The system of claim 1, wherein the filter electrode is formed on a substrate by one of micromachining, etching, and dicing.
  • 16. The system of claim 15, wherein the substrate is substantially planar.
  • 17. The system of claim 2, wherein the at least one condition includes an amount of the dopant being introduced via a dopant inlet into the flow path.
  • 18. The system of claim 2, wherein the at least one condition includes an amount of purified air in the ion flow path.
  • 19. The system of claim 2, wherein the at least one condition includes an amount of one or more gases other than air in the ion flow path.
  • 20. A method for analyzing a sample based on ion mobility, comprising: dispersing ions of the sample using an asymmetric electric field in a flow path, andautomatically adjusting at least one condition of the asymmetric electric field to separate particular ones of the dispersed ions from others of the dispersed ions.
  • 21. The method of claim 20 comprising selectively adjusting at least one condition of the flow path.
  • 22. The method of claim 20 including detecting spectral information, at least about the separated ions, for analyzing a component in the sample.
  • 23. The method of claim 20 wherein analyzing the component includes measuring the amount of the component in the sample.
  • 24. The method of claim 20, wherein the asymmetric field includes an RF field.
  • 25. The method of claim 20, wherein the at least one condition includes a duty cycle of a periodic voltage applied to a ion filter to control the asymmetric electric field.
  • 26. The method of claim 20, wherein the at least one condition includes a bias applied to the asymmetric field to separate particular ones of the dispersed ions from others of the dispersed ions.
  • 27. The method of claim 21 wherein the at least one condition includes an amount of electrical current applied to an ion filter to control the amount of molecules that collect on the ion filter electrodes in the flow path.
  • 28. The method of claim 21, wherein the at least one condition includes a bias voltage level applied to a confining electrode to confine ions to a substantially central flow in the flow path.
  • 29. The method of claim 21, wherein the at least one condition includes an amount of heating or ion flow rate in the ion flow path.
  • 30. The method of claim 21, wherein the at least one condition includes an amount of purified air in the ion flow path.
  • 31. The method of claim 21, wherein the at least one condition includes an amount of a dopant in the flow path to change a spectrum associated with a component in the sample.
  • 32. The method of claim 21, wherein the at least one condition includes an amount of a gas other than air in the ion flow path.
  • 33. The method of claim 21, wherein the at least one condition includes an amount of a mixture of gases other than air into in the ion flow path.
  • 34. The method of claim 21, wherein the at least one condition includes a mixture of vapors in the ion flow path.
  • 35. The system of claim 15, wherein the controller includes a processor for automatically adjusting the at least one condition of the asymmetric field.
  • 36. The method of claim 20 comprising forming a filter electrode on a substrate by one of micromachining, etching, and dicing and using the filter electrode to generate the asymmetric electric field.
  • 37. The method of claim 36 comprising using a processor for automatically adjusting the at least one condition of the asymmetric field.
RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No. 10/866,645, filed Jun. 10, 2004 now U.S. Pat. No. 7,030,372, which is a continuation of U.S. application Ser. No. 10/321,822, filed Dec. 16, 2002, now U.S. Pat. No. 6,806,463, which is a continuation-in-part of U.S. application Ser. No. 09/358,312 filed Jul. 21, 1999, now U.S. Pat. No. 6,495,823. The entire teachings of the above applications are incorporated herein by reference.

US Referenced Citations (115)
Number Name Date Kind
2615135 Glenn Oct 1952 A
2818507 Britten Dec 1957 A
2919348 Bierman Dec 1959 A
3511986 Llewellyn May 1970 A
3619605 Cook et al. Nov 1971 A
3621240 Cohen et al. Nov 1971 A
3648046 Denison et al. Mar 1972 A
3931589 Aisenberg et al. Jan 1976 A
4019989 Hazewindus et al. Apr 1977 A
4025818 Giguere et al. May 1977 A
4136280 Hunt et al. Jan 1979 A
4163151 Bayless et al. Jul 1979 A
4167668 Mourier Sep 1979 A
4201921 McCorkle May 1980 A
4315153 Vahrenkamp Feb 1982 A
4517462 Boyer et al. May 1985 A
4761545 Marshall et al. Aug 1988 A
4885500 Hansen et al. Dec 1989 A
4931640 Marshall et al. Jun 1990 A
5019706 Alleman et al. May 1991 A
5047723 Puumalainen Sep 1991 A
5144127 Williams et al. Sep 1992 A
5218203 Eisele et al. Jun 1993 A
5298745 Kernan et al. Mar 1994 A
5373157 Hiroki et al. Dec 1994 A
5420424 Carnahan et al. May 1995 A
5455417 Sacristan Oct 1995 A
5479815 White et al. Jan 1996 A
5492867 Kotvas et al. Feb 1996 A
5508204 Norman Apr 1996 A
5536939 Freidhoff et al. Jul 1996 A
5541408 Sittler Jul 1996 A
5644131 Hansen Jul 1997 A
5654544 Dresch Aug 1997 A
5723861 Carnahan et al. Mar 1998 A
5736739 Uber et al. Apr 1998 A
5763876 Pertinarides et al. Jun 1998 A
5789745 Martin et al. Aug 1998 A
5801379 Kouznetsov Sep 1998 A
5811059 Genovese et al. Sep 1998 A
5881059 Genovese et al. Sep 1998 A
5834771 Yoon et al. Nov 1998 A
5838003 Bertsch et al. Nov 1998 A
5852302 Hiraishi et al. Dec 1998 A
5869344 Linforth et al. Feb 1999 A
5965882 Megerle et al. Oct 1999 A
5998788 Breit Dec 1999 A
6049052 Chutjian et al. Apr 2000 A
6051832 Bradshaw Apr 2000 A
6055151 Tormey et al. Apr 2000 A
6066848 Kassel et al. May 2000 A
6107624 Doring et al. Aug 2000 A
6107628 Smith et al. Aug 2000 A
6124592 Spangler Sep 2000 A
6157029 Chutjian et al. Dec 2000 A
6157031 Prestage Dec 2000 A
6180414 Katzman Jan 2001 B1
6188067 Chutjian et al. Feb 2001 B1
6200539 Sherman et al. Mar 2001 B1
6262416 Chutjian et al. Jul 2001 B1
6281494 Chutjian et al. Aug 2001 B1
6323482 Clemmer et al. Nov 2001 B1
6479815 Goebel et al. Nov 2002 B1
6495823 Miller et al. Dec 2002 B1
6498342 Clemmer et al. Dec 2002 B1
6504149 Guevremont et al. Jan 2003 B2
6509562 Yang et al. Jan 2003 B1
6512224 Miller et al. Jan 2003 B1
6512226 Laboda et al. Jan 2003 B1
6540691 Philips Apr 2003 B1
6608463 Kelly et al. Aug 2003 B1
6618712 Parker et al. Sep 2003 B1
6621077 Guevremont et al. Sep 2003 B1
6639212 Guevremont et al. Oct 2003 B1
6653627 Guevremont et al. Nov 2003 B2
6690004 Miller et al. Feb 2004 B2
6703609 Guevremont Mar 2004 B2
6713758 Guevremont Mar 2004 B2
6727496 Miller et al. Apr 2004 B2
6744043 Loboda Jun 2004 B2
6753522 Guevremont Jun 2004 B2
6770875 Guevremont Aug 2004 B1
6774360 Guevremont Aug 2004 B2
6787765 Guevremont Sep 2004 B2
6799355 Guevremont Oct 2004 B2
6806463 Miller et al. Oct 2004 B2
6806466 Guevremont Oct 2004 B2
6815668 Miller et al. Nov 2004 B2
6815669 Miller et al. Nov 2004 B1
6822224 Guevremont Nov 2004 B2
6825461 Guevremont Nov 2004 B2
7030372 Miller et al. Apr 2006 B2
20010030285 Miller et al. Oct 2001 A1
20020070338 Lododa Jun 2002 A1
20020134932 Guevremont et al. Sep 2002 A1
20030020012 Guevremont Jan 2003 A1
20030038235 Guevremont et al. Feb 2003 A1
20030052263 Kaufman et al. Mar 2003 A1
20030070913 Miller et al. Apr 2003 A1
20030089847 Guevremont et al. May 2003 A1
20030132380 Miller et al. Jul 2003 A1
20040094704 Miller et al. May 2004 A1
20040136872 Miller et al. Jul 2004 A1
20040232326 Guevremont et al. Nov 2004 A1
20050029449 Miller et al. Feb 2005 A1
20050040330 Miller et al. Feb 2005 A1
20050051719 Miller et al. Mar 2005 A1
20050056780 Miller et al. Mar 2005 A1
20050121607 Miller et al. Jun 2005 A1
20050133716 Miller et al. Jun 2005 A1
20050139762 Miller et al. Jun 2005 A1
20050167583 Miller et al. Aug 2005 A1
20050173629 Miller et al. Aug 2005 A1
20050194527 Guevremont et al. Sep 2005 A1
20050194532 Guevremont et al. Sep 2005 A1
Foreign Referenced Citations (36)
Number Date Country
4134212 Apr 1993 DE
966583 Oct 1982 SU
966583 Oct 1982 SU
1337934 Sep 1987 SU
1627984 Feb 1991 SU
1405489 Jun 1998 SU
1412447 Jun 1998 SU
1485808 Jun 1998 SU
WO-9619822 Jun 1996 WO
WO-9738302 Oct 1997 WO
WO-9921212 Apr 1999 WO
WO-0008454 Feb 2000 WO
WO-0008455 Feb 2000 WO
WO-0008456 Feb 2000 WO
WO-0008457 Feb 2000 WO
WO-0108197 Feb 2001 WO
WO 01-22049 Mar 2001 WO
WO-0122049 Mar 2001 WO
WO-0135441 May 2001 WO
WO-0169217 Sep 2001 WO
WO-0169220 Sep 2001 WO
WO-0169647 Sep 2001 WO
WO-02071053 Sep 2002 WO
WO-02083276 Oct 2002 WO
WO-03005016 Jan 2003 WO
WO-2003015120 Feb 2003 WO
WO-03067237 Aug 2003 WO
WO-03067242 Aug 2003 WO
WO-03067243 Aug 2003 WO
WO-03067625 Aug 2003 WO
WO-030667243 Aug 2003 WO
WO-2004029614 Apr 2004 WO
WO-2004030022 Apr 2004 WO
WO-2004030023 Apr 2004 WO
WO-2004030129 Apr 2004 WO
WO-2004029603 Apr 2004 WO
Related Publications (1)
Number Date Country
20060118717 A1 Jun 2006 US
Continuations (2)
Number Date Country
Parent 10866645 Jun 2004 US
Child 11331333 US
Parent 10321822 Dec 2002 US
Child 10866645 US
Continuation in Parts (1)
Number Date Country
Parent 09358312 Jul 1999 US
Child 10321822 US