Claims
- 1. A method of manufacturing a reflector, the method comprising the steps of
- depositing a reflector layer on a substrate,
- etching a reflector surface into the reflector layer,
- forming a feed beam on the reflector layer, the feed beam has a distal feed end having a feed tip for suspension over the reflector and a proximal end having a hole for rotation, the feed beam is not formed over the reflector surface,
- forming a staple having an aperture for rotating the feed beam, the staple is secured to the substrate and extends through the hole, and
- rotating the feed beam about the staple to rotate the feed tip over the reflector surface.
- 2. The method of claim 1 wherein,
- the substrate is made of bulk silicon,
- the reflector layer is made of spin-on glass, and
- the feed beam is made of polysilicon.
- 3. The method of claim 1 further comprising the step of
- depositing a metal film on the reflector surface.
- 4. The method of claim 1 further comprising the steps of,
- depositing a sacrificial layer above the reflector layer and below the feed beam, and
- etching the sacrificial layer to release the feed beam from the substrate.
- 5. The method of claim 1 further comprising the steps of,
- depositing a first sacrificial layer above the reflector layer prior to forming the feed beam,
- depositing a second sacrificial layer above the proximal end of the feed beam prior to forming the staple above the proximal end,
- etching the first sacrificial layer to release the feed beam from the substrate, and
- etching the second sacrificial layer to enable the feed beam to rotate about the staple extending through the hole.
- 6. A method of manufacturing a receiver, the method comprising the steps of
- depositing a reflector layer on a substrate,
- forming a receiver on the substrate,
- etching a reflector surface into the reflector layer,
- forming a feed beam on the reflector layer, the feed beam has a distal tip end for suspension over the reflector surface and a proximal hole end for rotating, the feed beam is not formed over the reflector surface,
- releasing the feed beam from the reflector layer,
- rotating the feed beam about the proximal end around the staple to rotate the distal tip end over the reflector surface, and
- connecting the feed beam to the receiver.
- 7. The method of the claim 6 further comprising the steps of
- forming a feed network for connecting the feed beam to the receiver.
REFERENCE TO RELATED APPLICATION
The present application is related to applicant's co-pending application entitled Micromachined Monolithic Reflector Antenna System, Ser. No. 09/028,584, filed Feb. 18, 1998, by the same inventors.
STATEMENT OF GOVERNMENT INTEREST
The invention was made with Government support under Contract No. F04701-93-C-0094 by the Department of the Air Force. The Government has certain rights in the invention. The invention described herein may be manufactured and used by and for the government of the United States for governmental purpose without payment of royalty therefor.
Non-Patent Literature Citations (3)
Entry |
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"Microfabricated Hinges", K.S.J. Pister, N.W. Judy, S.R. Burgett, R.S. Fearing, Sensors and Actuators, A. 33, pp. 249-256, 1992. |
"Applying Micro-Nanotechnology to Satellite Communications Systems", A.D. Yarbrough, ART-93 (8349)-1, The Aerospace Corporation, Mar. 31, 1993. |