Lutz et al., A Precision Yaw Rate Sensor in Silicon micromachining, SAE Technical, 980267. |
Funk et al., Surface-micromachining of Resonant Silicon Structures, The 8th International Conference, Stockholm, Sweden, Jun. 25-29, 1995, pp. 50-52. |
Mizuno et al., “A Silicon Bulk Micromachined Crash Detection Sensor With Simultaneous Angular And Linear Sensitivity,” Proc Transducers '99, Japan, Jun. 7-10, 1999, pp. 1302-1305. |
Offenberg et al., Novel Process for a Monolithic Integrated Accelerometer, Transducers 95. |
Park et al., Capacitive Sensing Type Surface Micromachined Silicon Accelerometer With a Stiffness Tunig Capability, Proc. MEMS 98, pp. 637-642 (1998). |