Claims
- 1. In a chemical vapor deposition (CVD) method for the synthesis of diamond wherein a hydrocarbon/hydrogen gaseous mixture is subjected to a combustion flame in the presence of oxygen to at least partially decompose said gaseous mixture to form CVD diamond on the surface of substrate, the improvement which comprises:
- subjecting said combustion flame to dielectric heating comprising radio frequency discharge comprising an antenna adapted to surround said combustion flame, and said antenna and said substrate are connected to a transmitter for superimposing radio frequency waves on said flame, whereby said method has a carbon utilization rate of at least 1%.
- 2. The CVD method of claim 1 wherein said CVD diamond is formed on a substrate held at a CVD diamond-forming temperature, wherein said temperature is from about 500.degree. C.-1100.degree. C.
- 3. The CVD method according to claim 1 wherein said antenna comprises a coil.
- 4. The CVD method according to claim 1 wherein said antenna has an annular shape.
Parent Case Info
This is a continuation of application Ser. No. 07/782,681 filed on Oct. 25, 1991 now abandoned.
US Referenced Citations (15)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0272418 |
Jun 1988 |
EPX |
0286310 |
Oct 1988 |
EPX |
0288065 |
Oct 1988 |
EPX |
Non-Patent Literature Citations (1)
Entry |
Webster's Ninth New Collegiate Dictionary, p. 971 Merriam-Webster, Inc., Springfield, Mass., U.S.A. 1990 (no month). |
Continuations (1)
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Number |
Date |
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Parent |
782681 |
Oct 1991 |
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