Patent Application
20200255287
The invention discloses a novel technique for the selective accumulation of the nano-metals in a semisolid and solid matrix, where the substrate composition is pretreated by focused energy source to initiate the reduction of metal precursor as well as creating heterogeneous sites to increase the kinetics of nucleation and growth. Energy sources includes focused electron and photon (two or three photons) beams that provides a precisely controllable pretreatment for nano and micro sized features. This approach is precisely controllable depending on the process optimization and accuracy of the energy source used. This invention unlocks the possibility to fabricate metal-carbon composites with different structures and configurations both at nano, mico as well as macro scales. Some of the finest outcomes with this technology is the creation of metal-carbon composite based nano and mico bulb, metal-carbon sandwich, metal-carbon coaxial and core shell structures. The invention covers a wide area of applications ranging from nanoelectronics, smart sensing elements/transducers, catalysis, optical transducers and antennas. Controlling the nanometal localization inside a micro and nano structures further allows its application as precise bimolecular sensor and even single biomolecule or cell sensor.
Nanometal-carbon composite, heterogeneous nucleation, photo-cross-linking, micro/nano bulb, metal carbon sandwich, metal carbon coaxial.
Well-dispersed functional nanoparticles (NPs) in a conductive carbon host are particularly important for sensors applications. Electrochemical energy storage, electrochemical catalysis, and photocatalysis, among other applications. The conductive support cannot only effectively transport electrons and heat generated during electrochemical reactions, but also disperse the nanoparticles from severe aggregation. Along with that, presence of nano-structures on the surface provides a perfect platform for the chemical and biological functionalization. Two main strategies have been developed for the synthesis of NPs decorated on carbon-based materials, which includes “synthesis-then-assembly” and in situ growth. For synthesis-then-assembly methods, a suspension of synthesized nanoparticles are introduced to the porous carbon matrix by impregnation and then drying. More often, the NPs are prepared in situ on a carbon support via chemical reduction or hydrothermal reaction as a simple and low-cost method, and sometimes via physical methods, such as electron beam radiation and selective surface functionalization. Since carbon is non-wetting with most metals and the interaction between metal NPs and carbon surface is, weak the as-formed nanoparticles are prone to agglomerate and redistribute during the synthesis and post heat treatments.
As the growth and aggregation of nanoparticles are time dependent diffusion and migration processes, it is critical to synthesize ultrafine NPs over a short time and quench the process to prevent or, at least, minimize agglomeration. While conventional high temperature synthesis methods, such as spray pyrolysis and combustion, are fast (several seconds to minutes), a well controllable heating method is desirable for the control of both the high temperature heating process and also the resultant particle size and distribution.
The arrangement of nanoparticles in a specific dimension and position is key for their unique electrical, optical, magnetic properties and the phenomena such as light propagation in nanoparticles crystals and plasmonic resonance. For the optimization of device performance, crucial parameters include the nanoparticle size—and the inter particle distance, as well as the arrangement controlling the coupling effects. Recent developments in self-assembly techniques have opened interesting perspectives to create motifs with desirable inter-particle distance. Methods such as reverse micelles, microemulsions, Langmuir Blodgett films, organometallic techniques, and two-phase liquid-liquid systems have been used for 2D nanoparticle patterning on a substrate. Other techniques, such as micro-contact printing, direct deposition by photochemical decomposition and inkjet printing, offer a valuable complement for fabrication. Among all architectures, the 3D arrangement of nanoparticles remains one of the most challenging goals due to stabilization problems. In order to create a mechanically robust 3D structure, nanoparticles must first be arranged through successive self-assembly and then sintered at elevated temperature. Another approach for the formation of stable 3D arrangements of nanoparticles with proper inter-particle distances to embed them in a matrix, typically a polymer. This approach has limitations due to the complicated dispersion of nanoparticles in a viscous polymers or the aggregation of nanoparticles.
Fabrication of metallic nano-structures with in a dielectric host material allows the optical response of the composite material to be tailored, potentially achieving responses not possible in a homogeneous material. Most experimentally realized negative index metamaterials have been fabricated using “top-down” lithographic techniques, usually either electron beam lithography (EBL) or focused-ion-beam lithography (FIBL). Although these approaches can provide resolution on the scale of a few nanometers, they are inherently serial in nature and are limited to the fabrication of relatively small samples, typically with high-cost and low-throughput. A more recent approach to meta-materials involves direct laser writing in a polymeric structure followed by metal evaporation over the fabricated surface. While this method is promising, full metal coverage is challenging. A need exists for new fabrication methods that overcome the aforementioned limitations.
This invention opens a new prospective of controlling and localizing the metal nanoparticles nucleation and growth on as well as inside a substrate. The process relies on a precise pretreatment of the precursor substrate mixture with a focused energy beam. The localization and accumulation of the nano-metals is an in situ process during the carbonization of the pretreated substrate. This invention allows the selective growth of Nano metals in situ during the transformation of the metal-carbon substrate into a nanometal carbon composite. The process require a pretreatment process with focused energy beam to create heterogeneous nucleation sites in the metal-carbon substrate.
Writing metal structures or fabricating metal Nano structures inside a solid matrix is a challenging process. Researchers are using intense energy beam to reduce metal precursor salts inside these solid or semisolid substrates. These processes are very harsh, non-uniform and may damage the substrate properties. A much easier solution is required to control and localize this nanometal fabrication in a solid matrix like carbon, which will further allow to reach the fabrication of structures like metal carbon based Nano bulbs, sandwiches and coaxial/core shell structures. Similar procedure. The problem relies in the fact that all the researchers have tried the complete reduction of metal precursors using high intensity/energy sources. No such research is reported where passive accumulation of Nano metals is tried during the process of substrate transformation.
This invention includes the fabrication of C-MEMS microstructure and nano-structures scaled microelectronic devices for wide range of application. One of the most prominent application of this invention is the writing of predefined patterns of metals/nano metals in a solid carbon matrix. These microstructures are created by pretreating the photo cross-linking polymer precursor containing metal precursor to create selective nucleation (by virtue of site selective reduction of metal precursor) as well as creation of secondary heterogeneous nucleation and growth platform. This heterogeneous nucleation sites further determines the patterning of the nanometal structures inside the transforming carbon precursor from a polymer state to solid carbon matrix during the process of high temperature carbonization. As explained in
| Number | Date | Country | |
|---|---|---|---|
| 62805138 | Feb 2019 | US |
