MIM CAPACITOR

Abstract

A method for forming a MIM-type capacitor by filling of trenches by conformal depositions of insulating materials and of conductive materials, two successive electrodes of the capacitor including on either side of a thin vertical insulating layer at least one conductive layer of same nature, including the step of lowering the level of the conductive layers with respect to the level of the insulating layer separating them.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1, previously described, illustrates in cross-section view a MIM capacitor at an intermediary step of its manufacturing according to a known method;

FIG. 2, previously described, illustrates in top view another step of manufacturing of a capacitor according to the known method;

FIG. 3, previously described, is an enlarged cross-section view of a portion of FIG. 1;

FIG. 4, previously described, illustrates another intermediary step of the manufacturing of a capacitor according to the known method;

FIG. 5 illustrates, in cross-section view, a step of a method for manufacturing a MIM capacitor according to the present invention; and

FIG. 6 illustrates, in cross-section view, another step of the method for manufacturing a MIM capacitor according to the present invention.

DETAILED DESCRIPTION

For clarity, the same elements have been designated with the same reference numerals in the different drawings. Further, as usual in the representation of semiconductor circuits, the various drawings are not to scale.

The present invention advantageously takes advantage of the studies made by the present inventors on the behavior of MIM capacitors obtained by the known method described in relation with FIGS. 1 to 4. In particular, the present inventors have succeeded in determining that current leakages originate from the perimeter of the capacitors, at the surface of the filled trenches.

By more precisely studying the structure, they have reached the conclusion that, in the chem.-mech. polishing, residues of the metallic materials of layers 72 and 91 located on either side of interelectrode insulator 8 come into contact and form a short-circuit.

A method according to the present invention starts with capacitor-forming steps similar to those previously described in relation with FIGS. 1, 2, and 3 comprising the filling of trenches 21-22 by means of successive metallic and insulating materials 7, 8, 9, and 11, followed by a chem.-mech. polishing.

FIG. 5 illustrates steps implemented according to a method according to the present invention after the CMP polishing, the result of which is illustrated in FIG. 3. For clarity, only the differences between FIG. 3 and FIG. 5 are described hereafter.

After implementation of the CMP polishing, a specific etch step is implemented. This etch is capable of etching the sole conductive sub-layers 72 and 91 located on either side of the interelectrode insulator 8, left intact. The etch is preferably capable of leaving intact the sub-layers of same nature 92 and 71 of the first and second electrodes as well as interlevel and interelectrode insulators 5 and 8. Openings 17 and 19 respectively delimited by the sub-layer 71 and 92 left in place are thus formed on either side of insulator 8.

Then, as illustrated in FIG. 6, interlevel layer 15 is deposited. On deposition of layer 15, first sub-layer 151 deposits on either side of interelectrode insulator 8 and partially or totally fills openings 17 and 19.

The method carries on with any appropriate step of forming of the capacitors and of the interconnects of the underlying semiconductor circuits, not shown.

Thus, for a total height of interlevel layer 5 of approximately 650 nm, after having removed a height h from 40 to 100 nm of sub-layers 91 and 72, for a 5-V voltage applied between electrodes 3-7 and 11-9, leakage current densities lower than 10-8 A/cm2 can be observed. Such a leakage level is negligible and is lower by a at least a factor 100 with respect to known devices. Further, when the dimensions, in particular width w (FIG. 2) of trenches 21 and width s of the space separating two neighboring trenches, are decreased, this value remains substantially steady. Further, the distribution of the breakdown voltages of the obtained capacitors is narrowed with respect to that of known capacitors. Thus, the breakdown voltage variation range extends from 15 to 25 V. Further, the breakdown voltage is substantially homogeneous for a same height h of removal of sub-layers 72 and 91.

Such improvements of the electric performances with respect to those of known capacitors are further obtained with no notable complication of the manufacturing process. In particular, they are obtained without use of an additional mask. Such improvements are indeed obtained by only implementing simultaneous etch steps of layers 72 and 91. Such steps are self-aligned. Further, cavities 17 and 19 are partially or totally filled without implementing specific steps but by using the deposition of the superposed interlevel insulator 15.

As an example, the partial removal of titanium nitride sub-layers 72 and 91 is performed by chemical etching by means of a water, hydrogen peroxide (H2O2), and ammonia (ammonium hydroxide NH4OH) solution. Such an etching may be followed by a cleaning with hydrofluoric acid (HF). It should be noted that during this last cleaning, the interelectrode insulator 8 generally formed of silicon nitride can be etched. However, such an etching is light, only occurs in cavities 17 and 19 and is compensated for by the deposition of insulating sub-layer 151. Such an etching thus has no effect upon the performance of the obtained capacitor.

Of course, the present invention is likely to have various alterations, modifications, and improvements which will readily occur to those skilled in the art. In particular, only those steps necessary to the understanding of the present invention have been described. Thus, it will be within the abilities of those skilled in the art to form, if necessary, contacts with electrodes 3-7 and/or 9-11 and possibly form these contacts simultaneously to the forming of the capacitors or other interconnects.

Further, the implementation of the present invention is not limited to a given capacitor shape. Thus, the electrodes may be formed simultaneously, each of them being comb-shaped and the teeth of such combs being interdigited. For this purpose, separate trenches having the desired shape may for example be formed, before deposition of the electrode layers simultaneously in all the trenches, a CMP polishing may be implemented to individualize each electrode in a respective trench and the removal according to the present invention may be performed before depositing an insulating layer intended to fill the cavities formed by the removal.

Moreover, the removal according to the present invention is not limited to the sole sub-layers 72 and 91, but may also be implemented for sub-layers 71 and 92.

Besides, it will be within the abilities of those skilled in the art to bring any material and thickness modification necessary in a given technological process. Thus, the interelectrode insulating material of layer 8 will be adapted to the etch selectivity constraints of sub-layers 72 and 91 and to the desired electric performance. Similarly, it will be within the abilities of those skilled in the art to adapt the used conductive materials to the used technological process, in particular the material of sub-layers 72 and 91 to the previously-described etch selectivity constraints.

It should be noted by those skilled in the art that the nature of the semiconductor circuits in the metallization levels of which the capacitors are formed has not been described in detail and that it may be of any type.

Further, although the present invention has been described in the context of a silicon process, it applies to any semiconductor circuit manufacturing process.

Such alterations, modifications, and improvements are intended to be part of this disclosure, and are intended to be within the spirit and the scope of the present invention. Accordingly, the foregoing description is by way of example only and is not intended to be limiting. The present invention is limited only as defined in the following claims and the equivalents thereto.

Claims

1. A method for forming a MIM-type capacitor by filling of trenches by conformal depositions of insulating materials and of conductive materials, two successive electrodes of the capacitor comprising on either side of a thin vertical insulating layer at least one conductive layer of same nature, comprising the step of lowering the level of said conductive layers with respect to the level of the insulating layer separating them.

2. The method of claim 1, wherein the lowering is performed after complete filling of a cavity intended to receive the capacitor with the materials intended to form the electrodes with the possible exception of a metal plate intended to form a contact portion of an electrode.

3. The method of claim 1, wherein the lowering is followed by a conformal deposition of a layer of an insulating material.

4. The method of claim 3, wherein the insulating material is of same nature as the thin vertical insulating layer separating the vertical extensions of the electrodes.

5. A MIM-type capacitor having two electrodes comprising on either side of a thin vertical insulating layer at least one conductive layer of same nature, wherein the level of the conductive layers is lowered with respect to the level of the insulating layer separating them.

6. The capacitor of claim 5, wherein the level difference between the conductive layers and the insulating layer is totally or partially compensated for by an insulating material.

7. The capacitor of claim 6, wherein the insulating material is of same nature as the insulating layer.

8. The method of claim 1, comprising additionally the step of lowering the level of the insulating layer with respect to a neighboring thick interlevel insulator.

9. The capacitor of claim 5, wherein the level of the insulating layer is lowered with respect to the level of a surrounding interlevel insulating thick layer.