Number | Date | Country | Kind |
---|---|---|---|
63-194572 | Aug 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4484209 | Uchida | Nov 1984 | |
4523216 | Shiotari | Jun 1985 | |
4617193 | Wu | Oct 1986 | |
4722910 | Yasaitis | Feb 1988 | |
4737831 | Iwai | Apr 1988 | |
4772567 | Hirao | Sep 1988 | |
4853894 | Yamanaka et al. | Aug 1989 |
Entry |
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IBM Technical Disclosure Bulletin, vol. 20, No. 1, Jun. 1977, J. A. Bialko et al., "Reducing Interlevel Shorts in Sputtered Insulators". |
IBM Technical Disclosure Bulletin, vol. 25, No. 9, Feb. 1983, C. G. Jambotkar, "Method to Realize Submicrometer-Wide Images". |