MOCVD of WNx thin films using imido precursors

Abstract

Single imido tungsten imido precursors are described for the deposition of tungsten nitride on a substrate by processes such as metal organic chemical vapor deposition. The precursors may be employed to form diffusion barrier layers on microelectronic devices. A method for forming tungsten nitride layers includes the steps of providing a tungsten imido species having the formula LyW(NR)Xn, where R is a carbon containing group, y is an integer between 0 and 5, n is an integer between 0 and 4 and Ly and Xn are selected from the group of non-imido ligands. The single imido tungsten imido species is flowed to a surface of a substrate where the single imido tungsten imido species decomposes to form a tungsten nitride layer.

Description

FIELD OF THE INVENTION

[0003] The invention relates generally to the field of semiconductors. More particularly, the invention relates to the use of single-source tungsten imido precursors in the formation of WNx based films on a substrate, and includes certain tungsten imido complexes and compounds (hereafter “TlC”) as precursors.

BACKGROUND OF THE INVENTION

[0004] In the manufacture of integrated circuits, barrier layers are often needed to prevent the diffusion of one material to an adjacent material. For instance, when aluminum contacts silicon surfaces, spiking can occur, and when aluminum comes into direct contact with tungsten, a highly resistive alloy can be formed.

[0005] Copper is of great interest for use in metallization of VLSl microelectronic devices and has begun replacing aluminum due to copper's lower resistivity, higher resistance to electromigration, low contact resistance to most materials, and ability to enhance device performance via reduction of RC time delays thereby producing faster microelectronic devices. Moreover, copper may allow a reduced number of metal levels to be necessary because it can generally be packed more tightly than aluminum.

[0006] Copper CVD processes which are suitable for large-scale manufacturing and the conformal filling of high aspect ratio inter-level vias in high density integrated circuits are regarded by many as extremely valuable to the electronics and optoelectronics industry, and are therefore being investigated in the art. Unfortunately Cu, like Al, is quite mobile in silicon. Upon direct contact with Si, Cu diffuses and reacts rapidly to form compounds such as Cu3Si. Formation of compounds such as Cu3Si can destroy shallow junctions and contacts during subsequent thermal annealing steps and can result in degraded device performance, or even device failure.

[0007] When copper is used as a conductive layer in a device having multi-layer metallization, long-term reliability can only occur if there is little to no interdiffusion between the copper and layers surrounding the copper layer. Copper interdiffusion can result in an increase in contact resistance, change the barrier height, result in leaky PN junctions, cause embrittlement of the contact layer, and destroy electrical connections to the chip. With the increased use of copper as an interconnect material to form high speed integrated circuits, an effective barrier against copper diffusion is required. Diffusion barriers are layers interposed between a material to be isolated (e.g. Cu) and the underlying circuit, and are commonly used in an attempt to prevent undesirable reactions involving the material to be isolated with one or more layers of the underlying circuit.

[0008] Research has indicated that nitride barriers are better candidates for reliable diffusion barriers from the interdiffusion standpoint and provide lower electrical resistivities than their pure metal counterparts. Titanium nitride (TiN) has been used as a diffusion barrier for aluminum, but its performance suffers when copper metallization is employed due to excessive copper interdiffusion therethrough. Tantalum nitride (TaN) has generally been the barrier material of choice to date for copper metallization. However, tantalum nitride requires a two-step chemical mechanical polishing (CMP) procedure that results in nearly a one order of magnitude increase in dishing of the copper surface and often results in scratching of the inter-layer dielectric (ILD). Dishing of the copper is caused by a substantially higher CMP etch rate of copper compared to TaN.

[0009] Unlike TaN, tungsten nitride (WNx) may be etched using a single CMP process and results in reduced copper dishing relative to copper dishing using TaN as a barrier material because the CMP etch rates of copper and WNx are essentially equal. Tungsten nitride is also known to be an effective diffusion barrier against copper penetration at temperatures of up to approximately 750° C. As used herein, WNx is understood to include the numerous tungsten nitride stoichiometries, such as WN, WN2, and W2N. However, there are many other WNx stoichiometries. It is known that WN has a hexagonal crystal structure, WN2 is rhombohedral, and W2N has a face centered cubic structure. Each of the three stoichiometries listed above are thermodynamically stable, but W2N has the lowest resistivity of the three (50 μΩ-cm bulk resistivity).

[0010] One application for tungsten nitride films is the formation of diffusion barriers between the tungsten of tungsten plugs and adjoining metallization layers on the surface of the wafer, such as copper. Such a diffusion barrier is shown in FIG. 1.

[0011] FIG. 1 shows a tungsten plug 14 extending down to a silicon substrate 10 with an overlying copper layer 16 and an intervening diffusion barrier 12. The tungsten plug structure is one example of an application where tungsten nitride has been found as a suitable replacement for titanium nitride, as it is easily formed over the tungsten plug 14.

[0012] As feature sizes in integrated circuits have decreased to below 0.25 μm, the necessity for thermally stable, high conformity interface diffusion barriers and gate electrodes has become more important. Deposition of conformal and continuous barrier layers of tungsten nitride at relatively low temperatures on high-aspect-ratio structures is not possible with current processes. The two common methods for deposition of WNx include:

[0013] 1) physical deposition techniques such as sputtering; and

[0014] 2) chemical vapor deposition (CVD) from the reaction of tungsten halides and ammonia.

[0015] Each above method has associated difficulties. Conventional physical vapor deposition technology involves reactive sputtering from a tungsten target in an atmosphere of gaseous nitrogen with an argon carrier gas. Energized particle techniques, particularly sputtering, generally result in poor step coverage primarily due to shadowing. Applied to small features with high aspect ratios, poor step coverage of the barrier layer may result in areas of excessively thin or missing barrier material allowing copper diffusion into the underlying substrate. Moreover, sputter deposited layers are prone to generate high tensile stress to adjacent layers which may cause defects which may result in degraded device performance and yield loss in integrated circuits.

[0016] Current chemical vapor deposition processes for forming WNx generally involve the reduction of tungsten halides such as WF6 and WCl6 by NH3. Although some success has been achieved with halide reduction schemes, at least three major obstacles exist for their use in future generations of integrated circuits. First, the high deposition temperatures (>700° C.) that are required to dissociate tungsten halide molecules are incompatible with most future low dielectric constant materials and some metallization layers. Second, the reaction byproducts (such as HF and HCl) are extremely corrosive and can rapidly etch other exposed device layers (such as Si and SiO2) as well as decrease the operating lifetime of processing equipment. Finally, adduct formation, which can occur when using WF6 and NH3, must be avoided, especially as feature sizes shrink below 0.18 μm. Adduct formation commonly results from gas phase nucleation, as opposed to the desired chemical reaction occurring at the wafer surface.

[0017] It is apparent from the above discussion that a need exists for a new process for forming high quality tungsten nitride films which overcomes the problems existing with conventional chemical vapor deposition and physical vapor deposition processes, and which can be used to form a suitable barrier against copper diffusion. The process should be operable at a sufficiently low temperature to avoid copper penetration, limit or avoid generation of corrosive reaction by-products and deposit highly conformal layers capable of filling high aspect ratio structures (e.g. vias).

[0018] It would be preferable to utilize a single-source metal organic precursor molecule for the MOCVD (or other suitable deposition technique) of tungsten nitride thin films. The use of suitable metal organics would allow deposition at lower temperatures to ensure compatibility with future low dielectric constant and certain metallization films. The single-source nature of the precursors would allow a simplified reactor delivery system and avoid the possibility of adduct formation that has been reported when WF6 and NH3 are used to form WNx.

[0019] Chiu et al. has reported the use of a single-source metalorganic precursor to deposit WN films. [Chiu H. T., S. H. Chuang, J. Mater. Res., 8(6), 1353, (1993]. The precursor used by Chiu was (tBuN)2W(NHtBu)2 (bis(tertbutylimido)bis(tertbutylamido)tungsten), which was delivered via a solid source delivery system. Chiu's precursor can be classified as a tungsten imido complex having two (2) imido ligands (=NR), the imido groups being covalently bonded to a metal (W). An imido group (=NR) can be defined as a nitrogen atom which is covalently multiply bonded to a metal (e.g W), with the nitrogen atom also bonded to only one other group (e.g. H, alkyl, aryl, or silyl group). As used herein, the term alkyl includes cyclic alkyls.

[0020] An imido group may be contrasted with an amido group, which has the formula NR2. In addition to the covalent bond with the metal, amido groups bear two (2) other substituents (e.g. H, alkyl, aryl, or silyl group). Thus, although Chiu discloses a tungsten imido complex, Chiu's tungsten imido complex has two (2) imido ligands, as opposed to tungsten imido complexes where tungsten has only a single imido ligand.

[0021] Chiu's depositions were thermal decomposition reactions over a temperature range of 450-650° C., but with very slow growth rates of 20-100 Å/min. The resulting films were mainly polycrystalline W2N with lattice parameters of 4.14-4.18 Å. The films had relatively high resistivities of 620-7000 μΩ-cm, with marginal step coverage (50-85%) for a 0.40 μm device feature.

[0022] The metal organic source reagent should be storage-stable, capable of easy transport to the reactor, possess appropriate decomposition characteristics, and substantially avoid gas phase nucleation. Such a process should preferably result in a highly conformal layer, the layer formed capable of conformal coverage in high aspect ratio features. Importantly, the layer formed should have very low resistivity to avoid impairing the speed of devices incorporating the layer. Deposition rates should also be high to permit efficient production and reduced costs. The increased demand for WNx reagents possessing these properties for use to form improved barriers in metallization schemes, such as copper, necessitates the exploration of novel metal-organic precursors and apparatus and methods for their use.

SUMMARY OF THE INVENTION

[0023] A source reagent composition for the formation of tungsten nitride films includes at least one single imido tungsten imido species selected from the group consisting of:

[0024] i) Tungsten imido complexes of the formula: 1

[0025] R is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 and nitrogen-containing groups of the type NR4R5, where R1-R5 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl. X is selected from the group consisting of F, Cl, Br, I and N3. L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine and alkylamine (NR11R12R13), where R11, R12, R13 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR21R22R23, R21, R22and R23 being selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl.

[0026] ii) tungsten imido complexes of the formula:

XyL5-yW(NR) or XyL4-yW(NR)

[0027] where R is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 and nitrogen-containing groups of the type NR4R5. R1-R5 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl. X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, where R11 and R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, R13-R17 being selected from H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl.

[0028] y is an integer between 2 and 4. L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine, alkylamine (NR21R22R23), where R21, R22, R23 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR24R25R26, R24, R25 and R26 being selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl.

[0029] iii) tungsten imido complexes of the formula: 2

[0030] where R, R1, R2 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR3R4R5 and nitrogen-containing groups of the type NR6R7, R3-R7 being selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl.

[0031] X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, R11 and R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing group of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, R13-R17 being selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl.

[0032] Q is selected from the group consisting of (CH2)2, (CH2)3, and CH═CH. L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine and alkylamine (NR21R22R23), where R21, R22, R23 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing group of the type SiR24R25R26 R24, R25, R26 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl. L may also be an empty coordination site with no ligand.

[0033] iv) tungsten imido complexes of the formula: 3

[0034] R, R1-R4 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR5R6R7 and nitrogen-containing groups of the type NR8R9R5-R9 being selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl.

[0035] Q is selected from the group consisting of (CH2)2, (CH2)3 and CH═CH. L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine and alkylamine (NR11R12R13), R11, R12, R13 being selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR14R15R16 where R14, R15, R16 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl. L may also be an empty coordination site with no ligand.

[0036] v) tungsten imido complexes of the formula: 4

[0037] R, R1-R3 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR5R6R7 and nitrogen-containing groups of the type NR8R9, where R5-R9 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl.

[0038] X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, where R11 and R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, R13-R17 being selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl. Q is selected from the group consisting of (CH2)2 and (CH2)3.

[0039] In a preferred embodiment, the single imido tungsten imido species is at least one selected from the groups of formulas consisting of XyL5-yW(NR) and XyL4-yW(NR) as specified under (ii), tungsten imido complexes having the formula XyL5-yW(NR) being more preferred. For the more preferred complexes, y is preferably =4.

[0040] L can be alkylnitrile. R can be selected from the group of C1-C8 alkyls, aryls and silyls, R being more preferably being selected from the group consisting of isopropyl, t-butyl and cyclohexyl. When R is selected from the group consisting of isopropyl, t-butyl and cyclohexyl, L is preferably an alkylnitrile, more preferably acetonitrile, while X preferably includes Cl.

[0041] A source reagent system for the formation of tungsten nitride films includes at least single imido one tungsten imido species having the formula LyW(NR)Xn. R is an alkyl, aryl group or silyl group, y is an integer between 0 and 5, n is an integer between 0 and 4, Ly and Xn being selected from the group of non-imido ligands. The system includes a solvent to dissolve the single imido tungsten imido species. The solvent can be selected from the group consisting of benzonitrile, N-methylpyrrolidinone, dimethyl formamide (DMF), acetonitrile and dimethylacetamide (DMA), more preferably being benzonitrile.

[0042] A chemical vapor deposition system having a reactant delivery system for producing and delivering a precursor aerosol includes a reactor, structure for forming a precursor aerosol from a fluid including precursor molecules, and a precursor aerosol delivery conduit in fluid connection with an output of the structure for forming a precursor aerosol. The delivery conduit includes concentric tubes, where the precursor aerosol flows in an inner tube. A structure for controlling the temperature of the volume between the outside of the inner concentric tube and the inside of the outer concentric tube is provided. The reactor is fluidly connected to an output of the inner tube for receiving and decomposing the precursor aerosol.

[0043] The structure for forming a precursor aerosol can include a chamber having an input and an output, the chamber including a vibrating plate and structure for introduction of fluid to the chamber input, to form the precursor aerosol. The structure for controlling the temperature can include resistive wire or heat tape.

[0044] The system can include a perforated plate having a plurality of channels interposed between the inner tube and the reactor, the perforated plate for improving delivery of the aerosol precursor to the reactor. The diameter of the inner concentric tube increases as the inner concentric tube approaches the perforated plate.

[0045] A method for forming tungsten nitride layers on substrates includes the steps of providing at least one single imido tungsten imido species having the formula LyW(NR)Xn, where R is a carbon containing group, y is an integer between 0 and 5, n is an integer between 0 and 4 and Ly and Xn are selected from the group of non-imido ligands. The single imido tungsten imido species is flowed to a surface of a substrate. The single imido tungsten imido species decomposes to form the tungsten nitride layer. A tungsten nitride barrier layer can be formed by this W method. The method can include the step of heating the substrate surface to a temperature of at least 300° C. and/or the step of vaporizing the single imido tungsten imido species to form a vapor, the vaporizing step before the flowing step. The flowing step can include flowing of a carrier gas, the carrier gas for aiding transport of the tungsten imido species to the substrate surface. Preferably, the carrier gas includes hydrogen (H2).

[0046] The method can include the step of dissolving the single tungsten imido species with a solvent. The solvent is preferably selected from the group consisting of benzonitrile, N-methylpyrrolidinone, dimethyl formamide (DMF), acetonitrile and dimethylacetamide (DMA).

[0047] A source reagent composition system for the formation of tungsten nitride films includes at least single imido one tungsten imido species having the formula LyW(NR)Xn, where R is a carbon containing group, y is an integer between 0 and 5, n is an integer between 0 and 4, Ly and Xn being selected from the group of non-imido ligands. R can be an alkyl, aryl or silyl group. L can be selected from the group consisting of C1-C8 alkylnitriles and arylnitriles.

BRIEF DESCRIPTION OF THE DRAWINGS

[0048] This invention may be better understood by referring to the following description taken in conjunction with the accompanying drawings, in which:

[0049] FIG. 1 is a cross section through a silicon device illustrating the use of a barrier material to isolate plug material.

[0050] FIG. 2 is a schematic illustration of a nebulizer system.

[0051] FIG. 3(a) is a schematic illustrating a double tube impinging jet aerosol reactant transfer conduit apparatus including a perforated plate.

[0052] FIG. 3(b) illustrates a side view of the perforated plate shown in FIG. 3(a).

[0053] FIGS. 4(a) and 4(b) illustrate an AES spectral pattern for a WNx layer deposited using CVD on a silicon substrate.

[0054] FIG. 5 illustrates an XRD pattern for WNx layer analyzed using AES in FIGS. 4(a) and 4(b).

[0055] FIG. 6(a) and 6(b) illustrate an AES spectral pattern for a WNx layer deposited using CVD on a silicon substrate.

[0056] FIG. 7 illustrates an XRD pattern for WNx layer analyzed using AES in FIGS. 6(a) and 6(b).

[0057] FIG. 8(a) and 8(b) illustrate an AES spectral pattern for a WNx layer deposited using CVD on a silicon substrate.

[0058] FIG. 9 illustrates an XRD pattern for WNx layer analyzed using AES in FIGS. 8(a) and 8(b).

[0059] FIG. 10(a) and 10(b) illustrate an AES spectral pattern for a WNx layer deposited using CVD on a silicon substrate.

[0060] FIG. 11 illustrates an XRD pattern for WNx layer analyzed using AES in FIGS. 10(a) and 10(b).

[0061] FIG. 12(a) and 12(b) illustrate an AES spectral pattern for a WNx layer deposited using CVD on a silicon substrate.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

[0062] Single imido tungsten imido complexes (TIC) are described which are particularly suitable for use in metal-organic chemical vapor deposition (MOCVD) to form barrier layers against the diffusion of metals such as Cu into underlying circuit structure. Single imido tungsten imido species are understood to represent tungsten molecules having only one occurrence of the structure (M═NR), where M is a metal (e.g. W), and ═ is a multiple bond to N. It is noted that W generally obeys the eighteen (18) electron rule, with W providing six (6) outer shell electrons of its own. Accordingly, in any instances where a general formula of a tungsten imido precursor does not appear to follow the eighteen (18) electron rule, it is to be understood that the single imido tungsten imido precursor generally derives additional electrons through donation of the lone pair on the N of the imido ligand to the W to satisfy its electron valence.

[0063] As used herein, L is used to represent ligands capable of donating two (2) electrons to W in the form of a coordinate bond with W. Thus, L provides two (2) electrons to the W valence. As used herein, X represents ligands which form covalent bonds with W. Thus, each X bond provides one shared electron to the W valence.

[0064] As used herein, the term “precursor delivery” when referred to metal organic chemical vapor deposition or other thin film or coating processes, refers to the fact that the precursor or source reagent composition for the material to be deposited on a substrate is vaporized from a liquid or solid form to produce a corresponding precursor vapor which then is transported to form the material film or coating on the substrate structure. If a liquid phase is vaporized to form the precursor vapor, the liquid phase may comprise a liquid-phase source reagent per se, or the source reagent may be dissolved in, or mixed with, a liquid to facilitate vaporization to place the source reagent in the vapor phase for the deposition operation.

[0065] As used herein, the term “perfluoroalkyl” is intended to be broadly construed in this application to include groups containing alkyl moieties which are partially or fully substituted with fluorine atoms, and thus perfluoroalkyl includes for example a trifluoroalkyl substituent whose alkyl moiety is C1-C8 alkyl, such as trifluoromethyl.

[0066] The WNx source reagents disclosed in this application include single imido tungsten imido complexes for the deposition of WNx. By varying the structure of these precursor molecules, precursors can be optimized which readily dissociate at a relatively low temperature (e.g. 400-650° C.) with minimal contamination (e.g. O and C) within the WNx layer formed. Low temperature dissociation ensures compatibility with a broader range of layers used in microelectronic and electro-optic circuit fabrication.

[0067] The presence of impurities in the WNx layer (e.g. O, N, C) may not always be undesirable. Incorporation of O, N and C have been reported to improve stability in contact structures, because these impurities tend to “stuff” or fill grain boundaries and inhibit diffusion of metals such as Cu though the WNx layer. Although these impurities can stabilize the WNx film, they may also act as undesirable electron scattering sites reducing carrier mobility, thus increasing the resistivity of the WNx film.

[0068] Tungsten imido complexes can be light sensitive, and accordingly may dissociate if exposed to significant light intensities. Accordingly, the single imido tungsten imido complex material should be shielded from light during storage and processing. In one compositional aspect, the invention relates to a precursor composition comprising at least one single imido tungsten imido species, according to the following formulas:

[0069] i) Tungsten imido complexes of the formula: 5

[0070] where R is H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 or nitrogen-containing groups of the type NR4R5. R1-R5 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0071] X is F, Cl, Br, I or N3.

[0072] L is C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether (such as tetrahydrofuran), heterocyclic aromatic amine (such as pyridine and pyrrole), heterocyclic aliphatic amine (such as piperidine and pyrrolidine) or alkylamine (NR11R12R13). R11, R12 and R13 are each selected from H, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR21R22R23. R21, R22 and R23 are each selected from H, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0073] ii) Tungsten imido complexes of the formula:

XyL5-yW(NR) or X4-yW(NR)

[0074] Where R is H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, cyclohexyl, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 or nitrogen-containing groups of the type NR4R5. R1-R5 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, cyclohexyl, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0075] X is F, Cl, Br, I, N3 or NR11R12. R11 and R12 are each selected from H. Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17. R13-R17 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl. y is 2, 3 or 4.

[0076] L is C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether (such as tetrahydrofuran), heterocyclic aromatic amine (such as pyridine, pyrrole), heterocyclic aliphatic amine (such as piperidine, pyrrolidine) or alkylamine (NR21R22R23). R21, R22 and R23 are each selected from H. C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR24R25R26. Each of R24, R25 and R26 are selected from H, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0077] A preferred single imido tungsten imido complex group has the formula XyL5-yW(NR), where y=4. A most preferred reagent sub-group from the preferred reagent group is when R is selected from the group consisting of isopropyl, t-butyl and cyclohexyl, and most preferably isopropyl, X1-4 being Cl, and NR being acetonitrile (NCCH3). The preferred solvent for above preferred single imido tungsten imido complex is benzonitrile.

[0078] iii) Tungsten imido complexes of the formula: 6

[0079] where R, R1 and R2 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, cyclohexyl, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR3R4R5 and nitrogen-containing groups of the type NR6R7. R3-R7 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl.

[0080] X is F, Cl, Br, I, N3 or NR11R12. R11 and R12 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17. R13-R17 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0081] Q is (CH2)2, (CH2)3 or CH═CH.

[0082] L is C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether (such as tetrahydrofuran), heterocyclic aromatic amine (such as pyridine, pyrrole), heterocyclic aliphatic amine (such as piperidine, pyrrolidine) or alkylamine (NR21R22R23). R21, R22 and R23 are each selected from H, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR24R25R26. R24, R25 and R26 are each selected from C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl. L may also be an empty coordination site with no ligand.

[0083] iv) Tungsten imido complexes of the formula: 7

[0084] where R, R1-R4 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, cyclohexyl, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR5R6R7 and nitrogen-containing groups of the type NR8R9. R5-R9 are H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl.

[0085] Q is (CH2)2, (CH2)3 or CH═CH.

[0086] L is C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether (such as tetrahydrofuran), heterocyclic aromatic amine (such as pyridine, pyrrole), heterocyclic aliphatic amine (such as piperidine, pyrrolidine) or alkylamine (NR11R12R13). R11, R12 and R13 are each selected from H, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR14R15R16. R14, R15 and R16 are each selected from H, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl. L may also be an empty coordination site with no ligand.

[0087] v) Tungsten imido complexes of the formula: 8

[0088] where R, R1-R3 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, cyclohexyl, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR5R6R7 and nitrogen-containing groups of the type NR8R9. R5-R9 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0089] X is F, Cl, Br, I, N3 or NR11R12 R11 and R12 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl), C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17. R13-R17 are each selected from H, Cl, C1-C8 alkyl (such as Me, Et, i-Pr, t-Bu, etc.), aryl (such as phenyl) and C1-C8 perfluoroalkyl.

[0090] Q is (CH2)2 or (CH2)3.

[0091] In another aspect of the invention, a method for forming a tungsten nitride layer on a substrate, such as silicon, from a single imido tungsten imido precursor reagent is disclosed. The method includes the steps of vaporizing the precursor to form a precursor vapor, contacting the precursor vapor with a substrate under deposition conditions, such as chemical vapor deposition (CVD), to deposit WNx on the substrate. The single imido tungsten imido precursor has the formula LyW(NR)Xn, wherein R is a carbon containing group, y is an integer between 0 and 5, n is an integer between 0 and 4 and Ly and Xn are selected from the group of non-imido ligands. The precursor decomposes under the deposition conditions to form a tungsten nitride layer.

[0092] It is generally necessary to provide a stream of gaseous precursor molecules to form WNx layers. If volatilization of the precursor is desired, any suitable method for volatilizing the precursors can be used with the precursors described in the invention.

[0093] For CVD of WN-based films or coatings on a substrate, the corresponding source reagent may be provided as a liquid or solid starting material, which can then be vaporized to form a precursor vapor for CVD. The vaporization may be carried out by injection of liquid precursor in fine jet, mist or droplet form into a hot zone at an appropriate temperature for vaporization of the source reagent liquid. Such injection may be carried out with a nebulization or atomization apparatus of conventional character, producing a dispersion of finely divided liquid particles, such as sub-micron to millimeter diameter scale particles. The dispersed liquid particles may be directed at a substrate at a sufficiently high temperature to decompose the source reagent and produce a coating of the WNx layer on the substrate.

[0094] Certain desirable reagents, such as some single imido tungsten precursors for WNx formation cannot be delivered in sufficient concentrations in gaseous form due to low vapor pressures. Some useful single imido tungsten reagents may also be solids. Solid source delivery systems may be used, but usually produce low gaseous output. Alternatively, a solid reagent may be dissolved in an appropriate solvent and nebulized.

[0095] A reactant delivery system for producing and delivering a precursor aerosol, can include a structure for forming a precursor aerosol from a fluid including precursor molecules, and a precursor aerosol delivery conduit in fluid connection with an output of the structure for forming a precursor aerosol. The delivery conduit can include concentric tubes comprising an inner and an outer tube, where the precursor aerosol flows in the inner tube. A structure for controlling the temperature of a volume between the outside of the inner concentric tube and the inside of an outer concentric tube can be provided.

[0096] A reactor (e.g. CVD) can be fluidly connected to the output of an inner tube to receive and react reagents such as single imido tungsten imido precursors which are delivered to the reactor by the reactant delivery system. Such a delivery system, and any reactor using such a delivery system, can use the precursor aerosol delivery system for a broad range of precursors, the range of applicable precursors not limited to the single imido tungsten imido precursors disclosed herein.

[0097] A precursor nebulizer system 200 is shown in FIG. 2. If the precursor is a solid at room temperature, such materials may first be dissolved in a liquid solvent to allow volatilization in a nebulizer or similar apparatus. Examples of helpful solvents include, but are not limited to, anhydrous benzonitrile, N-methylpyrrolidinone, dimethylformamide (DMF), acetonitrile and dimethylacetamide (DMA).

[0098] In a preferred embodiment, a nebulizer 210 can be used to convey solvent along with dissolved precursor in its monomer (neither dissociated nor dimerized) form to a reactor, such as a low pressure chemical vapor deposition (LPCVD) reactor. Liquid enters the nebulizer 210 through a suitable conduit 220. For example, plastic tubing can be used for this purpose. Liquid can travel inside the tubing 225, while carrier gas flows around the tubing through the injection line 220. When the liquid reaches the nebulizer, it contacts a quartz plate 230. The quartz plate 230 in the bottom of the nebulizer vibrates at high frequency. Based on the piezoelectric effect, an “aerosol” of solvent/precursor is formed. The droplets formed are then lifted upward and can be conveyed to the inlet of a flow conduit (not shown), such as an impinging jet, by a carrier gas. No co-reagents are generally required, although certain co-reagents can be expected to improve WNx film properties. For example, NH3 can be used to increase the nitrogen content of a WNx layer formed by deposition methods such as chemical vapor deposition (CVD). Hydrogen (H2) can be used to lower the impurity concentration in the WNx layer.

[0099] A double tube impinging jet arrangement 300 for delivering aerosol precursors following volatilization is shown in FIG. 3(a). The primary function of the double tube impinging jet 300 is to maintain the precursor in aerosol form and avoid condensation of the precursor and also avoid separation of the solvent from the precursor and dissociation of the precursor. Thus, the length of the impinging jet should be maintained at a temperature high enough to avoid condensing the precursor, but low enough to avoid separating the solvent from the precursor and dissociating the precursor.

[0100] The precursor vapor flows through the inner tube 310, while the gap between the inner 310 and outer tube 320 may be suitably heated to maintain the desired temperature by use of resistive wire or heating tape 340, for example. In a preferred embodiment inner tube 310 has a 0.5 inch diameter, which outer tube 320 has a 1.25 inch diameter. The tube 310 guides the precursor past cool regions in its flow path, such as water cooled flanges of a CVD process tube. The outlet of the impinging jet can discharge directly into a reactor, or the distance between the impinging jet and the reactor can be varied for optimization.

[0101] Near the bottom of the jet 300, the inner tube 310 is preferably flared out to the diameter of the outer tube 320. A plate on the bottom of the jet 330 can be provided a plurality of flow channels 335, as shown in FIG. 3(a). The central ring has holes directed outward, while the outer ring has holes directed straight down. FIG. 3(b) shows a side view of the perforated plate 330. The flared tube design makes the orifice opening at the end of the jet more gradual, and the hole orientation helps distribute the precursor to the reactor. The combination of the flared tube 310 and hole orientations in the perforated plate 330 functions to improve the uniformity of precursor delivery to the substrate and minimizes end effects, which can cause recirculatory convection patterns in the reactor. The double tube impinging jet 300 largely avoids the tendency for the precursor solution to condense as it passes through cool regions in its path into the reactor. Condensation of the precursor solution can result in precursor flowing down the walls of the reactor tube and results in minimal precursor transport to the substrates, and accordingly little or no WNx deposition.

[0102] A controlled delivery device, such as a syringe pump, can be used to deliver controlled amounts of liquid precursor reagents to a piezoelectric quartz plate located in the nebulizer chamber. A suitable power supply causes the piezoelectric quartz plate to oscillate at a given frequency. An ultrasonic nebulizer aerosol unit directs carrier gas flow adjacent to the quartz plate to propel the precursor aerosol out of the nebulizer chamber.

[0103] A typical precursor/solvent solution flow into the nebulizer is approximately 3-5 mL/hour. Power to the nebulizer can be varied with the use of a variable transformer, which can be used to vary the oscillation frequency. Typical oscillation frequencies used are from 1-4 MHZ.

[0104] Carrier gas is generally necessary to transport the precursor gas into a reactor. Accordingly, the carrier gas selected should preferably have high thermal conductivity (approximately 10 mW/m-K at 300° K. or greater) to ensure a more uniform and extended temperature profile inside the reactor above the substrates. Nitrogen can be used to increase the nitrogen content of the WNx films. However, the introduction of significant additional nitrogen within WNx films from the carrier flow is unlikely because N2 only dissociates appreciably at temperatures of at least approximately 1000° C., far above the preferred deposition temperature range of 450-650° C. Alternatively or in combination with N2, ammonia (NH3) and Hydrogen (H2) can also be used as a carrier gas. Hydrogen carrier gas may permit the use of a lower deposition temperature as compared to nitrogen carrier gas, and may also improve the surface smoothness of the WNx film formed.

[0105] There are many alternatives to the use of a nebulizer to volatize precursor molecules. For example, liquid precursor reagent may be dispensed from a suitable supply vessel onto a heat element, such as a screen, grid, or similar structure. The structure is heated to a sufficiently high temperature to cause the liquid to flash volatilize into the vapor phase, as for example in the manner described in U.S. Pat. No. 5,206,314 to Kirlin et al., and U.S. Pat. No. 5,711,816 to Kirlin et al., which are both hereby incorporated by reference into this application.

[0106] As an alternative to the use of the source reagent in the liquid form, the source reagent may be dissolved or mixed into a compatible solvent medium that does not preclude the efficacy of the resulting composition of MOCVD usage. For example, the source reagent may be utilized in a solvent composition of the type disclosed in the U.S. Pat. No. 5,820,664, to Gardiner et al., which is hereby incorporated by reference into this application. The resulting solution or suspension of the source reagent and solvent mixture may then be injected, dispersed, flash vaporized, or otherwise volatilized in any suitable manner.

[0107] Regardless of the manner of volatilizing the source reagent, the vapor thereof is flowed to contact the substrate on which the WNx-based material is to be deposited, at an appropriate temperature and pressure. Reactor temperature ranges from 300 to 800° C. A preferred reactor temperature range is from 450 to 650° C. Deposition pressure ranges from approximately 1 to 760 Torr. Deposition pressure depends on variables, such as but not limited to, reactant flow, carrier flow, pumping rate, reactor temperature, reaction rate, and reactant used.

[0108] It was found that for some single imido tungsten precursors deposition pressures generally below approximately 150 Torr resulted in precursor/solvent separation resulting from the solvent preferentially volatilizing at low pressures leaving behind precursor material in the nebulizer housing unit. Thus, reactor pressures should be set high enough to avoid the solvent preferentially volatizing and leaving behind precursor material prior to delivery into the reactor.

[0109] Other types of reactors other than RF heated (such as horizontal reactor heated by either RF induction, resistive heating, or lamps) may be used with the invention. PECVD may also be used with the invention provided the plasma generated does not adversely affect the dissociation/ regeneration of the WNx precursors used.

[0110] Typical deposition rates for the WNx deposition process are 1.0-25 μm/hr depending mainly on the tungsten imido precursor used and the flowrate of the precursor/solvent solution to the nebulizing unit. In the preferred embodiment, a high N2 carrier gas flow rate, typically 750 sccm, is used to improve transport of the aerosol precursor solution from the nebulizer (or equivalent structure for vaporizing) output to the reactor. Temperature can also be used to control the deposition rate.

[0111] The expected thin film resistivity ranges of the WNx thin films are from 15-5000 μ ohm-cm. The resistivity value depends on variables such as the degree of WNx crystallinity, the impurity incorporation (i.e. carbon and oxygen contamination which each raise the resistivity) and the thickness of the deposited WNx film. Film resistivity equals the sheet resistance of the film (in units of ohms/sq) multiplied by the film's thickness.

[0112] It is preferable to form a WNx layer that is amorphous, or nearly amorphous, to minimize diffusion pathways created by grain boundaries between individual crystals in a polycrystalline WNx layer. Lower deposition temperatures generally produce increasingly amorphous WNx layers. Selection of appropriate precursor and solvent combinations may result in significant carbon inclusion within the WNx film, carbon inclusion generally resulting in the formation of a more amorphous film.

[0113] Various methods can be used to analyze the WNx layer formed. For example, confirmation of both WN and W2N compounds can be obtained using X-ray diffraction (XRD), scanning electron microscopy (SEM), and Auger electron spectroscopy (AES). Scanning electron microscopy can also be used to assess surface morphology.

EXAMPLES

Example 1

[0114] Synthesis of Cl4(CH3CN)WN-i-Pr

[0115] Single imido tungsten imido complexes may be conveniently synthesized by a variety of methods. For example, a method for synthesizing a single imido tungsten imido precursor having the formula Cl4(CH3CN)WN-i-Pr is detailed below. An orange slurry of WOCl4(3.41 g, 10 mmol) and i-PrNCO (1.57 mL, 16 mmol) in 60 mL of heptane was heated with stirring at 100° C. for 2 days. After this time, a dark red solution and red crystals were obtained. The solvent was removed in vacuo and the solid was redissolved in 20 mL of acetonitrile. After stirring for 2 hr at room temperature, the brown solution was filtered and the solvent evaporated to yield 3.7 g of brown crystals. The yield was 88%. 1H NMR (CDCl3): δ 1.67 (d, 6H), 2.49 (s, 3H), 7.07 (m, 1H). 13C NMR (CDCl3): δ 3.35, 23.12, 68.52, 118.37. IR (CH2Cl2): 2319, 2282, 1462, 1452, 1386, 1366, 1310, 1271, 1154, 1108, 1075 cm−1. The above, or other tungsten imido precursors, may be synthesized by methods analogous to the one shown above, or through alternate synthesis techniques known in the art.

Example 2

[0116] A Precursor Vapor Delivery System

[0117] Examples of components used for implementing a precursor vapor delivery system capable of delivering tungsten imido vapors to remote location for further processing (e.g. CVD reactor) are as follows:

[0118] 1. Syringe pump: Cole-Parmer Instruments Company, 625 East Bunker Court, Vernon Hills, Ill. 60061, 74900 series; rate 0.2 mL/hr to 500 mL/hr.

[0119] 2. Power supply to nebulizer: Cetac Technologies, Inc., 5600 South 42nd Street Omaha, Nebr. 68107, ATX-100 series; Vibrates at frequency of 1.44 MHz, unless a variable transformer is used.

[0120] 3. Ultrasonic nebulizer aerosol unit: Cetac Technologies, Inc., U-5000AT series. Custom modified to include ¼″ port above quartz plate for sweeping carrier gas flow.

[0121] 4. Syringe: Hamilton Company, Reno, Nev. 89520-0012, 10 ml sample-lock syringe; Model 1010SL.

[0122] 5. Back pressure regulator, Upchurch Scientific Company; 619 West Oak Street Oak Harbor, Wash. 98277, Model U-605; 40 psi BPR cartridge in stainless steel assembly.

[0123] 6. The double tube impinging jet shown in FIG. 3(a) for delivering vapors output from the nebulizer to a reactor.

Example 3

[0124] WNx was formed in a MOCVD reactor using a Cl4(CH3CN)WN-i-Pr precursor formed by the synthesis method of Example 1, and the tungsten imido precursor vapor delivery system of Example 2. The above tungsten imido complex having the Cl4(CH3CN)WN-i-Pr can be classified into the general formula XyL5-yW(NR), where y=4, X1-4=Cl, R=isopropyl and L=acetonitrile (CH3CN). The above TIC was dissolved in a benzonitrile solvent. The syringe/nebulizer delivery system was used to carry the tungsten complex into a MOCVD reactor at a temperature of 575-600° C. for 150 minutes. Unpatterned silicon substrates were used. The deposition pressure was approximately 350 torr. The WNx layer formed had a measured thickness of 14 μm, representing a growth rate of approximately 940 Å/min. The bulk resistivity was measured at 164 μΩ-cm.

[0125] A semi-quantitative elemental analysis was obtained using Auger electron spectroscopy (AES). Due to the shallow penetration depth of this technique, only the first few film mono-layers were probed. The composition of the WNx surface is shown in FIG. 4(a), while composition of a WNx sub-surface layer reached by sputtering for approximately 0.5 minutes is shown in FIG. 4(b). The results demonstrate a tungsten rich film with significant carbon inclusion. Carbon content in the deposited WNx film may not be a problem for barrier performance, as it can improve barrier integrity, provided the carbon does not raise the WNx resistivity to a level which will significantly degrade circuit performance, based on the specific circuit application.

[0126] Auger plots shown in FIGS. 4(a) and 4(b) demonstrate the deposited WNx layer had approximately 40-45% W and approximately 15% N. Unless otherwise noted, % of elements reported by Auger are atomic %. The deposited layer also includes approximately 5-10% O and 30-35% C. Furthermore, it should be noted that other researchers have observed the preferential removal of nitrogen atoms and incorporation of carbon impurities by the incident Auger sputter ion beam. Therefore, it is possible that the actual nitrogen and carbon elemental compositions are higher and lower, respectively, than those reported by the AES results shown in FIGS. 4(a) and 4(b).

[0127] FIG. 5 shows an XRD pattern for the WNx sample formed by the method and conditions described in example 3. FIG. 5 indicates the presence of polycrystalline WNx in the film, the WNx layer having no discernable preferred crystalline orientation.

Example 4

[0128] WNx was formed in a MOCVD reactor using a single imido tungsten imido complex of the formula Cl4(CH3CN)WN-t-butyl. This precursor has the general formula XyL5-yW(NR), where y=4, X-1-4=Cl, R=t-butyl and L=acetonitrile. The precursor was dissolved in a benzonitrile solvent. A syringe/nebulizer delivery system was used to carry the tungsten complex into a MOCVD reactor at a temperature of 700° C. for 150 minutes. Unpatterned silicon substrates were used. The deposition pressure was approximately 760 torr. The WNx layer formed had a thickness of 50 μm, representing a growth rate of approximately 3500 Å/min. The bulk resistivity was measured at 1870 μΩ-cm.

[0129] AES plots of the composition of the resulting WNx layer are shown in FIGS. 6(a) and 6(b). FIG. 6(a) shows the composition at the surface, while FIG. 6(b) shows the WNx composition at the sub-surface layer reached by sputtering for approximately 0.5 minutes. As can be seen from FIGS. 6(a) and 6(b), the WNx layer had approximately 20-35% W and approximately 10-15% N. The deposited layer also included approximately 5-15% O and 45-52% C.

[0130] FIG. 7 shows the WNx layer formed was polycrystalline, having no discernable preferred crystalline orientation. The presence of a large silicon (111) peak is not unexpected or undesirable, since for diffusion barrier purposes the barrier layer should be functional with 50-200 Å approximate film thickness. Given the greater penetration depth of x-rays compared to electrons, even complete surface coverage would result in detection of the underlying silicon for relatively thin WNx films.

Example 5

[0131] WNx was formed in a MOCVD reactor using a single imido tungsten imido complex Cl4(CH3CN)WN-cyclohexyl. This precursor has the general formula XyL5-yW(NR), where y=4,X1-4=Cl, R=cyclohexyl and L=acetonitrile. The precursor was dissolved in a benzonitrile solvent. A syringe/nebulizer delivery system was used to carry the tungsten complex into a MOCVD reactor at a temperature of 575° C. for 150 minutes. Unpatterned silicon substrates were used. The deposition pressure was approximately 350 torr. The WNx layer formed had a thickness of 13.5 μm, representing a growth rate of approximately 900 Å/min. The bulk resistivity was measured at 2016 μΩ-cm.

[0132] AES plots of the composition of the resulting WNx layer are shown in FIGS. 8(a) and 8(b). FIG. 8(a) shows the composition at the surface, while FIG. 8(b) shows the WNx composition at the sub-surface layer reached by sputtering for approximately 1.0 minute. As can be seen from FIGS. 8(a) and 8(b), the WNx layer had approximately 16% W, 8% N and 21% C, 54% O at the surface, while the composition of the WNx layer reached after a 1.0 minute sputter was 49% W, 18% N and 15% C and 17% O.

[0133] FIG. 9 shows the WNx layer formed was polycrystalline, having no discernable preferred crystalline orientation.

Example 6

[0134] WNx was formed in a MOCVD reactor using a single imido tungsten imido complex of the formula XyL5-yW(NR), where y=4, X1-4=Cl, R=isopropyl and L=acetonitrile (same single imido tungsten imido complex as in Example 1). The precursor was dissolved in a N-methylpyrrolidinone solvent. A syringe/nebulizer delivery system was used to carry the tungsten complex into a MOCVD reactor at a temperature of 550° C. for 150 minutes. Unpatterned silicon substrates were used. The deposition pressure was approximately 350 torr. The WNx layer formed had a thickness of 3 μm, representing a growth rate of approximately 203 Å/min. The bulk resistivity was not measured.

[0135] AES plots of the composition of the resulting WNx layer are shown in FIGS. 10(a) and 10(b). FIG. 10(a) shows the composition at the surface, while FIG. 10(b) shows the WNx composition at the sub-surface layer reached by sputtering for approximately 1.0 minute. As can be seen from FIGS. 10(a) and 10(b), the WNx layer had approximately 5% W, 3% N and 65% C, 17% O and Fe 9% at the surface, while the composition of the WNx layer reached after a 1.0 minute sputter was 14% W, 2% N, 60% C and 7% O. The Fe surface signal is believed to be derived from Fe incorporated in the film by reactor erosion during deposition.

[0136] FIG. 11 shows that the WNx layer formed was polycrystalline, having no discernable preferred crystalline orientation. Example 7

[0137] WNx was formed in a MOCVD reactor using a single imido tungsten imido complex of the formula l2(CO)2(C5H5N)W≡NPh. A solid source delivery system was used to carry the tungsten complex into a MOCVD reactor at a temperature of 675° C. for 150 minutes. Unpatterned silicon substrates were used. The deposition pressure was approximately 760 torr. The WNx layer thickness and bulk resistivity were not measured.

[0138] AES plots of the composition of the resulting WNx layer are shown in FIGS. 12(a) and 12(b). FIG. 12(a) shows the composition at the surface, while FIG. 12(b) shows the WNx composition at the sub-surface layer reached by sputtering for approximately 0.5 minutes. No concentration data was available from the surface measurements shown in FIG. 12(a). As can be seen from FIG. 12(b), only a modest amount of WNx was formed, the WNx layer having approximately 7% W, 2% N, 6% C, 5% O and 80% Si.

Example 8

[0139] Single imido tungsten imido precursors below, shown with relevant process conditions included, showed little or no detectable WNx layer growth. 9

[0140] For the precursor above: Solid source delivery system;

[0141] Reaction temperature: 650-700° C. 10

[0142] For the precursor above: Solid source delivery system; Reaction temperature: 700° C. 11

[0143] For the precursor above: benzonitrile solvent; Reaction temperature: 1000° C. 12

[0144] Precursor dissolved in benzonitrile and delivered to reactor by the nebulizer. The above precursor converts to a single imido species in solution in the presence of benzonitrile. 13

[0145] The above precursor dissolved in benzonitrile and delivered to reactor by the nebulizer.

[0146] Although the WNx layer growth for the precursors and process conditions shown above failed to deposit appreciable quantities of WNx, modification of processing conditions, such as, but not limited to solvent selection, deposition temperature, carrier gas selection and deposition pressure may result in the formation of significant WNx layer growth for some, or all of the precursors listed in Example 8.

[0147] Although single imido tungsten nitride imido source reagents are described for the deposition of tungsten nitride material on a substrate by MOCVD, the reagents described are also suited for use in many other processes, such as, but not limited to plasma assisted metal organic chemical vapor deposition, ion implantation (e.g. in conjunction with an electrospray ion source), molecular beam epitaxy and rapid thermal processing.

[0148] While the preferred embodiments of the invention have been illustrated and described, it will be clear that the invention is not so limited. Numerous modifications, changes, variations, substitutions and equivalents will occur to those skilled in the art without departing from the spirit and scope of the present invention as described in the claims.

Claims

1. A source reagent composition for the formation of tungsten nitride films comprising at least one single imido tungsten imido species selected from the group consisting of: i) Tungsten imido complexes of the formula: 14wherein: R is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 and nitrogen-containing groups of the type NR4R5, wherein each of said R1-R5 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; X is selected from the group consisting of F, Cl, Br, I and N3; L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine and alkylamine (NR11R12R13), wherein each of R11, R12, R13 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR21R22R23; wherein each of said R21, R22 and R23 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; ii) tungsten imido complexes of the formula:XyL5-yW(NR) or XyL4-yW(NR)wherein R is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 and nitrogen-containing groups of the type NR4R5, wherein each of said R1-R5 is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, wherein each of R11 and R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, wherein each of said R13-R17 is selected from H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; y is an integer between 2 and 4, and L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine, alkylamine (NR21R22R23), wherein each of said R21, R22, R23 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR24R25R26; wherein each of each of R24, R25 and R26 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; iii) tungsten imido complexes of the formula: 15wherein: each of R, R1, R2 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR3R4R5 and nitrogen-containing groups of the type NR6R7, wherein each of said R3-R7 is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, wherein R11, R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing group of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, wherein each of R13-R17 is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl; Q is selected from the group consisting of (CH2)2, (CH2)3, and CH═CH; L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine and alkylamine (NR21R22R23), wherein each of said R21, R22, R23 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing group of the type SiR24R25R26 where each of R24, R25, R26 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl, and L may also be an empty coordination site with no ligand; iv) tungsten imido complexes of the formula: 16wherein: each of R, R1-R4 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR5R6R7 and nitrogen-containing groups of the type NR8R9, wherein each of said R5-R9 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl; wherein Q is selected from the group consisting of (CH2)2, (CH2)3 and CH═CH, and wherein L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine and alkylamine (NR11R12R13), wherein each of R11, R12, R13 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR14R15R16 wherein each of R14, R15, R16 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl, and L may also be an empty coordination site with no ligand; v) tungsten imido complexes of the formula: 17wherein: each of R, R1-R3 are selected from the group consisting of H, Cl, C1-C8alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR5R6R7 and nitrogen-containing groups of the type NR8R9, wherein each of said R5-R9 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, wherein each of said R11 and R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, wherein each of said R13-R17 is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, and Q is selected from the group consisting of (CH2)2 and (CH2)3.

2. The source reagent composition according to claim 1, wherein said at least one single imido tungsten imido species is at least one selected from the groups of formulas consisting of XyL5-yW(NR) and XyL4-yW(NR), wherein: R is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR1R2R3 and nitrogen-containing groups of the type NR4R5, wherein each of said R1-R5 is selected from the group consisting of H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; X is selected from the group consisting of F, Cl, Br, I, N3 and NR11R12, wherein each of R11 and R12 are selected from the group consisting of H, Cl, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, silicon-containing groups of the type SiR13R14R15 and nitrogen-containing groups of the type NR16R17, wherein each of said R13-R17 is selected from H, Cl, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl; y is an integer between 2 and 4, and L is selected from the group consisting of C1-C8 alkylnitrile, arylnitrile, ether, cyclic ether, heterocyclic aromatic amine, heterocyclic aliphatic amine, alkylamine (NR21R22R23), wherein each of said R21, R22, R23 are selected from the group consisting of H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl and silicon-containing groups of the type SiR24R25R26; wherein each of each of R24, R25 and R26 are selected from the group consisting of H, C1-C8 alkyl, aryl and C1-C8 perfluoroalkyl.

3. The source reagent composition according to claim 2, wherein said single imido tungsten imido species is tungsten imido complexes having the formula XyL5-yW(NR).

4. The source reagent composition according to claim 3, wherein y=4.

5. The source reagent composition according to claim 1, wherein L is an alkylnitrile.

6. The source reagent composition according to claim 1, wherein R is selected from the group of C1-C8 alkyls, aryls and silyls.

7. The source reagent composition according to claim 6, wherein R is selected from the group consisting of isopropyl, t-butyl and cyclohexyl.

8. The source reagent composition according to claim 7, wherein L is an alkylnitrile.

9. The source reagent composition according to claim 8, wherein L is acetonitrile.

10. The source reagent composition according to claim 9, wherein X includes Cl.

11. A source reagent system for the formation of tungsten nitride films comprising at least single imido one tungsten imido species having the formula LyW(NR)Xn, wherein R is an alkyl, aryl group or silyl group, y is an integer between 0 and 5, n is an integer between 0 and 4 and Ly and Xn are selected from the group of non-imido ligands, and a solvent to dissolve said single imido tungsten imido species.

12. The source reagent composition according to claim 11, wherein said solvent is at least one selected from the group consisting of benzonitrile, N-methylpyrrolidinone, dimethyl formamide (DMF), acetonitrile and dimethylacetamide (DMA).

13. The source reagent composition according to claim 12, wherein said solvent is benzonitrile.

14. A chemical vapor deposition system having a reactant delivery system for producing and delivering a precursor aerosol, comprising: a reactor; structure for forming a precursor aerosol from a fluid including precursor molecules; a precursor aerosol delivery conduit in fluid connection with an output of said structure for forming a precursor aerosol, said delivery conduit including concentric tubes, wherein said precursor aerosol flows in an inner one of said concentric tubes, and structure for controlling the temperature of a volume between the outside of said inner concentric tube and the inside of an outer one of said concentric tubes, said reactor fluidly connected to an output of said inner tube for receiving and decomposing said precursor aerosol.

15. The system of claim 14, wherein said structure for forming a precursor aerosol includes a chamber having an input and an output, said chamber including a vibrating plate and structure for introduction of said fluid to said chamber input, whereby said precursor aerosol is formed.

16. The system of claim 14, wherein said structure for controlling the temperature includes at least one selected from the group consisting of resistive wire and heat tape.

17. The system of claim 14, further comprising a perforated plate having a plurality of channels interposed between said inner concentric tube and said reactor, said perforated plate for improving delivery of said aerosol precursor to said reactor.

18. The system of claim 17, wherein a diameter of said inner concentric tube increases as said inner concentric tube approaches said perforated plate.

19. A method for forming tungsten nitride layers on substrates, comprising the steps of: providing at least one single imido tungsten imido species having the formula LyW(NR)Xn, wherein R is a carbon containing group, y is an integer between 0 and 5, n is an integer between 0 and 4 and Ly and Xn are selected from the group of non-imido ligands; flowing said single imido tungsten imido species to a surface of a substrate; and decomposing said single imido tungsten imido species to form a tungsten nitride layer.

20. The method of claim 19, further comprising the step of heating said substrate surface to a temperature of at least 300° C.

21. The method of claim 19, further comprising the step of vaporizing said single imido tungsten imido species to form a vapor, said vaporizing step before said flowing step.

22. The method of claim 19, further comprising the step of dissolving said single tungsten imido species with a solvent, wherein said solvent is at least one selected from the group consisting of benzonitrile, N-methylpyrrolidinone, dimethyl formamide (DMF), acetonitrile and dimethylacetamide (DMA).

23. The method of claim 19, wherein said flowing step includes flowing of a carrier gas, said carrier gas for aiding transport of said tungsten imido species to said substrate surface.

24. The method of claim 23, wherein said carrier gas includes hydrogen (H2).

25. A source reagent composition system for the formation of tungsten nitride films comprising: at least single imido one tungsten imido species having the formula LyW(NR)Xn, wherein: R is a carbon containing group; y is an integer between 0 and 5; n is an integer between 0 and 4, and Ly and Xn are selected from the group of non-imido ligands.

26. The composition of claim 25, where R is an alkyl, aryl or silyl group.

27. The composition of claim 26, wherein L is selected from the group consisting of C1-C8 alkylnitriles and arylnitriles.

28. A tungsten nitride barrier layer, formed by the method of claim 19.