Various applications may include a sealed chamber formed in a semiconductor structure. In one particular application, a chip-scale atomic dock may include a selected vapor at a low pressure in a sealed chamber. Miniaturization of such devices while maximizing the cross-sectional area of interaction with the molecules in the chamber is a challenge.
In one embodiment, a device includes a substrate that includes a resonant cavity. The resonant cavity includes a plurality of dipolar molecules that have an absorption frequency. The resonant cavity resonates at a frequency that is equal to the absorption frequency of the dipolar molecules. The device further includes a first port on the resonant cavity configured to receive a radio frequency (RF) signal.
A device includes a substrate that includes a resonant cavity. The resonant cavity includes a plurality of dipolar molecules that have an absorption frequency. The resonant cavity resonates at a frequency that is equal to the absorption frequency of the dipolar molecules. The device further includes a first port on the resonant cavity configured to receive a radio frequency (RF) signal. Further, the device includes a transceiver coupled to the first port to lock the frequency of the RF signal to the absorption frequency.
In yet another embodiment, a device includes a substrate that includes a resonant cavity. The resonant cavity includes a plurality of water molecules that have an absorption frequency. The resonant cavity resonates at a frequency that is equal to the absorption frequency of the water molecules. A first port is provided on the resonant cavity and is configured to receive a radio frequency (RF) signal. A signal generator is coupled to the first port and os configured to generate the RF signal. A power monitor is coupled to the first port to detect reflected power from the port.
For a detailed description of various examples, reference will now be made to the accompanying drawings in which:
The embodiments disclosed herein are directed to a spectroscopy cell which comprises a cavity formed in a substrate such as a semiconductor substrate. The cavity contains a species of a dipolar molecule (e.g., water molecules) at a relatively low pressure. The cavity is hermetically sealed and a radio frequency (RF) signal is injected into the cavity at a frequency that approximately equals the absorption frequency of the dipolar molecules in the cavity. For water molecules, the absorption frequency is 183.31 GHz. The disclosure spectroscopy cell can be used for a variety of applications such as a clock generator to produce a clock signal at 183.31 GHz that does not vary with temperature, pressure, or process.
The pressure inside the cavity is relatively low. In the example of water molecules, the pressure may be approximately 0.1 millibars (mbars), although there is a range of acceptable pressures. If argon molecules were used, for example, the pressure may be several atmospheres. Pressures that are too high result in an increased width of the absorption peaks with respect to frequency and thus difficulty in locating the local minimum at the absorption frequency. Pressures that are too low results in so few molecules in the cavity that the signal amplitude is too small and thus the high signal-to-noise ratio is too high. In general, it is desirable to have as many molecules in the cavity to provide an acceptable signal amplitude but not so many molecules for a given size cavity that the pressure is too high for successful identification of the absorption peak.
In the disclosed embodiments, the cavity in the spectroscopy cell is a resonant cavity. As a resonant cavity, an RF signal injected into the cavity at the resonant frequency of the cavity cause the electromagnetic waves to reinforce. The quality (Q) factor of a resonant cavity can be relatively high, which increases the stability of the spectroscopy cell. In one embodiment, a spectroscopy cell is made from a semiconductor substrate that is processed to form the resonant cavity.
At
Referring still to
Some embodiments do not include the center post in the cavity.
The shape and size of the cavity 125 can vary between embodiments. In general, the cavity is sized to resonate at a particular frequency, or range of frequencies. The size of the cavity scales with the frequency. To achieve resonant frequencies in the sub-10 GHz range, the cavity will grow quite large (on the order of cm). As demonstrated above, this dimension can be dramatically reduced with post loading. For example, an octagonal cavity etched in silicon resonating near 180 GHz would have a diameter of approximately 2.75 mm on the top of the cavity & 2.2 mm at the bottom. However, mode selection and excitation structures play a significant role in the sizing of the cavity. The resonant frequency of the cavity 125 includes the absorption frequency of the particular dipolar molecule species trapped inside the cavity (e.g., 183.31 GHz for water molecules).
As noted above, the spectroscopy cell includes a resonant cavity that has either only one port or multiple ports.
Certain terms are used throughout the above description and claims to refer to particular system components. As one skilled in the art will appreciate, different parties may refer to a component by different names. This document does not intend to distinguish between components that differ in name but not function. In the above discussion and in the claims, the terms “including” and “comprising” are used in an open-ended fashion, and thus should be interpreted to mean “including, but not limited to . . . .” Also, the term “couple” or “couples” is intended to mean either an indirect or direct wired or wireless connection. Thus, if a first device couples to a second device, that connection may be through a direct connection or through an indirect connection via other devices and connections. The recitation “based on” is intended to mean “based at least in part on.” Therefore, if X is based on Y, X may be a function of Y and any number of other factors.
The above discussion is meant to be illustrative of the principles and various embodiments of the present invention. Numerous variations and modifications will become apparent to those skilled in the art once the above disclosure is fully appreciated. It is intended that the following claims be interpreted to embrace all such variations and modifications.
Number | Name | Date | Kind |
---|---|---|---|
4147431 | Mann | Apr 1979 | A |
4826616 | Tanino | May 1989 | A |
5107231 | Knox | Apr 1992 | A |
5198786 | Russell et al. | Mar 1993 | A |
5218373 | Heckaman | Jun 1993 | A |
5412186 | Gale | May 1995 | A |
5459324 | Fima | Oct 1995 | A |
5821836 | Katehi | Oct 1998 | A |
6131256 | Dydyk et al. | Oct 2000 | A |
6236366 | Yamamoto et al. | May 2001 | B1 |
6287874 | Hefti | Sep 2001 | B1 |
6362706 | Song et al. | Mar 2002 | B1 |
6498550 | Miller et al. | Dec 2002 | B1 |
6630359 | Caillat et al. | Oct 2003 | B1 |
6670866 | Ella et al. | Dec 2003 | B2 |
6842088 | Yamada et al. | Jan 2005 | B2 |
6989723 | Komuro et al. | Jan 2006 | B2 |
6998691 | Baugh | Feb 2006 | B2 |
7388454 | Ruby et al. | Jun 2008 | B2 |
7408428 | Larson, III | Aug 2008 | B2 |
8098208 | Ficker et al. | Jan 2012 | B2 |
8268642 | Yoshitomi et al. | Sep 2012 | B2 |
8293661 | Yamazaki | Oct 2012 | B2 |
8586178 | Schwanke et al. | Nov 2013 | B2 |
9436902 | Koepp et al. | Sep 2016 | B1 |
9529334 | Herbsommer et al. | Dec 2016 | B2 |
9735754 | Shin et al. | Aug 2017 | B2 |
20020038989 | Larson, III | Apr 2002 | A1 |
20020068018 | Pepper | Jun 2002 | A1 |
20020098611 | Chang et al. | Jul 2002 | A1 |
20030015707 | Bosco et al. | Jan 2003 | A1 |
20030048500 | Fala et al. | Mar 2003 | A1 |
20030107459 | Takahashi et al. | Jun 2003 | A1 |
20040142484 | Berlin | Jul 2004 | A1 |
20040166577 | Storek et al. | Aug 2004 | A1 |
20050023932 | Inoue et al. | Feb 2005 | A1 |
20060022761 | Abeles | Feb 2006 | A1 |
20060076632 | Palmateer et al. | Apr 2006 | A1 |
20060144150 | Wu | Jul 2006 | A1 |
20070189359 | Chen et al. | Aug 2007 | A1 |
20080319285 | Hancock | Dec 2008 | A1 |
20100182102 | Kuypers et al. | Jul 2010 | A1 |
20100259334 | Briggs | Oct 2010 | A1 |
20100327701 | Grannen et al. | Dec 2010 | A1 |
20110140971 | Schwanke et al. | Jun 2011 | A1 |
20120266681 | Baumann et al. | Oct 2012 | A1 |
20130176703 | Hopper et al. | Jul 2013 | A1 |
20140155295 | Hindson et al. | Jun 2014 | A1 |
20140210835 | Hong et al. | Jul 2014 | A1 |
20140347074 | Nadeau | Nov 2014 | A1 |
20140368376 | Nadeau et al. | Dec 2014 | A1 |
20140368377 | Nadeau et al. | Dec 2014 | A1 |
20140373599 | Trombley et al. | Dec 2014 | A1 |
20150144297 | Toivonen et al. | May 2015 | A1 |
20150123748 | Stevenson | Jul 2015 | A1 |
20150277386 | Passilly et al. | Oct 2015 | A1 |
20160091663 | Taylor | Mar 2016 | A1 |
20160233178 | Lamy et al. | Aug 2016 | A1 |
20170073223 | Nasiri et al. | Mar 2017 | A1 |
20170125660 | Stephanou et al. | May 2017 | A1 |
20170130102 | Campbell et al. | May 2017 | A1 |
20180159547 | Herbsommer et al. | Jun 2018 | A1 |
Number | Date | Country |
---|---|---|
6428974 | Jan 1989 | JP |
WO2014037016 | Mar 2014 | WO |
2016161215 | Oct 2016 | WO |
Entry |
---|
International Search Report for PCT/US2018/050253 dated Jan. 10, 2019. |
Alvarez, A.L. et al; “The Application of Microencapsulation Techniques in the Treatment of Endodontic and Periodontal Diseases” Pharmaceutics; 2011 abstract p. 540-548. |
Steinberg, D. et al; “A New Degradable Controlled Release Device for Treatment of Periodontal Disease: In Vitro Release Study”; J. Periodontology; 1990; p. 393 lines 1-17; p. 394 col. 1 lines 5-14. |
Xiong, R. et al.; “Towards Theranostic Multicompartment Microcapsules: in situ Diagnostics and Laser-induced Treatment”, Theranostics; 2013; pp. 145-149. |
International Search Report for PCT/US2018/049513 dated Nov. 15, 2018. |
International Search Report for PCT/US2018/049940 dated Dec. 13, 2018. |
International Search Report for PCT/US2018/049949 dated Dec. 13, 2018. |
International Search Report for PCT/US2018/049949 dated Dec. 27, 2018. |
International Search Report for PCT/US2018/047105 dated Dec. 27, 2018. |
Number | Date | Country | |
---|---|---|---|
20190072595 A1 | Mar 2019 | US |