Number | Name | Date | Kind |
---|---|---|---|
4603468 | Lam | Aug 1986 | |
4654131 | Miller et al. | Mar 1987 | |
4686758 | Liu et al. | Aug 1987 | |
5214295 | Manning | May 1993 | |
5334682 | Manning et al. | Aug 1994 | |
5348899 | Dennison et al. | Sep 1994 | |
5411909 | Manning et al. | May 1995 | |
5616934 | Dennison et al. | Apr 1997 |
Entry |
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S. Wolf & R.N. Tauber, "Silicon Processing for the VLSI Era" vol. I, p. 195, 1986. |
S. Wolf, "Silicon Processing for the VLSI Era" vol. II, pp. 393-399, 1990. |
S. Wolf "Silicon Porcessing for the VLSI Era" vol. II, pp. 144-147, 572-581, Jun. 1990. |