Number | Name | Date | Kind |
---|---|---|---|
4381201 | Sakurai | Apr 1983 | |
4487635 | Kugimiya et al. | Dec 1984 | |
4498226 | Inoue et al. | Feb 1985 | |
4902637 | Kondou et al. | Feb 1990 | |
5006913 | Sugahara et al. | Apr 1991 | |
5407837 | Eklund | Apr 1995 | |
5429961 | Woo et al. | Jul 1995 | |
5470776 | Ryou | Nov 1995 | |
5473181 | Schwalke et al. | Dec 1995 | |
5492851 | Ryou | Feb 1996 | |
5573963 | Sung | Nov 1996 | |
5612552 | Owens | Mar 1997 | |
5723378 | Sato | Mar 1998 | |
5736415 | Chang et al. | Apr 1998 | |
5808319 | Gardner et al. | Sep 1998 | |
5950082 | Gardner | Sep 1999 |
Number | Date | Country |
---|---|---|
358175853A | Oct 1983 | JPX |
Entry |
---|
Vol. 2 S. Wolf, Silicon Processing for the VLSI Era, Lattice Press 1990, pp. 341-345. |