Claims
- 1. A beam detection system for use with an illumination system, to enable detection of beam misalignment in four degrees of freedom, comprising:
(a) a beam splitter disposed in an illumination system light path, said illumination system light path originating in said illumination system, said beam splitter separating an illumination system light beam traveling along the illumination system light path into a first beam that is directed along a first light path and a second beam that is directed along a second light path; (b) a first position sensitive detector disposed in said first light path to receive said first beam, said first position sensitive detector determining an angular error associated with said illumination system light beam; and (c) a second position sensitive detector disposed in said second light path to receive said second beam; said second position sensitive detector determining at positional error associated with said illumination system light beam.
- 2. The beam alignment system of claim 1, further comprising a first optical element disposed such that a front focal plane of said first optical element is disposed facing a source of said illumination system light path, and a rear focal plane of said first optical element is disposed facing said beam splitter.
- 3. The beam alignment system of claim 1, further comprising a second optical element disposed such that a front focal plane of said second optical element is disposed facing a source of said illumination system light path, and a rear focal plane of said second optical element is disposed facing said second position sensitive detector.
- 4. The beam alignment system of claim 1, further comprising a first and second optical element, disposed such that light reaching said first position sensitive detector from said illumination system light path passes through said first optical element but not said second optical element, and light reaching said second position sensitive detector from said illumination system light path passes through both said first optical element and said second optical element.
- 5. The beam alignment system of claim 4, wherein said beam splitter is disposed between said first and second optical elements.
- 6. The beam alignment system of claim 1, wherein said beam splitter directs said first beam by reflection and directs said second beam by transmission.
- 7. The beam alignment system of claim 6, wherein a transmission/reflection ratio of said beam splitter is substantially 50/50.
- 8. A beam detection system for use with an illumination system, to enable detection of beam misalignment in four degrees of freedom, comprising:
(a) a first optical element disposed in an illumination system light path, said illumination system light path originating in said illumination system, such that a front focal plane of said first optical element is disposed facing a source of said illumination system light path; (b) a beam splitter disposed in said illumination system light said illumination system light, said beam splitter receiving light from said illumination system that passes through said first optical element, said beam splitter separating an illumination system light beam traveling along the illumination system light path into a first beam that is directed along a first light path and a second beam that is directed along a second light path; (c) a first position sensitive detector disposed in said first light path to receive said first beam, said first position sensitive detector determining an angular error associated with said illumination system light beam; (d) a second optical element disposed in said second light path, such that a front focal plane of said second optical element is disposed facing a source of said illumination system light path; and (e) a second position sensitive detector disposed in said second light path to receive said second beam, such that a rear focal plane of said second optical element is disposed facing said second position detector, said second position sensitive detector determining at positional error associated with said illumination system light beam.
- 9. The beam alignment system of claim 8, wherein said beam splitter is disposed between said first and second optical elements.
- 10. The beam alignment system of claim 8, wherein said beam splitter directs said first beam by reflection and directs said second beam by transmission.
- 11. The beam alignment system of claim 8, wherein a transmission/reflection ratio of said beam splitter is substantially 50/50.
- 12. The beam alignment system of claim 8, wherein said illumination system light path and said second light path share a common axis.
- 13. The beam alignment system of claim 8, wherein a focal length of said first optical element is smaller than a focal length of said second optical element.
- 14. A beam detection system for use with an illumination system, to enable detection of beam misalignment in four degrees of freedom, comprising:
(a) a beam splitter disposed in an illumination system light path, said illumination system light path originating in said illumination system, said beam splitter separating an illumination system light beam traveling along the illumination system light path into a first beam that is directed along a first light path and a second beam that is directed along a second light path; (b) a first position sensitive detector disposed in said first light path to receive said first beam, said first position sensitive detector determining an angular error associated with said illumination system light beam; and (c) a second position sensitive detector disposed in said second light path to receive said second beam; said second position sensitive detector determining at positional error associated with said illumination system light beam.
RELATED APPLICATIONS
[0001] This application is a continuation-in-part of U.S. patent application Ser. No. 09/689,172, filed on Oct. 12, 2000 and is also based on provisional application Ser. No. 60/240,125, filed on Oct. 12, 2000, the benefits of the filing dates of which are hereby claimed under 35 U.S.C. §§ 119(e) and 120.
Provisional Applications (1)
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Number |
Date |
Country |
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60240125 |
Oct 2000 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09689172 |
Oct 2000 |
US |
Child |
09976465 |
Oct 2001 |
US |