Claims
- 1. A method of mastering a disk, comprising:
coating a disk with a layer of a photoresist; positioning a flying head employing a high NA lens over the surface of the disk by a spacing less than one wavelength of an input laser beam; and directing the input laser beam through the lens in the flying head to change the properties of the photoresist coating to achieve a fine track pitch.
- 2. The method of claim 1, wherein the lens is a solid immersion lens.
- 3. The method of claim 1, wherein the lens is a GRIN lens.
- 4. The method of claim 1, wherein the NA is greater than about 0.9.
- 5. The method of claim 1, wherein the directing step includes passing the laser beam through an objective lens.
- 6. The method of claim 1, wherein the disk is a thick glass mastering blank disk.
- 7. The method of claim 2, wherein the SIL lens is hemispherical.
- 8. The method of claim 2, wherein the SIL lens is super-hemispherical.
- 9. The method of claim 2, wherein the SIL lens is configured between a hemispherical lens and super-hemispherical lens.
- 10. The method of claim 1, wherein the optical distance between the lens and the disk is less than a quarter of a wavelength of the laser beam.
- 11. The method of claim 1, further comprising the step of modulating the laser beam with a light modulator.
- 12. The method of claim 11, wherein the light modulator is an electro-optic modulator or an acousto-optic modulator.
- 13. The method of claim 11, wherein the track pitch is less than about 0.25 microns.
- 14. A method for mastering a disk for data storage, comprising:
coating a disk with a layer of a photoresist; positioning a flying head employing a lens of a high numerical aperture (NA) over the surface of the disk by a distance less than one wavelength of an input laser beam; directing the input laser beam through the lens in the flying head to change the properties of the photoresist coating, whereby to achieve a track of a first pitch; moldably replicating the disk to a first-surface rewritable disk; and writing tracks of a second pitch between the tracks of the first pitch.
- 15. The method of claim 14, wherein the second pitch is finer than the first pitch.
- 16. The method of claim 14, further comprising the step of modulating the laser beam with a light modulator.
- 17. The method of claim 16, wherein the light modulator is an electro-optic modulator or an acousto-optic modulator.
- 18. A device for mastering disks, comprising:
a mount; a laser operatively coupled to the mount; a flying head coupled to said mount, the flying head including a high NA lens through which light from the laser passes; and a disk holder coupled to said mount, such that the flying head is configured and arranged to fly over a disk disposed on the disk holder; wherein a distance between the flying head and a disk disposed on the disk holder is less than a fraction of a wavelength.
- 19. The device as in claim 18, wherein the high NA lens is selected from the group consisting of a hemispherical SIL lens, a super-hemispherical SIL lens, a SIL lens between a hemispherical and a super-hemispherical lens, and a GRIN lens.
- 20. The device as in claim 18, wherein the laser emits light at a UV wavelength.
- 21. The device as in claim 18, wherein the NA is greater than about 0.9.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of U.S. patent application Ser. No. 09/500,695 filed Feb. 9, 2000; which is a divisional of U.S. patent application Ser. No. 08/846,916 filed Apr. 29, 1997 (now U.S. Pat. No. 6,243,350). Further, U.S. patent application Ser. No. 08/846,916 is a CIP of U.S. patent application Ser. No. 08/641,513 filed May 1, 1996 (now abandoned), Ser. No. 08/657,145 filed Jun. 3, 1996 (now U.S. Pat. No. 6,270,696), Ser. No. 08/692,581 filed Aug. 5, 1996 (now abandoned), Ser. No. 08/720,808 filed Oct. 1, 1996 (now U.S. Pat. No. 5,936,928), Ser. No. 08/764,175 filed Dec. 13, 1996 (now U.S. Pat. No. 5,793,584), and Ser. No. 08/795,606 filed Feb. 5, 1997 (now U.S. Pat. No. 5,828,482). The disclosure of the above patent applications are incorporated herein by reference as part of this application.
Divisions (2)
|
Number |
Date |
Country |
Parent |
09500695 |
Feb 2000 |
US |
Child |
10173495 |
Jun 2002 |
US |
Parent |
08846916 |
Apr 1997 |
US |
Child |
09500695 |
Feb 2000 |
US |
Continuation in Parts (6)
|
Number |
Date |
Country |
Parent |
08641513 |
May 1996 |
US |
Child |
08846916 |
Apr 1997 |
US |
Parent |
08657145 |
Jun 1996 |
US |
Child |
08846916 |
Apr 1997 |
US |
Parent |
08692581 |
Aug 1996 |
US |
Child |
08846916 |
Apr 1997 |
US |
Parent |
08720808 |
Oct 1996 |
US |
Child |
08846916 |
Apr 1997 |
US |
Parent |
08764175 |
Dec 1996 |
US |
Child |
08846916 |
Apr 1997 |
US |
Parent |
08795606 |
Feb 1997 |
US |
Child |
08846916 |
Apr 1997 |
US |