Claims
- 1. A method of manufacturing a nitride semiconductor light emitting device, said device comprising an active layer provided by depositing group-3 nitride semiconductor single-crystal layers (AlxGa1−x)1−yInyN (0≦x≦1, 0≦y≦1), said active layer having a predetermined bandgap, and a barrier layer provided adjacent to said active layer, said barrier layer having a greater bandgap than the bandgap of said active layer, said method comprising the steps of:forming a pit defining a recess attributable to a threading dislocation in said semiconductor layers formed on a substrate in said active layer of group-3 nitride semiconductor single-crystal layers; and depositing a material of said barrier layer on said active layer to form a barrier portion spreading around said threading dislocation, said barrier portion having an interface defined by a side surface of said recess.
- 2. A method of manufacturing a nitride semiconductor light emitting device according to claim 1, wherein said step for forming the pit comprises a step of etching said active layer after said active layer is formed.
- 3. A method of manufacturing a nitride semiconductor light emitting device according to claim 2, wherein in the step of etching, the etching is terminated when erosion along said threading dislocation partially reaches said semiconductor layer.
- 4. A method of manufacturing a nitride semiconductor light emitting device according to claim 1, wherein said step for forming the pit comprises a step of forming said semiconductor layers at a temperature within a range of 600-850° C. prior to the formation of said active layer.
- 5. A method of manufacturing a nitride semiconductor light emitting device according to claim 1, further comprising the step of forming a low temperature barrier layer of substantially the same material as that of said barrier layer at substantially the same temperature as a growth temperature of said active layer between said step of forming the pit and said step of depositing the material.
- 6. A method of manufacturing a nitride semiconductor light emitting device according to claim 5, wherein said low temperature barrier layer has a composition ratio of AlN less than a composition ratio of said barrier layer.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11-31122 |
Feb 1999 |
JP |
|
Parent Case Info
This application is a division of application Ser. No. 09/497,695 filed Feb. 8, 2000, now U.S. Pat. No. 6,329,667.
US Referenced Citations (20)