Claims
- 1. A method for improving the adherence of a polymeric material to an inorganic, unprimed substrate comprising,
- priming said substrate with at least one organosilane compound having at least one alkylsilyl moiety and at least one hydrolyzable leaving group bound to silicon;
- reacting said at least one organosilane compound during priming with said substrate under conditions sufficient to silylate said substrate with a surface layer comprising the alkylsilyl moiety, wherein said hydrolyzable leaving group reacts with said substrate to form by-products having a pH less than or equal to about 7; and
- applying said polymeric material to said silylated substrate.
- 2. The method of claim 1 wherein the substrate is selected from the group consisting of at least one of single crystal silicon, polysilicon, silicon dioxide, silicon nitride, aluminum, aluminum oxide, copper, copper oxide, titanium, titanium nitride, titanium tungsten, boron phosphorus silicon glass, spin-on-glass, and silicides.
- 3. The method of claim 1 wherein said polymeric material is a photoresist which comprises a polymer selected from the group consisting of polyvinylphenol, polyhydroxystyrene, poly(t-butyl-carboxy) styrene, polyfumerates, poly(t-butoxystyrene), polyisoprenes, formaldehyde novolacs, and polyacrylic esters.
- 4. The method of claim 3 wherein the photoresist further comprises a cyanurate and a photoinitiator selected from the group consisting of onium salts, diazonaphthenates, and azides.
- 5. The method of claim 1, wherein the organosilane compound is a trialkylsilane compound.
- 6. The method according to claim 5, wherein the trialkylsilane compound has the formula: ##STR8## wherein X is O or NR;
- Y is O, CH.sub.2, CHR, CHOR, CRR, or NR and
- R is hydrogen, saturated C.sub.1 -C.sub.8 alkyl, saturated C.sub.4 -C.sub.6 cyclic alkyl, unsaturated C.sub.1 -C.sub.8 alkyl, unsaturated C.sub.4 -C.sub.6 cylic alkyl, fluorinated C.sub.2 -C.sub.10 alkyl, fluorinated C.sub.5 -C.sub.8 cyclic alkyl, trialkylsiloxy, trialkylsilyl, C.sub.1 -C.sub.12 alkoxy, phenyl, fluorophenyl, phenethyl, or C.sub.3 -C.sub.6 alkyl ketones.
- 7. The method according to claim 1 wherein the organosilane compound has the formula: ##STR9## where R.sup.2 is saturated C.sub.1 -C.sub.6 alkyl, saturated C.sub.3 -C.sub.8 cyclic alkyl, unsaturated C.sub.2 -C.sub.8 alkyl, unsaturated C.sub.4 -C.sub.8 cyclic alkyl, fluorinated C.sub.1 -C.sub.8 alkyl, fluorinated C.sub.5 -C.sub.8 cyclic alkyl, phenyl, fluorinated phenyl, C.sub.3 -C.sub.6 alkyl ketones, C.sub.2 -C.sub.9 alkyl ether, C.sub.3 -C.sub.6 unsaturated alkyl ketone or, fluorinated alkyl ether.
- 8. The method of claim 7 wherein R.sup.2 is selected from the group consistinq of said fluorinated phenyl and said fluorinated alkyl ether.
- 9. The method according to claim 7 wherein R.sup.2 is trifluoromethyl.
- 10. The method according to claim 1 wherein the organosilane compound has the formula: ##STR10## wherein R.sup.3 is straight or branched chain saturated alkyl.
- 11. The method of claim 1 wherein the hydrolyzable group is selected from the group consisting of acetates, carboxylates, enols, alkoxides, sulfates and amides.
- 12. The method according to claim 5 wherein the trialkylsilane compound is selected from the group consisting of O-trimethylsilylacetate, isopropenoxytrimethylsilane, N-methyltrimethylsilyltrifluoroacetamide, trimethylmethoxysilane and trimethylethoxysilane.
- 13. The method of claim 1 wherein the organosilane compound is reacted as a vapor with said substrate at temperatures from about ambient to about 250.degree. F. and at pressures from about atmospheric pressure to less than about 1 torr.
- 14. The method of claim 1 wherein said organosilane is a dialkylsilane having two reactive hydrolyzable groups bound to silicon.
- 15. The method of claim 14 wherein said dialkylsilane is selected from the group consisting of dimethyldimethoxysilane and dimethyldiacetoxysilane.
- 16. A method for improving the adherence of a polymeric material to an inorganic, unprimed substrate comprising,
- priming said substrate with at least one organosilane compound having at least one hydrolyzable leaving group bound to silicon and selected from the group consisting of O-trimethylsilylacetate, O-trimethylsilylproprionate, O-trimethylsilylbutyrate, trimethylsilyltrifluoroacetate, trimethylmethyoxysilane, N-methyltrimethylsilyltrifluoroacetamide, O-trimethylsilylacetylacetone, isopropenoxytrimethylsilane, bis(trimethylsilyl)trifluoroacetamide, methyltrimethylsilyldimethylketone acetate, and trimethylethoxysilane,
- reacting said at least one organosilane compound during priming with said substrate under conditions sufficient to silylate said substrate, wherein said hydrolyzable leaving group reacts with said substrate to form by-products having a pH less than or equal to about 7; and
- applying said polymeric material to said silylated substrate.
- 17. The method of claim 16 wherein said substrate is selected from the group consisting of single crystal silicon, polysilicon, silicon dioxide, silicon nitride, aluminum, aluminum oxide, copper, copper oxide, titanium, titanium nitride, titanium tungsten, boron phosphorus silicon glass, spin-on-glass, metal oxides, and silicides.
- 18. The method according to claim 1, further comprising priming said substrate with said organosilane compound in a liquid form.
- 19. The method according to claim 1, further comprising providing said organosilane compound in a solvent solution and priming said substrate with said solution in vapor form.
- 20. The method according to claim 1 further comprising providing said organosilane compound in a solvent solution and priming said substrate with said solution in liquid form.
CROSS-REFERENCE TO RELATED APPLICATION
This is a continuation of application Ser. No. 08/343,163, filed Nov. 22, 1994, now abandoned.
US Referenced Citations (17)
Continuations (1)
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Number |
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Country |
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343163 |
Nov 1994 |
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