Number | Date | Country | Kind |
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9-187763 | Jun 1997 | JPX | |
9-219312 | Jul 1997 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5433651 | Lustig et al. | Jul 1995 | |
5649849 | Pileri et al. | Jul 1997 | |
5724144 | Muller et al. | Mar 1998 |
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"Recent Advances in Optical Interference Measurement Methods", Yatagai, Precision Machinery Apr. 1985, pp. 65-72. |
"Absolute Measurement of Surface Contours Using Interferometers", Nagahama, Lecture text for 16.sup.th Symposium on Optics, 1991, Lecture no. 3, pp. 55-58. |