measurement during deposition or removal of the layer

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CPC
G01B11/0683

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GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B11/00Measuring arrangements characterised by the use of optical means

Current Industry

G01B11/0683measurement during deposition or removal of the layer

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,074,076
- Issue date Aug 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Soichiro Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical metrology models for in-line film thickness measurements
- Patent number 12,062,583
- Issue date Aug 13, 2024
- Applied Materials Israel Ltd.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vacuum processing apparatus and vacuum processing method
- Patent number 12,062,530
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-invasive quantitative multilayer assessment method and resultin...
- Patent number 12,025,425
- Issue date Jul 2, 2024
- GE INFRASTRUCTURE TECHNOLOGY LLC
- Johannes Clemens Schab
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Grant
Thin film, in-situ measurement through transparent crystal and tran...
- Patent number 12,009,191
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Patrick Tae
- G01 - MEASURING TESTING
Information Patent Grant
Endpoint detection system for enhanced spectral data collection
- Patent number 11,965,798
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Pengyu Han
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,911,867
- Issue date Feb 27, 2024
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for determining a layer thickness in a multilayer film
- Patent number 11,614,320
- Issue date Mar 28, 2023
- HCH. KÜNDIG & CIE AG
- Markus Hänggli
- G01 - MEASURING TESTING
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Predetermining the thickness of a coating
- Patent number 11,592,281
- Issue date Feb 28, 2023
- Siemens Energy Global GmbH & Co. KG
- Alexandr Sadovoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical monitor
- Patent number 11,542,596
- Issue date Jan 3, 2023
- Viavi Solutions Inc.
- Markus K. Tilsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating substrates
- Patent number 11,519,065
- Issue date Dec 6, 2022
- Singulus Technologies AG
- Berthold Ocker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-invasive quantitative multilayer assessment method and resultin...
- Patent number 11,506,479
- Issue date Nov 22, 2022
- General Electric Company
- Johannes Clemens Schab
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Grant
Semiconductor substrate measuring apparatus and plasma treatment ap...
- Patent number 11,488,875
- Issue date Nov 1, 2022
- Samsung Electronics Co., Ltd.
- Junbum Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching apparatus and etching method thereof
- Patent number 11,443,928
- Issue date Sep 13, 2022
- Winbond Electronics Corp.
- Shih-Chieh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Eliminating internal reflections in an interferometric endpoint det...
- Patent number 11,421,977
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Lei Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Height detection apparatus and coating apparatus equipped with the...
- Patent number 11,402,195
- Issue date Aug 2, 2022
- NTN Corporation
- Hiroaki Ohba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Adaptive control of coating thickness
- Patent number 11,385,045
- Issue date Jul 12, 2022
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptive control of coating thickness
- Patent number 11,385,047
- Issue date Jul 12, 2022
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptive control of coating thickness
- Patent number 11,385,046
- Issue date Jul 12, 2022
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptive control of coating thickness
- Patent number 11,385,048
- Issue date Jul 12, 2022
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Broadband optical monitoring
- Patent number 11,377,728
- Issue date Jul 5, 2022
- EVATEC AG
- Stephan Waldner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Height detection apparatus and coating apparatus equipped with the...
- Patent number 11,326,871
- Issue date May 10, 2022
- NTN Corporation
- Hiroaki Ohba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Process for the manufacturing of a steel strip for packaging and as...
- Patent number 11,214,873
- Issue date Jan 4, 2022
- Arcelormittal
- Mathias Stouff
- G01 - MEASURING TESTING
Information Patent Grant
Method and coating system for coating cavity walls
- Patent number 11,204,238
- Issue date Dec 21, 2021
- Sturm Maschinen- & Anlagenbau GmbH
- Patrick Wimmer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for determining material removal and device for the beam mac...
- Patent number 11,162,778
- Issue date Nov 2, 2021
- Carl Zeiss SMT GmbH
- Steffen Bezold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing substrate for acoustic wave device
- Patent number 11,165,408
- Issue date Nov 2, 2021
- Disco Corporation
- Jun Abatake
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method for measuring thickness
- Patent number 11,022,427
- Issue date Jun 1, 2021
- SK Hynix Inc.
- Seung Jae Moon
- G01 - MEASURING TESTING
Information Patent Grant
Growth rate detection apparatus, vapor deposition apparatus, and va...
- Patent number 11,022,428
- Issue date Jun 1, 2021
- NUFLARE TECHNOLOGY, INC.
- Yasushi Iyechika
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...
- Publication number 20240318302
- Publication date Sep 26, 2024
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Cunding LIU
- G01 - MEASURING TESTING
Information Patent Application
THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRAN...
- Publication number 20240290592
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Patrick Tae
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED IO...
- Publication number 20240280357
- Publication date Aug 22, 2024
- DELMIC IP B.V.
- Daan Benjamin BOLTJE
- G01 - MEASURING TESTING
Information Patent Application
ENDPOINT DETECTION SYSTEM FOR ENHANCED SPECTRAL DATA COLLECTION
- Publication number 20240230462
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Pengyu Han
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IN-SITU WAFER THICKNESS AND GAP MONITORING USING THROUGH BEAM LASER...
- Publication number 20240210163
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Goon Heng WONG
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MEASURING DEVICE AND FILM THICKNESS MEASURING METHOD
- Publication number 20240125589
- Publication date Apr 18, 2024
- Hamamatsu Photonics K.K.
- Kenichi OHTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and device for measuring the thickness of thin films even on...
- Publication number 20230282526
- Publication date Sep 7, 2023
- Fyzikální ústav AV CR, v. v. i.
- MARTIN LEDINSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENDPOINT DETECTION METHOD FOR CHAMBER COMPONENT REFURBISHMENT
- Publication number 20230184539
- Publication date Jun 15, 2023
- ASM IP HOLDING B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20230158636
- Publication date May 25, 2023
- EBARA CORPORATION
- Masaki KINOSHITA
- G01 - MEASURING TESTING
Information Patent Application
NON-INVASIVE QUANTITATIVE MULTILAYER ASSESSMENT METHOD AND RESULTIN...
- Publication number 20230040179
- Publication date Feb 9, 2023
- GENERAL ELECTRIC COMPANY
- Johannes Clemens SCHAB
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...
- Publication number 20230011748
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
ETCHING METHOD OF ETCHING APPARATUS
- Publication number 20220359173
- Publication date Nov 10, 2022
- WINBOND ELECTRONICS CORP.
- Shih-Chieh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM THICKNESS MEASURING DEVICE, FILM FORMING SYSTEM, AND FILM THIC...
- Publication number 20220260362
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
ETCHING APPARATUS AND ETCHING METHOD THEREOF
- Publication number 20220246410
- Publication date Aug 4, 2022
- WINBOND ELECTRONICS CORP.
- Shih-Chieh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES
- Publication number 20220228287
- Publication date Jul 21, 2022
- LAM RESEARCH CORPORATION
- Andrew James PFAU
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INSPECTING NONAQUEOUS ELECTROLYTE SECONDARY BATTERY SEPA...
- Publication number 20220013858
- Publication date Jan 13, 2022
- Sumitomo Chemical Company, Limited
- Shun NAKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRAN...
- Publication number 20210391157
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Patrick Tae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE CONTROL OF COATING THICKNESS
- Publication number 20210207948
- Publication date Jul 8, 2021
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADAPTIVE CONTROL OF COATING THICKNESS
- Publication number 20210207947
- Publication date Jul 8, 2021
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADAPTIVE CONTROL OF COATING THICKNESS
- Publication number 20210207949
- Publication date Jul 8, 2021
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADAPTIVE CONTROL OF COATING THICKNESS
- Publication number 20210207950
- Publication date Jul 8, 2021
- Rolls-Royce North American Technologies, Inc.
- Keith Bourne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND A METHOD FOR ANALYZING A MULTILAYER FILM
- Publication number 20210131787
- Publication date May 6, 2021
- Hch. Kündig & Cie AG
- Markus HÄNGGLI
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR SUBSTRATE MEASURING APPARATUS AND PLASMA TREATMENT AP...
- Publication number 20210074594
- Publication date Mar 11, 2021
- Samsung Electronics Co., Ltd.
- Junbum PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062326
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
PECVD PROCESS
- Publication number 20200399756
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEIGHT DETECTION APPARATUS AND COATING APPARATUS EQUIPPED WITH THE...
- Publication number 20200378748
- Publication date Dec 3, 2020
- NTN Corporation
- Hiroaki Ohba
- G01 - MEASURING TESTING
Information Patent Application
GROWTH RATE DETECTION APPARATUS, VAPOR DEPOSITION APPARATUS, AND VA...
- Publication number 20200292299
- Publication date Sep 17, 2020
- NuFlare Technology, Inc.
- Yasushi IYECHIKA
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF COATING SUBSTRATES
- Publication number 20200224306
- Publication date Jul 16, 2020
- Singulus Technologies AG
- Berthold OCKER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-INVASIVE QUANTITATIVE MULTILAYER ASSESSMENT METHOD AND RESULTIN...
- Publication number 20200182608
- Publication date Jun 11, 2020
- GENERAL ELECTRIC COMPANY
- Johannes Clemens SCHAB
- G01 - MEASURING TESTING

measurement during deposition or removal of the layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Optical metrology models for in-line film thickness measurements

Vacuum processing apparatus and vacuum processing method

Non-invasive quantitative multilayer assessment method and resultin...

Thin film, in-situ measurement through transparent crystal and tran...

Endpoint detection system for enhanced spectral data collection

Polishing apparatus and polishing method

PECVD process

Device for determining a layer thickness in a multilayer film

PECVD process

Predetermining the thickness of a coating

Optical monitor

Method of coating substrates

Non-invasive quantitative multilayer assessment method and resultin...

Semiconductor substrate measuring apparatus and plasma treatment ap...

Etching apparatus and etching method thereof

Eliminating internal reflections in an interferometric endpoint det...

Height detection apparatus and coating apparatus equipped with the...

Adaptive control of coating thickness

Adaptive control of coating thickness

Adaptive control of coating thickness

Adaptive control of coating thickness

Broadband optical monitoring

Height detection apparatus and coating apparatus equipped with the...

Process for the manufacturing of a steel strip for packaging and as...

Method and coating system for coating cavity walls

Method for determining material removal and device for the beam mac...

Method of manufacturing substrate for acoustic wave device

Device and method for measuring thickness

Growth rate detection apparatus, vapor deposition apparatus, and va...

Patents Applicationslast 30 patents

OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...

THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRAN...

METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED IO...

ENDPOINT DETECTION SYSTEM FOR ENHANCED SPECTRAL DATA COLLECTION

IN-SITU WAFER THICKNESS AND GAP MONITORING USING THROUGH BEAM LASER...

FILM THICKNESS MEASURING DEVICE AND FILM THICKNESS MEASURING METHOD

Method and device for measuring the thickness of thin films even on...

PECVD PROCESS

ENDPOINT DETECTION METHOD FOR CHAMBER COMPONENT REFURBISHMENT

POLISHING APPARATUS AND POLISHING METHOD

NON-INVASIVE QUANTITATIVE MULTILAYER ASSESSMENT METHOD AND RESULTIN...

SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...

ETCHING METHOD OF ETCHING APPARATUS

FILM THICKNESS MEASURING DEVICE, FILM FORMING SYSTEM, AND FILM THIC...

ETCHING APPARATUS AND ETCHING METHOD THEREOF

ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES

METHOD FOR INSPECTING NONAQUEOUS ELECTROLYTE SECONDARY BATTERY SEPA...

THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRAN...

ADAPTIVE CONTROL OF COATING THICKNESS

ADAPTIVE CONTROL OF COATING THICKNESS

ADAPTIVE CONTROL OF COATING THICKNESS

ADAPTIVE CONTROL OF COATING THICKNESS

DEVICE AND A METHOD FOR ANALYZING A MULTILAYER FILM

SEMICONDUCTOR SUBSTRATE MEASURING APPARATUS AND PLASMA TREATMENT AP...

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

PECVD PROCESS

HEIGHT DETECTION APPARATUS AND COATING APPARATUS EQUIPPED WITH THE...

GROWTH RATE DETECTION APPARATUS, VAPOR DEPOSITION APPARATUS, AND VA...

METHOD OF COATING SUBSTRATES

NON-INVASIVE QUANTITATIVE MULTILAYER ASSESSMENT METHOD AND RESULTIN...