Claims
- 1. An optical barrier apparatus, comprising:a generating means for a laser beam; a laser scanning means which scans an area including a region to be inspected with said laser beam generated from said generating means by using many parallel optical beams; a semiconductor mirror galvanometer composed of many reflection mirrors which reflect individually said laser beams incident through said area including said region to be inspected from said laser scanning means; and a singular light receiving device which receives said laser beams reflected from said individual reflection mirrors constituting said semiconductor mirror galvanometer and incident through said area including said region to be inspected, wherein an anomaly in an output produced from said light receiving device is detected.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8-51768 |
Mar 1996 |
JP |
|
Parent Case Info
This appln is a Div of Ser. No. 08/930,077 which is a 371 of PCT/JP97/00742 Mar. 10, 1997.
US Referenced Citations (4)
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